Compact high-intensity pulsed x-ray source, particularly for lithography

    公开(公告)号:US5930331A

    公开(公告)日:1999-07-27

    申请号:US748744

    申请日:1991-08-20

    IPC分类号: H01J35/06 H01J35/22

    CPC分类号: H01J35/065 H01J35/22

    摘要: A photoemissive photocathode, being a metal with a low work function and preferably tantalum-surfaced cesium-antimonide, is illuminated with pulses of 5320 .ANG. laser light, typically 20 psec at a 20 Hz repetition rate, to emit electrons by the photoelectric effect. The emitted electrons are accumulated in a spatial region near the photocathode by a grid electrode. The same laser pulses activate a semiconductor switch, normally an LiTaO.sub.3 crystal doped with 2.24% Cu, to apply a high voltage, typically 100 Kv, between the photocathode and an anode. The accumulated electrons are accelerated, and focused, as an electron beam that strikes the anode, typically in a focal spot of less than 0.5 mm diameter. Time-resolved x-ray pulses, typically K band of 20 picoseconds duration with 4-10 microjoules energy each, are produced. A laser-induced pulsed wide-area table-top-size embodiment of the x-ray source reliably generates a 1-10 mW/cm.sup.2 flux of hard, 0.1-1 nm, x-rays from picosecond duration laser pulses, and a 20-40 mW/cm.sup.2 flux of x-rays from 20 ns, 193 nm laser pulses at a pulse repetition rate of 300 Hz minimum, 1,000 Hz typical. The x-ray generation is uniform over a large 20 cm.sup.2 anode area. A mask is placed in direct contact with the anode for lithography.

    Optical media device with minipulatable read capability
    4.
    发明申请
    Optical media device with minipulatable read capability 审中-公开
    具有可扩展读取能力的光学媒体设备

    公开(公告)号:US20070231743A1

    公开(公告)日:2007-10-04

    申请号:US11394863

    申请日:2006-03-31

    IPC分类号: G11B7/24

    摘要: An optical media device comprises a mask layer placed over a data layer, and that includes chemical ingredients designed to render the data layer unreadable by an optical reader in a first initial state, and allow the data layer to be read when converted to a second state. The mask layer is optically opaque in the first state, and is optically transparent in the second state. The chemical ingredients include a dye that absorbs light in the visible light and/or optical reader spectrum, and a further chemical that is activatable to shift the dye's absorption wavelength so the data layer can be read by the optical reader. The activation source is radiative emission having a wavelength different from that of visible light and/or the optical reader. The activation source can be used at the point of sale of the device to render the device readable upon purchase.

    摘要翻译: 光学介质设备包括放置在数据层之上的掩模层,并且包括设计成使数据层在第一初始状态下不被光学读取器读取的化学成分,并且允许在转换成第二状态时读取数据层 。 掩模层在第一状态下是光学不透明的,并且在第二状态下是光学透明的。 化学成分包括在可见光和/或光学读取器光谱中吸收光的染料,以及可激活以移动染料吸收波长的另一种化学物质,使得数据层可被光学读取器读取。 激活源是具有与可见光不同的波长的辐射发射和/或光学读取器。 激活源可以在设备销售点使用,以便在购买时使设备可读。