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公开(公告)号：US09978579B2
公开(公告)日：2018-05-22
申请号：US15221340
申请日：2016-07-27
申请人： SCIENTA OMICRON AB
发明人： Björn Wannberg
IPC分类号： H01J49/48 , H01J37/05 , H01J49/00 , H01J49/06 , G01N23/227
CPC分类号： H01J49/48 , G01N23/2273 , G01N2223/085 , H01J37/05 , H01J49/0031 , H01J49/06 , H01J49/061 , H01J49/484 , H01J2237/0535
摘要： The present invention relates to a method for determining at least one parameter related to charged particles emitted from a particle emitting sample, e.g. a parameter related to the energies, the start directions, the start positions or the spin of the particles. The method comprises the steps of guiding a beam of charged particles into an entrance of a measurement region by means of a lens system, and detecting positions of the particles indicative of said at least one parameter within the measurement region. Furthermore, the method comprises the steps of deflecting the particle beam at least twice in the same coordinate direction before entrance of the particle beam into the measurement region. Thereby, both the position and the direction of the particle beam at the entrance of the measurement region can be controlled in a way that to some extent eliminates the need for physical manipulation of the sample. This in turn allows the sample to be efficiently cooled such that the energy resolution in energy measurements can be improved.
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公开(公告)号：US20110147585A1
公开(公告)日：2011-06-23
申请号：US12739513
申请日：2008-03-31
IPC分类号： H01J37/285
CPC分类号： H01J49/484
摘要： Charged particle energy analysers enabling simultaneous high transmission and energy resolution are described. The analysers have an electrode structure (11) comprising coaxial inner and outer electrodes (14, 15) having inner and outer electrode surfaces (IS, OS) respectively. The inner and outer electrode surfaces are defined, at least in part, by spheroidal surfaces having meridonal planes of symmetry orthogonal to a longitudinal axis of the electrode structure (11). The inner and outer electrode surfaces are generated by rotation, about the longitudinal axis, of arcs of two non-concentric circles having different radii R2 and R1 respectively, R2 being greater than R1. The distance of the outer electrode surface from the longitudinal axis in the respective meridonal plane is R01 and the distance of the inner electrode surface from the longitudinal axis in the respective plane is R02 and R1, R2, R01 and R02 have a defined relationship.
摘要翻译： 描述了实现同时高传输和能量分辨率的带电粒子能量分析器。 分析仪具有分别具有内外电极表面（IS，OS）的同轴内外电极（14,15）的电极结构（11）。 内电极表面和外电极表面至少部分地由具有与电极结构（11）的纵向轴线正交的对称面对称平面的球形表面限定。 内电极表面和外电极表面分别通过具有不同半径R2和R1的两个非同心圆的圆弧的纵轴旋转产生，R2大于R1。 外电极表面与各个子午线平面中纵轴的距离为R01，内平面与纵轴的距离为R02，R1，R2，R01，R02为关系。
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公开(公告)号：US4737639A
公开(公告)日：1988-04-12
申请号：US63806
申请日：1987-06-24
申请人： Thomas W. Rusch
发明人： Thomas W. Rusch
CPC分类号： H01J49/484 , H01J49/022 , H01J49/025 , H01J49/06
摘要： The present invention is directed to an energy analysis and detection system for surface chemical analysis which includes an input lens system for receiving charged particles, said lens system having a first lens stage for definition of analysis area and angular acceptance and a second lens stage for energy adjustment with an aperture assembly interposed between the first lens stage and second lens stage, a spherical capacitor energy analyzer for receiving the output from the input lens system and performing spectroscopic energy resolution, and a detector assembly for receiving the output from the spherical capacitor energy analyzer and detecting the charged particles.
