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公开(公告)号：US20240209857A1
公开(公告)日：2024-06-27
申请号：US18512142
申请日：2023-11-17
Applicant: Pfeiffer Vacuum Technology AG
Inventor： Bernd KOCI , Jonas BECKER , Sebastian LATTA
CPC classification number: F04C25/02 , F04C27/00 , F04C2220/10 , F04C2230/91 , F04D29/083
Abstract: The present invention relates to a pump, in particular a vacuum pump, comprising a pump-active component having a coating, wherein the coating comprises an oxide layer, which is in particular formed by anodic oxidation in an acidic electrolyte and which has pores, and a fluorine-free polymer-based and/or sol-gel-based sealing, and wherein the pores of the oxide layer are at least partly covered by the sealing and/or impregnated with the sealing and/or filled with the sealing. The present invention further relates to a method of sealing a porous oxide layer.
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公开(公告)号：US20240209855A1
公开(公告)日：2024-06-27
申请号：US18545789
申请日：2023-12-19
Applicant: Pfeiffer Vacuum Technology AG
Inventor： Jonas BECKER , Jan HOFMANN , Sebastian LATTA , Heiko SCHAEFER , Maik SCHAEFER , Wolfgang SOEHNGEN
CPC classification number: F04C18/0215 , F04C25/02 , F04C27/005 , F04C2220/10
Abstract: A vacuum pump in accordance with the invention, in particular a scroll vacuum pump, comprises a first spiral element that has a first wall that extends spirally about a first axis, that extends in an axial direction from a first support, and that has a first free end face facing away from the first support, and a second spiral element that has a second wall that extends spirally about a second axis, that extends in the axial direction from a second support, and that has a second free end face facing away from the second support, wherein the first spiral element and the second spiral element are movable relative to one another and are arranged such that the first wall and the second wall sealingly engage into one another while forming pumping spaces, wherein the free end face of at least one of the walls has a recess, in particular a groove, which extends in a longitudinal direction of the wall and in which at least one seal is movably arranged, and wherein the recess is laterally bounded by at least one inner wall that extends at least sectionally, preferably continuously, obliquely to the axial direction and that is configured to cooperate with a side wall of the seal extending at least sectionally, preferably continuously, obliquely to the axial direction.
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Patent Agency Ranking
公开(公告)号：US20230287993A1
公开(公告)日：2023-09-14
申请号：US17690470
申请日：2022-03-09
Applicant: PFEIFFER VACUUM TECHNOLOGY AG
Inventor： Thomas R. HODAPP , Sean A. CASAROTTI , David W. CRONE
CPC classification number: F16K51/02 , F16K31/047 , F16K1/36 , F16K1/54
Abstract: A vacuum valve for high/ultra-high vacuum systems includes a valve housing defining a passage connecting a first and a second opening of the housing. A valve body and a complementary seat is disposed in the passage, the valve body and/or the seat including a seal and the valve body being movable in a linear axial direction along between an open position and a closed position. The valve body cooperates with the seat in the closed position so as to close the first opening gas-tightly. An electromechanical actuation unit for actuating the valve body includes an electric motor and a mechanical conversion unit with an input portion drivingly connected to the motor and an output portion drivingly connected to the valve body. The conversion unit converts a rotational output of the electrical motor into a linear movement of an output portion to move the valve body in the axial direction.
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公开(公告)号：US20250003525A1
公开(公告)日：2025-01-02
申请号：US18883203
申请日：2024-09-12
Applicant: PFEIFFER VACUUM TECHNOLOGY AG
Inventor： Thomas R. HODAPP , Sean A. CASAROTTI , David W. CRONE
Abstract: A vacuum valve for high/ultra-high vacuum systems includes a valve housing defining a passage connecting a first and a second opening of the housing. A valve body and a complementary seat is disposed in the passage, the valve body and/or the seat including a seal and the valve body being movable in a linear axial direction along between an open position and a closed position. The valve body cooperates with the seat in the closed position so as to close the first opening gas-tightly. An electromechanical actuation unit for actuating the valve body includes an electric motor and a mechanical conversion unit with an input portion drivingly connected to the motor and an output portion drivingly connected to the valve body. The conversion unit converts a rotational output of the electrical motor into a linear movement of an output portion to move the valve body in the axial direction.
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公开(公告)号：US20240344914A1
公开(公告)日：2024-10-17
申请号：US18631148
申请日：2024-04-10
Applicant: Pfeiffer Vacuum Technology AG
Inventor： Dominik KRAHL , Alexander ARNDT , Philipp SCHURIG , Rudolf KONWITSCHNY , Maik JACOB
CPC classification number: G01M3/02 , G01M3/202 , G01M3/3227 , G01M3/3254 , G01M3/3263 , G01M3/38
Abstract: A method is for the leak testing and/or leakage measurement of a component with a plurality of channels. The method includes applying a predefined input state to an input configuration of channels of the component, measuring an output state at an output configuration of channels of the component, and determining a leakage state and/or a leakage rate of the component based on the measurement. The input configuration has at least two channels of the component and the output configuration has at least one other channel of the component, or the input configuration has at least one channel of the component and the output configuration has at least two other channels of the component
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公开(公告)号：US12221961B2
公开(公告)日：2025-02-11
申请号：US18545789
申请日：2023-12-19
Applicant: Pfeiffer Vacuum Technology AG
Inventor： Jonas Becker , Jan Hofmann , Sebastian Latta , Heiko Schaefer , Maik Schaefer , Wolfgang Soehngen
Abstract: A vacuum pump in accordance with the invention, in particular a scroll vacuum pump, comprises a first spiral element that has a first wall that extends spirally about a first axis, that extends in an axial direction from a first support, and that has a first free end face facing away from the first support, and a second spiral element that has a second wall that extends spirally about a second axis, that extends in the axial direction from a second support, and that has a second free end face facing away from the second support, wherein the first spiral element and the second spiral element are movable relative to one another and are arranged such that the first wall and the second wall sealingly engage into one another while forming pumping spaces, wherein the free end face of at least one of the walls has a recess, in particular a groove, which extends in a longitudinal direction of the wall and in which at least one seal is movably arranged, and wherein the recess is laterally bounded by at least one inner wall that extends at least sectionally, preferably continuously, obliquely to the axial direction and that is configured to cooperate with a side wall of the seal extending at least sectionally, preferably continuously, obliquely to the axial direction.
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公开(公告)号：US12104715B2
公开(公告)日：2024-10-01
申请号：US17690470
申请日：2022-03-09
Applicant: PFEIFFER VACUUM TECHNOLOGY AG
Inventor： Thomas R. Hodapp , Sean A. Casarotti , David W. Crone
CPC classification number: F16K51/02 , F16K1/36 , F16K1/54 , F16K31/047
Abstract: A vacuum valve for high/ultra-high vacuum systems includes a valve housing defining a passage connecting a first and a second opening of the housing. A valve body and a complementary seat is disposed in the passage, the valve body and/or the seat including a seal and the valve body being movable in a linear axial direction along between an open position and a closed position. The valve body cooperates with the seat in the closed position so as to close the first opening gas-tightly. An electromechanical actuation unit for actuating the valve body includes an electric motor and a mechanical conversion unit with an input portion drivingly connected to the motor and an output portion drivingly connected to the valve body. The conversion unit converts a rotational output of the electrical motor into a linear movement of an output portion to move the valve body in the axial direction.
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