公开(公告)号：US20080056442A1

公开(公告)日：2008-03-06

申请号：US11845540

申请日：2007-08-27

申请人： Norio Sasayama

发明人： Norio Sasayama

IPC分类号： G01N23/223

CPC分类号： G01N23/223 ,  G01N2223/076

摘要： When an X-ray focused by using an X-ray lens is irradiated to a sample, there is generated an X-ray halo component at the peripheral part of the focal point of the focused X-ray in the sample and, by this, precision of an analysis of a microscopic region becomes an issue. In order to control the shape of the X-rays from the X-ray lens, a collimator is installed between the X-ray lens and the sample, with an opening part having a tapering shape in which the opening at the side toward the sample is made smaller than that at the side toward the X-ray lens.

摘要翻译： 当通过使用X射线透镜聚焦的X射线照射到样品时，在样品中的聚焦X射线的焦点的周边部分处产生X射线晕圈成分，由此， 微观区域的分析精度成为一个问题。 为了控制来自X射线透镜的X射线的形状，在X射线透镜和样品之间安装有准直仪，开口部具有锥形形状，其中朝向样品的一侧的开口 被制成小于朝向X射线透镜的一侧的尺寸。

公开(公告)号：US07508907B2

公开(公告)日：2009-03-24

申请号：US11845540

申请日：2007-08-27

申请人： Norio Sasayama

发明人： Norio Sasayama

IPC分类号： G01N23/223 ,  G21K1/02

CPC分类号： G01N23/223 ,  G01N2223/076

摘要： When an X-ray focused by using an X-ray lens is irradiated to a sample, there is generated an X-ray halo component at the peripheral part of the focal point of the focused X-ray in the sample and, by this, precision of an analysis of a microscopic region becomes an issue. In order to control the shape of the X-rays from the X-ray lens, a collimator is installed between the X-ray lens and the sample, with an opening part having a tapering shape in which the opening at the side toward the sample is made smaller than that at the side toward the X-ray lens.

摘要翻译： 当通过使用X射线透镜聚焦的X射线照射到样品时，在样品中的聚焦X射线的焦点的周边部分处产生X射线晕圈成分，由此， 微观区域的分析精度成为一个问题。 为了控制来自X射线透镜的X射线的形状，在X射线透镜和样品之间安装有准直仪，开口部具有锥形形状，其中朝向样品的一侧的开口 被制成小于朝向X射线透镜的一侧的尺寸。

公开(公告)号：US20060226340A1

公开(公告)日：2006-10-12

申请号：US11389447

申请日：2006-03-24

申请人： Norio Sasayama ,  Akikazu Okawara ,  Satoshi Nakayama

发明人： Norio Sasayama ,  Akikazu Okawara ,  Satoshi Nakayama

IPC分类号： H01L27/00

CPC分类号： G01N23/2252 ,  H01J37/244 ,  H01J37/256 ,  H01J37/28 ,  H01J2237/24415 ,  H01J2237/2445

摘要： An optical axis adjusting mechanism for an X-ray lens, an X-ray analytical instrument and a method of adjusting an optical axis of an X-ray lens, capable of enhancing detection efficiency of an X-ray while preventing degradation of the device performance are provided. An optical axis adjusting mechanism for an X-ray lens to be implemented in an X-ray analytical instrument, includes an exit side adjusting mechanism for adjusting an exit side focal point of the X-ray lens to focus on an X-ray detector, and an entrance side adjusting mechanism for adjusting an entrance side focal point of the X-ray lens to focus on an analytical point of a sample, and the entrance side adjusting mechanism is disposed with a greater distance from the X-ray lens than a distance between the exit side adjusting mechanism and the X-ray lens.

摘要翻译： 用于X射线透镜的光轴调节机构，X射线分析仪器和调整X射线透镜的光轴的方法，能够提高X射线透镜的检测效率，同时防止器件性能的劣化 被提供。 在X射线分析仪器中实施的用于X射线透镜的光轴调节机构包括：出射侧调节机构，用于调整X射线透镜的出射侧焦点以聚焦在X射线检测器上; 以及用于调整X射线透镜的入射侧焦点以聚焦在样品的分析点上的入口侧调节机构，并且入射侧调节机构设置成距离X射线透镜更远的距离 在出射侧调节机构和X射线透镜之间。

公开(公告)号：US20060104419A1

公开(公告)日：2006-05-18

申请号：US11066034

申请日：2005-02-25

申请人： Norio Sasayama ,  Keiichi Tanaka

发明人： Norio Sasayama ,  Keiichi Tanaka

IPC分类号： G21K1/00

CPC分类号： G01N23/207 ,  G01N2223/1016 ,  G01N2223/316

摘要： A superconducting X-ray analyzer has an excitation source for irradiating an excitation beam on a surface of a sample. A detector detects X-rays reflected from the surface of the sample irradiated with the excitation beam from the excitation source. Lenses are arranged between the sample and the detector for condensing the X-rays reflected from the surface of the sample on the detector. A refrigerator having a low temperature unit is completely enclosed within a vacuum vessel for cooling the detector.

