公开(公告)号：US08680493B2

公开(公告)日：2014-03-25

申请号：US13489096

申请日：2012-06-05

申请人： Maikel Adrianus Cornelis Schepers ,  Markus Franciscus Antonius Eurlings ,  Franciscus Johannes Joseph Janssen ,  Bernard Jacob Andries Stommen ,  Hrishikesh Patel ,  Hermanus Johannes Maria Kreuwel ,  Jacob Cohen ,  Pepijn Wijnand Jozef Janssen ,  Maarten Kees Jan Boon

发明人： Maikel Adrianus Cornelis Schepers ,  Markus Franciscus Antonius Eurlings ,  Franciscus Johannes Joseph Janssen ,  Bernard Jacob Andries Stommen ,  Hrishikesh Patel ,  Hermanus Johannes Maria Kreuwel ,  Jacob Cohen ,  Pepijn Wijnand Jozef Janssen ,  Maarten Kees Jan Boon

IPC分类号： G01J3/10

CPC分类号： G03F7/70575 ,  G03F7/70033 ,  G03F7/70891 ,  G21K1/02 ,  G21K1/067 ,  H05G2/003 ,  H05G2/008

摘要： A radiation source includes a fuel supply configured to deliver fuel to a plasma emission location for vaporization by a laser beam to form a plasma, and a collector configured to collect EUV radiation emitted by the plasma and direct the EUV radiation towards an intermediate focus. The collector includes a diffraction grating configured to diffract infrared radiation emitted by the plasma. The radiation source includes a radiation conduit located in between the collector and the intermediate focus. The radiation conduit includes an entrance aperture connected by an inwardly tapering body to an exit aperture. The radiation conduit includes an inner portion and an outer portion, the inner portion being closer to the intermediate focus than the outer portion. The inner portion is configured to reflect incident diffracted infrared radiation towards the outer portion.

摘要翻译： 辐射源包括被配置为将燃料输送到等离子体发射位置用于由激光束蒸发以形成等离子体的燃料供应器，以及收集器，其被配置为收集由等离子体发射的EUV辐射并将EUV辐射引向中间焦点。 集电体包括衍射光栅，其被配置为衍射由等离子​​体发射的红外辐射。 辐射源包括位于收集器和中间焦点之间的辐射导管。 辐射导管包括通过向内渐缩的主体连接到出口孔的入口孔。 辐射导管包括内部部分和外部部分，内部部分比外部部分更接近中间焦点。 内部部分被配置成将入射的衍射红外辐射反射到外部。

公开(公告)号：US20130001442A1

公开(公告)日：2013-01-03

申请号：US13489096

申请日：2012-06-05

申请人： Maikel Adrianus Cornelis Schepers ,  Markus Franciscus Antonius Eurlings ,  Franciscus Johannes Joseph Janssen ,  Bernard Jacob Andries Stommen ,  Hrishikesh Patel ,  Hermanus Johannes Maria Kreuwel ,  Jacob Cohen ,  Pepijn Wijnand Jozef Janssen ,  Maarten Kees Jan Boon

发明人： Maikel Adrianus Cornelis Schepers ,  Markus Franciscus Antonius Eurlings ,  Franciscus Johannes Joseph Janssen ,  Bernard Jacob Andries Stommen ,  Hrishikesh Patel ,  Hermanus Johannes Maria Kreuwel ,  Jacob Cohen ,  Pepijn Wijnand Jozef Janssen ,  Maarten Kees Jan Boon

IPC分类号： G21K5/04 ,  G21K5/10

CPC分类号： G03F7/70575 ,  G03F7/70033 ,  G03F7/70891 ,  G21K1/02 ,  G21K1/067 ,  H05G2/003 ,  H05G2/008

摘要： A radiation source includes a fuel supply configured to deliver fuel to a plasma emission location for vaporization by a laser beam to form a plasma, and a collector configured to collect EUV radiation emitted by the plasma and direct the EUV radiation towards an intermediate focus. The collector includes a diffraction grating configured to diffract infrared radiation emitted by the plasma. The radiation source includes a radiation conduit located in between the collector and the intermediate focus. The radiation conduit includes an entrance aperture connected by an inwardly tapering body to an exit aperture. The radiation conduit includes an inner portion and an outer portion, the inner portion being closer to the intermediate focus than the outer portion. The inner portion is configured to reflect incident diffracted infrared radiation towards the outer portion.

摘要翻译： 辐射源包括被配置为将燃料输送到等离子体发射位置用于由激光束蒸发以形成等离子体的燃料供应器，以及收集器，其被配置为收集由等离子体发射的EUV辐射并将EUV辐射引向中间焦点。 集电体包括衍射光栅，其被配置为衍射由等离子​​体发射的红外辐射。 辐射源包括位于收集器和中间焦点之间的辐射导管。 辐射导管包括通过向内渐缩的主体连接到出口孔的入口孔。 辐射导管包括内部部分和外部部分，内部部分比外部部分更接近中间焦点。 内部部分被配置成将入射的衍射红外辐射反射到外部。