摘要翻译： 本发明涉及一种用于表面化学分析的能量分析和检测系统，其包括用于接收带电粒子的输入透镜系统，所述透镜系统具有用于定义分析区域和角接受度的第一透镜级和用于能量的第二透镜级 通过插入在第一透镜台和第二透镜台之间的光圈组件的调节，用于接收来自输入透镜系统的输出并执行光谱能量分辨率的球面电容器能量分析器，以及用于从球形电容器能量分析器接收输出的检测器组件 并检测带电粒子。
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公开(公告)号：US3626184A
公开(公告)日：1971-12-07
申请号：US3626184D
申请日：1970-03-05
发明人： CREWE ALBERT V
CPC分类号： H01J37/28 , H01J37/045 , H01J37/05 , H01J37/22 , H01J37/244 , H01J49/484 , H01J2237/24465 , H01J2237/24475 , H01J2237/24485 , H01J2237/2449 , H01J2237/24507 , H01J2237/24585
摘要： In an electron microscope transmitted electrons are detected according to whether they are unscattered, elastically scattered or inelastically scattered by the specimen. The elastically scattered electrons are further separated according to the magnitude of the scattering. Signals from the separate detectors can be used separately or combined as desired to enhance the information obtained from a specimen.
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公开(公告)号：US5365064A
公开(公告)日：1994-11-15
申请号：US983398
申请日：1992-11-30
申请人： Gerhard Rettinghaus
发明人： Gerhard Rettinghaus
CPC分类号： H01J49/484 , H01J27/20 , H01J49/14 , H01J49/482
摘要： At an energy filter ions are deflected at the entrance side through a first electrostatic field between electrodes (3a', 3b'), traverse through a field-free volume (15) and enter through a shielding (11) into a further electrostatic deflection field between electrodes (7a', 3b'). The axes (A.sub.E, A.sub.A) of the beam entrance and exit are aligned and off-set with respect to the rotation axis (A'.sub.Z) of the cylinder forming the outermost electrode (7a').
摘要翻译： 在能量过滤器处，离子通过电极（3a'，3b'）之间的第一静电场在入口侧偏转，穿过无场体积（15）并通过屏蔽（11）进入另外的静电偏转场 在电极（7a'，3b'）之间。 光束入口和出口的轴线（AE，AA）相对于形成最外面电极（7a'）的圆筒的旋转轴线（A'Z）被排列和偏移。
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公开(公告)号：US5126565A
公开(公告)日：1992-06-30
申请号：US741030
申请日：1991-08-06
申请人： Harald Rose
发明人： Harald Rose
CPC分类号： H01J37/05 , H01J49/484 , H01J2237/2602 , H01J2237/2823
摘要： An energy selecting filter comprising a structure of four hemispheres to be transpassed successively by a beam of charged particles to be filtered. The structure is symmetrically with respect to a plane of symmetry in which the energy selecting element, such as slit or a knife-edge is introduced. In a charged particle beam apparatus such as a high resolution electron microscope the energy spread introduced by a source can adjustable be reduced to below for example 0,1 eV without introducing any beam deviation at the cost of only a small lengthening of the apparatus.
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公开(公告)号：US4942298A
公开(公告)日：1990-07-17
申请号：US235872
申请日：1988-10-20
申请人： John Comer
发明人： John Comer
CPC分类号： H01J49/025 , H01J49/484
摘要： An electron spectrometer comprising an electron source for providing a beam of electrons having a predetermined energy spectrum, and an electron selector for dispersing in energy the electrons of the beam to produce an elongate selector image, each portion of the length of which includes electrons having a predetermined respective energy. The selector image is focussed on a target to produce an elongate target image including scattered electrons having a range of energies, each portion of the length of the target image resulting from a respective portion of the length of the selector image. An analyzer disperses in energy the scattered electrons of the target image, the analyzer being orientated such that the electrons are dispersed in a direction substantially perpendicular to the length of the target image, whereby the analyzer produces a rectangular image made up of substantially parallel strips, each including electrons of a range of energies but each resulting from the scattering by the target of electrons of a respective energy.