摘要翻译： 超导X射线分析仪具有用于在样品的表面上照射激发光束的激发源。 检测器检测从来自激发源的激发光束照射的样品的表面反射的X射线。 透镜布置在样品和检测器之间，用于将从样品表面反射的X射线聚集在检测器上。 具有低温单元的冰箱完全封闭在真空容器内以冷却检测器。

公开(公告)号：US07471763B2

公开(公告)日：2008-12-30

申请号：US11805664

申请日：2007-05-24

申请人： Norio Sasayama

发明人： Norio Sasayama

IPC分类号： G01N23/223

CPC分类号： G01N23/223 ,  G01N2223/076

摘要： To provide a fluorescent X-ray analysis apparatus using a polarization for effectively measuring a minute portion of a sample surface without a necessary to prepare many kinds of secondary targets. A fluorescent X-ray analysis apparatus according to the present invention includes an X-ray tube for generating an X-ray; a sample support portion for supporting a sample receiving the X-ray; a polarization filter for receiving an X-ray to be generated from the sample receiving the X-ray; and a detector for detecting the X-ray from the polarization filter. Then, the X-ray tube, the sample, the polarization filter, and the detector are arranged so that three light paths, namely, a light path from the X-ray tube to the sample, a light path from the sample to the polarization filter, and a light path from the polarization filter to the detector intersect with each other at 90 degrees.

摘要翻译： 为了提供使用极化的荧光X射线分析装置，无需制备多种二次靶，就能有效地测量样品表面的微小部分。 根据本发明的荧光X射线分析装置包括用于产生X射线的X射线管; 用于支撑接收X射线的样本的样本支撑部分; 用于接收从接收X射线的样品产生的X射线的偏振滤光器; 以及用于检测来自偏振滤光器的X射线的检测器。 然后，X射线管，样品，偏振光滤波器和检测器被布置成使得三个光路，即从X射线管到样品的光路，从样品到极化的光路 滤光器，并且从偏振滤光器到检测器的光路以90度彼此相交。

公开(公告)号：US20070280414A1

公开(公告)日：2007-12-06

申请号：US11805664

申请日：2007-05-24

申请人： Norio Sasayama

发明人： Norio Sasayama

IPC分类号： G01N23/223 ,  G01T1/36

CPC分类号： G01N23/223 ,  G01N2223/076

摘要： To provide a fluorescent X-ray analysis apparatus using a polarization for effectively measuring a minute portion of a sample surface without a necessary to prepare many kinds of secondary targets. A fluorescent X-ray analysis apparatus according to the present invention includes an X-ray tube for generating an X-ray; a sample support portion for supporting a sample receiving the X-ray; a polarization filter for receiving an X-ray to be generated from the sample receiving the X-ray; and a detector for detecting the X-ray from the polarization filter. Then, the X-ray tube, the sample, the polarization filter, and the detector are arranged so that three light paths, namely, a light path from the X-ray tube to the sample, a light path from the sample to the polarization filter, and a light path from the polarization filter to the detector intersect with each other at 90 degrees.

摘要翻译： 为了提供使用极化的荧光X射线分析装置，无需制备多种二次靶，就能有效地测量样品表面的微小部分。 根据本发明的荧光X射线分析装置包括用于产生X射线的X射线管; 用于支撑接收X射线的样本的样本支撑部分; 用于接收从接收X射线的样品产生的X射线的偏振滤光器; 以及用于检测来自偏振滤光器的X射线的检测器。 然后，X射线管，样品，偏振光滤波器和检测器被布置成使得三个光路，即从X射线管到样品的光路，从样品到极化的光路 滤光器，并且从偏振滤光器到检测器的光路以90度彼此相交。

公开(公告)号：US07289597B2

公开(公告)日：2007-10-30

申请号：US11389447

申请日：2006-03-24

申请人： Norio Sasayama ,  Akikazu Okawara ,  Satoshi Nakayama

发明人： Norio Sasayama ,  Akikazu Okawara ,  Satoshi Nakayama

IPC分类号： G21K7/00

CPC分类号： G01N23/2252 ,  H01J37/244 ,  H01J37/256 ,  H01J37/28 ,  H01J2237/24415 ,  H01J2237/2445

摘要： An optical axis adjusting mechanism for an X-ray lens, an X-ray analytical instrument and a method of adjusting an optical axis of an X-ray lens, capable of enhancing detection efficiency of an X-ray while preventing degradation of the device performance are provided. An optical axis adjusting mechanism for an X-ray lens to be implemented in an X-ray analytical instrument, includes an exit side adjusting mechanism for adjusting an exit side focal point of the X-ray lens to focus on an X-ray detector, and an entrance side adjusting mechanism for adjusting an entrance side focal point of the X-ray lens to focus on an analytical point of a sample, and the entrance side adjusting mechanism is disposed with a greater distance from the X-ray lens than a distance between the exit side adjusting mechanism and the X-ray lens.

摘要翻译： 用于X射线透镜的光轴调节机构，X射线分析仪器和调整X射线透镜的光轴的方法，能够提高X射线透镜的检测效率，同时防止器件性能的劣化 被提供。 在X射线分析仪器中实施的用于X射线透镜的光轴调节机构包括：出射侧调节机构，用于调整X射线透镜的出射侧焦点以聚焦在X射线检测器上; 以及用于调整X射线透镜的入射侧焦点以聚焦在样品的分析点上的入口侧调节机构，并且入射侧调节机构设置成距离X射线透镜更远的距离 在出射侧调节机构和X射线透镜之间。