公开(公告)号：US20060103492A1

公开(公告)日：2006-05-18

申请号：US10990201

申请日：2004-11-15

Applicant: Hongjun Feng ,  R. Fazzio ,  Richard Ruby ,  Paul Bradley

Inventor： Hongjun Feng ,  R. Fazzio ,  Richard Ruby ,  Paul Bradley

IPC: H03H9/54

CPC classification number: H03H9/02118 ,  H03H9/173 ,  H03H9/177

Abstract: A resonator structure (FBAR) made of electrodes sandwich a piezoelectric material. The intersection of the two conducting electrodes defines the active area of the acoustic resonator. The active area is divided into two concentric areas; a perimeter or frame, and a central region. An annulus is added to one of the two conducting electrodes to improve the electrical performance (in terms of Q).

Abstract translation: 由电极制成的谐振器结构（FBAR）夹着压电材料。 两个导电电极的交点定义了声谐振器的有效面积。 活动区域分为两个同心区域; 周边或框架，以及中央区域。 在两个导电电极中的一个上添加环，以改善电性能（以Q为单位）。

公开(公告)号：US20050212117A1

公开(公告)日：2005-09-29

申请号：US10807417

申请日：2004-03-23

Applicant: R. Fazzio

Inventor： R. Fazzio

IPC: H01L23/10 ,  H01L23/12

CPC classification number: H01L23/10 ,  H01L2924/0002 ,  H01L2924/01079 ,  H01L2924/00

Abstract: A method of fabricating an apparatus including a sealed cavity and an apparatus embodying the method are disclosed. To fabricate the apparatus, a device chip including a substrate and at least one circuit element on the substrate is fabricated. Also, a cap is fabricated. Next, the device chip and the cap are bonded such that a sealed cavity is formed by the device chip and the cap. The bond is accomplished using thermo compression technique. Gold or other suitable metal can be used as a bonding agent. Then or at the same time, caulking agent is reflowed over the bonding agent, over portions of the cap, or both to further seal the cavity. In the resultant device, the sealed cavity is sealed by the bonding agent, the caulking agent, or both. The caulking agent increases hermeticity of the cavity and provides for even higher level of protection of the cavity against adverse environmental conditions.

Abstract translation: 公开了一种制造包括密封腔的装置的方法和体现该方法的装置。 为了制造该装置，制造了包括衬底和衬底上的至少一个电路元件的器件芯片。 此外，还制造了一个帽子。 接下来，装置芯片和盖被接合，使得由装置芯片和盖形成密封空腔。 使用热压技术实现粘结。 可以使用金或其它合适的金属作为粘合剂。 然后，或者同时，将填缝剂再次通过粘合剂回流，在盖的部分上或两者上进一步密封空腔。 在所得到的装置中，密封腔被粘合剂，填缝剂或两者密封。 填缝剂增加了空腔的气密性，并提供了更高水平的腔体对不利环境条件的保护。

公开(公告)号：US20070236310A1

公开(公告)日：2007-10-11

申请号：US11373434

申请日：2006-03-10

Applicant: R. Fazzio ,  Richard Ruby ,  Christopher Wade ,  Michael Frank ,  David Feld

Inventor： R. Fazzio ,  Richard Ruby ,  Christopher Wade ,  Michael Frank ,  David Feld

IPC: H03H9/54

CPC classification number: H03H9/02118 ,  H03H3/02 ,  H03H9/02125 ,  H03H9/172

Abstract: An electronic device. The electronic device includes a first electrode and a coating layer. The electronic device is fabricated on a substrate; the substrate has a cavity created in a top surface of the substrate; and the first electrode is electrically coupled to the substrate. The coating layer coats at least part of a substrate surface in the cavity, and the presence of the coating layer results in a mitigation of at least one parasitic leakage path between the first electrode and an additional electrode fabricated on the substrate.

Abstract translation: 电子设备。 电子器件包括第一电极和涂层。 电子器件制造在衬底上; 衬底具有在衬底的顶表面中产生的空腔; 并且第一电极电耦合到衬底。 涂层涂覆在空腔中的基底表面的至少一部分，并且涂层的存在导致在第一电极和在基底上制造的附加电极之间的至少一个寄生泄漏路径的减轻。

公开(公告)号：US20070151856A1

公开(公告)日：2007-07-05

申请号：US11321302

申请日：2005-12-29

Applicant: R. Fazzio ,  Kevin Killeen ,  Atul Goel ,  Reid Brennen ,  Hongfeng Yin

Inventor： R. Fazzio ,  Kevin Killeen ,  Atul Goel ,  Reid Brennen ,  Hongfeng Yin

IPC: G01N27/00

CPC classification number: G01N27/44791 ,  B01L3/5027 ,  B01L9/527 ,  B01L2200/027 ,  B01L2300/069 ,  B01L2300/0887 ,  B01L2400/0421

Abstract: A fluidic device is provided that includes a body and a contiguous electrically conductive layer. The body has interior and exterior surfaces. The interior surface defines at least a well and a fluid-transporting feature, e.g., a microfeature in fluid-communication with the well. The well has a sidewall and an exterior opening terminating at the exterior surface. The contiguous electrically conductive layer is located on at least the sidewall of the well and selected regions of the interior and exterior surfaces so as to form a contact pad region on the exterior surface in electrical communication with any fluid within the fluid-transporting feature. Also provided is a method for forming a fluidic device.

Abstract translation: 提供了一种流体装置，其包括主体和相邻的导电层。 身体内部和外部表面。 内表面至少限定了井和流体输送特征，例如与井流体连通的微特征。 该井具有侧壁和外部开口，终止于外表面。 连续的导电层位于孔的至少侧壁和内表面和外表面的选定区域之间，以在外表面上形成与流体输送特征内的任何流体电连通的接触垫区域。 还提供了一种用于形成流体装置的方法。

公开(公告)号：US20060202779A1

公开(公告)日：2006-09-14

申请号：US11079776

申请日：2005-03-14

Applicant: R. Fazzio ,  Thomas Dungan

Inventor： R. Fazzio ,  Thomas Dungan

IPC: H03H9/54

CPC classification number: B81C1/00246 ,  B81B2201/0271 ,  B81C2203/0735 ,  H03H9/0557 ,  Y10T29/42

Abstract: Monolithic devices that include an acoustic resonator vertically integrated with electronic circuitry are described. In one aspect, a monolithic integrated device includes a substrate, electronic circuitry supported by the substrate, an acoustic isolator over the electronic circuitry, and an acoustic resonator on the acoustic isolator. A method of fabricating the monolithic device also is described.

Abstract translation: 描述了包括与电子电路垂直集成的声谐振器的单片器件。 一方面，单片集成器件包括衬底，由衬底支撑的电子电路，电子电路上的声学隔离器以及声学隔离器上的声学谐振器。 还描述了制造单片装置的方法。