公开(公告)号：US07428850B2

公开(公告)日：2008-09-30

申请号：US11359100

申请日：2006-02-22

Applicant: Ron Naftali ,  Yoram Uziel ,  Ran Vered ,  Eitan Pinhasi ,  Igor Krivts (Krayvitz)

Inventor： Ron Naftali ,  Yoram Uziel ,  Ran Vered ,  Eitan Pinhasi ,  Igor Krivts (Krayvitz)

IPC: G01M19/00

CPC classification number: H01L21/67748 ,  G03F1/84 ,  H01J2237/162 ,  H01J2237/204 ,  H01J2237/2817 ,  H01L21/67126 ,  H01L21/6719 ,  H01L21/67751

Abstract: A substrate inspection system includes two or more inspection modules supported on a plate. A chamber is supported beneath the plate by a translation system, which is configured to provide horizontal displacement of the chamber under the plate to permit loading and unloading of a substrate to/from the chamber. Thus, when the chamber is in a loading/unloading position it is at least partially uncovered from the plate. The translation system may be further configured to provide vertical displacement of the chamber with respect to the plate so as to position an upper surface of a wall of the chamber in close proximity to a lower surface of the plate when the chamber is in an inspection position. In such a position, the upper surface of the wall of the chamber and the lower surface of the plate may be separated by an air gap.

Abstract translation: 基板检查系统包括支撑在板上的两个或更多个检查模块。 通过平移系统在平板下方支撑室，该平移系统构造成提供室下方的水平位移，以允许将衬底装载到腔室或从腔室卸载。 因此，当腔室处于装载/卸载位置时，其至少部分地从板上未被覆盖。 翻译系统可以被进一步配置成提供腔室相对于板的垂直位移，以便当腔室处于检查位置时将腔室的壁的上表面定位成紧邻板的下表面 。 在这样的位置，室的壁的上表面和板的下表面可以由气隙分开。

公开(公告)号：US20070022831A1

公开(公告)日：2007-02-01

申请号：US11359100

申请日：2006-02-22

Applicant: Ron Naftali ,  Yoram Uziel ,  Ran Vered ,  Eitan Pinhasi ,  Igor Krivts (Krayvitz)

Inventor： Ron Naftali ,  Yoram Uziel ,  Ran Vered ,  Eitan Pinhasi ,  Igor Krivts (Krayvitz)

IPC: G01M19/00 ,  G21K5/08

CPC classification number: H01L21/67748 ,  G03F1/84 ,  H01J2237/162 ,  H01J2237/204 ,  H01J2237/2817 ,  H01L21/67126 ,  H01L21/6719 ,  H01L21/67751

Abstract: A substrate inspection system includes two or more inspection modules supported on a plate. A chamber is supported beneath the plate by a translation system, which is configured to provide horizontal displacement of the chamber under the plate to permit loading and unloading of a substrate to/from the chamber. Thus, when the chamber is in a loading/unloading position it is at least partially uncovered from the plate. The translation system may be further configured to provide vertical displacement of the chamber with respect to the plate so as to position an upper surface of a wall of the chamber in close proximity to a lower surface of the plate when the chamber is in an inspection position. In such a position, the upper surface of the wall of the chamber and the lower surface of the plate may be separated by an air gap.

Abstract translation: 基板检查系统包括支撑在板上的两个或更多个检查模块。 通过平移系统在平板下方支撑室，该平移系统构造成提供室下方的水平位移，以允许将衬底装载到腔室或从腔室卸载。 因此，当腔室处于装载/卸载位置时，其至少部分地从板上未被覆盖。 翻译系统可以被进一步配置成提供腔室相对于板的垂直位移，以便当腔室处于检查位置时将腔室的壁的上表面定位成紧邻板的下表面 。 在这样的位置，室的壁的上表面和板的下表面可以由气隙分开。