公开(公告)号：US5504582A

公开(公告)日：1996-04-02

申请号：US339834

申请日：1994-11-14

Applicant: Blaine D. Johs ,  Shakil A. Pittal ,  Steven E. Green ,  John A. Woollam ,  David W. Doerr ,  Reed A. Christenson

Inventor： Blaine D. Johs ,  Shakil A. Pittal ,  Steven E. Green ,  John A. Woollam ,  David W. Doerr ,  Reed A. Christenson

IPC: G01J3/28 ,  G01J3/36 ,  G01J3/447 ,  G01J4/00 ,  G01N21/21

CPC classification number: G01J3/36 ,  G01J3/447 ,  G01J4/00 ,  G01N21/211 ,  G01J2003/2866 ,  G01J3/0289

Abstract: An ellipsometer system which includes a pivotal dispersive optics positioned to receive polychromatic light from an analyzer thereof, without further focusing after reflection from a substrate system, is presented. In addition, a stationary compensator, positioned between an analyzer and the dispersive optics, which serves to reduce detector element polarization dependent sensitivity to light entering thereto after it interacts with the dispersive optics, is disclosed. The use of a light fiber to carry light from a source thereof, to a polarization state generator, is also disclosed. The method of the present invention can include application of mathematical correction factors to, for instance, substrate system characterizing PSI and DELTA values, or Fourier ALPHA and BETA coefficients.

Abstract translation: 一种椭偏仪系统，其包括枢转分散光学器件，其被定位成从其分析器接收多色光，而不需要在从衬底系统反射之后进一步聚焦。 此外，公开了一种位于分析仪和分散光学器件之间的固定补偿器，其用于在与分散光学器件相互作用之后降低对入射到其上的光的检测器元件偏振依赖的灵敏度。 还公开了使用光纤将光从其源携带到偏振状态发生器。 本发明的方法可以包括将数学校正因子应用于例如表征PSI和DELTA值的基底系统，或傅里叶ALPHA和BETA系数。

公开(公告)号：US5521706A

公开(公告)日：1996-05-28

申请号：US265325

申请日：1994-06-24

Applicant: Steven E. Green ,  Shakil A. Pittal ,  Blaine D. Johs ,  John A. Woollam ,  David W. Doerr ,  Reed A. Christenson

Inventor： Steven E. Green ,  Shakil A. Pittal ,  Blaine D. Johs ,  John A. Woollam ,  David W. Doerr ,  Reed A. Christenson

IPC: G01J3/28 ,  G01J3/36 ,  G01J3/447 ,  G01J4/00 ,  G01N21/21

CPC classification number: G01J3/36 ,  G01J3/447 ,  G01J4/00 ,  G01N21/211 ,  G01J2003/2866 ,  G01J3/0289

Abstract: An ellipsometer system which includes a pivotal dispersive optics positioned to receive polychromatic light from an analyzer thereof, without further focusing after reflection from a substrate system, is presented. In addition, a rotating compensator, positioned between the analyzer and the dispersive optics, which serves to reduce detector element polarization dependent sensitivity to light entering thereto after it interacts with the dispersive optics, is disclosed. The method of the present invention can include application of mathematical correction factors to, for instance, substrate system characterizing PSI and DELTA values, or Fourier ALPHA and BETA coefficients.

Abstract translation: 一种椭偏仪系统，其包括枢转分散光学器件，其被定位成从其分析器接收多色光，而不需要在从衬底系统反射之后进一步聚焦。 此外，公开了一种旋转补偿器，其位于分析器和分散光学器件之间，其用于在与分散光学器件相互作用之后降低对入射到其上的光的检测器元件偏振相关敏感度。 本发明的方法可以包括将数学校正因子应用于例如表征PSI和DELTA值的基底系统，或傅里叶ALPHA和BETA系数。

公开(公告)号：US5373359A

公开(公告)日：1994-12-13

申请号：US947430

申请日：1992-09-18

Applicant: John A. Woollam ,  Blaine D. Johs ,  David W. Doerr ,  Reed A. Christenson

Inventor： John A. Woollam ,  Blaine D. Johs ,  David W. Doerr ,  Reed A. Christenson

IPC: G01J3/28 ,  G01J3/36 ,  G01J3/447 ,  G01J4/00 ,  G01N21/21

CPC classification number: G01N21/211 ,  G01J3/36 ,  G01J3/447 ,  G01J4/00 ,  G01J2003/2866 ,  G01J3/0289

Abstract: To sense characteristics of a sample, an ellipsometer includes a pivotal diffraction grating positioned to receive white light from the analyzer without further focusing of the light after the light leaves the sample. The diffraction grating is focused on the sensor at a predetermined angle with a precision of at least plus or minus one-half degree using an alignment-sensing means positioned between the analyzer and diffraction grating. The sensor includes an aperture through which the incident beam of light is transmitted, light-sensitive areas on opposite sides of said sensor and a comparator for comparing the signal from said light-sensitive areas. Equality of the light from the light-sensitive areas indicates that the incident beam of light is perpendicular to the diffraction grating. A second diffraction grating and a second sensing means may receive the specularly reflected white light from a first diffraction grating and reflect it to another diffraction grating to investigate another spectrum of light. A spectroscopic ellipsometer uses a stacked photodiode in which the first photodiode and second photodiode have overlapping spectral ranges.

Abstract translation: 为了感测样品的特征，椭偏仪包括枢转衍射光栅，其定位成在来自分析仪之后接收白光，而不会在光离开样品后进一步聚焦光。 使用位于分析仪和衍射光栅之间的对准感测装置，衍射光栅以至少正或负半度的精度以预定角度聚焦在传感器上。 传感器包括入射光束透过的孔，在所述传感器的相对侧上的感光区域和用于比较来自所述光敏区域的信号的比较器。 来自感光区域的光的平等表示入射光束垂直于衍射光栅。 第二衍射光栅和第二感测装置可以接收来自第一衍射光栅的镜面反射的白光，并将其反射到另一衍射光栅以研究另一光谱。 光谱椭偏仪使用其中第一光电二极管和第二光电二极管具有重叠光谱范围的堆叠光电二极管。