摘要翻译： PCT No.PCT / GB87 / 00118 Sec。 371日期：1988年10月20日 102（e）日期1988年10月20日PCT提交1987年2月18日PCT公布。 公开号WO87 / 05151 日期1987年8月27日。一种包括用于提供具有预定能谱的电子束的电子源的电子能谱仪和用于将能量分散在能量中以产生细长选择器图像的电子选择器， 其长度包括具有预定的各自能量的电子。 选择器图像被聚焦在目标上以产生包括具有一定能量范围的散射电子的细长目标图像，每个部分的目标图像的长度的部分由选择器图像的长度的相应部分产生。 分析仪将能量分散在目标图像的散射电子中，分析器被定向成使得电子在基本上垂直于目标图像的长度的方向上分散，由此分析仪产生由基本平行的条形成的矩形图像， 每个都包含一定能量范围的电子，但每个都由各自能量的电子的靶的散射产生。
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公开(公告)号：US4593196A
公开(公告)日：1986-06-03
申请号：US641203
申请日：1984-08-16
申请人： Kenneth Yates
发明人： Kenneth Yates
CPC分类号： H01J49/025 , H01J49/484
摘要： A charged particle energy spectrometer, typically an electron spectrometer, comprising an electrostatic dispersive charged particle analyzer, e.g. a substantially hemispherical sector analyzer (1,6), and a detector means comprising a plurality of charged particle detectors (26-28) is described. Fringing fields at the exit of the analyzer are corrected by a fringing field corrector plate (7) containing a plurality of apertures (20, 22, 23) each aligned with one channel of the detector means. Exit beam defining slits (21, 24, 25) in a plate (12) situated in the exit focal plane of the analyzer may optionally be provided. Each aperture (20, 22, 23) is preferably the same size and shape as the single aperture used to achieve optimum correction of the fringing fields in a conventional spectrometer having a single channel detector. One or more position sensitive detectors may be used in place of some or all of the detectors (26-28).
摘要翻译： 带电粒子能量谱仪，通常是电子分光计，包括静电分散带电粒子分析仪， 描述了一个基本上半球形的扇形分析器（1,6），以及包括多个带电粒子检测器（26-28）的检测器装置。 分析仪出口处的定影场由包含多个孔（20,22,23）的边缘场校正板（7）进行校正，每个孔与检测器装置的一个通道对准。 可以可选地提供位于分析器的出射焦平面中的板（12）中的出射光束限定狭缝（21,24,25）。 每个孔（20,22,23）优选地与用于在具有单通道检测器的常规光谱仪中实现边缘场的最佳校正的单个孔相同的尺寸和形状。 可以使用一个或多个位置敏感检测器代替部分或全部检测器（26-28）。
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9.发明授权Electron impact spectrometer with an improved source of monochromatic electrons 失效具有改进的单色电子源的电子撞击光谱仪
公开(公告)号：US3806728A
公开(公告)日：1974-04-23
申请号：US34411673
申请日：1973-03-23
申请人： LINDHOLM C , ASBRINK L
发明人： ASBRINK L , LINDHOLM C
CPC分类号： H01J49/484 , H01J49/48
摘要： An electron source for generating a high intensity electron beam, the electrons of which have a limited number of discrete kinetic energies is provided. The electron source which could be used e.g. in an electron impact spectrometer, comprises a monoor di-chromatic light source, e.g., a neon plasma the light of which injected into a gas, preferably a noble gas, in order to generate photo electrons having a limited number of discrete kinetic energies.
摘要翻译： 提供了用于产生高强度电子束的电子源，其电子具有有限数量的离散动能。 可以使用的电子源。 在电子轰击光谱仪中，包括单色或双色光源，例如将氖等离子体注入气体中，优选惰性气体，以产生具有有限数量的离散动能的光电子 。
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公开(公告)号：US3733483A
公开(公告)日：1973-05-15
申请号：US3733483D
申请日：1971-02-26
申请人： ASS ELECT IND
CPC分类号： H01J49/484 , H01J49/48
摘要： An electron spectroscopy apparatus has an analyzer and a retardation lens system. In a first mode of operation, no retardation is applied, and the analyzer scans a low-energy range of the energy spectrum. In a second mode, retardation is applied, and the analyzer scans a high-energy range. The retardation is varied in synchronism with the scanning of the analyzer, so as to maintain a constant retardation factor.
摘要翻译： 电子光谱仪具有分析仪和延迟透镜系统。 在第一种操作模式下，不施加延迟，分析仪扫描能量谱的低能量范围。 在第二模式中，应用延迟，并且分析仪扫描高能量范围。 延迟与分析仪的扫描同步变化，以保持恒定的延迟因子。
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