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公开(公告)号：US12080574B2
公开(公告)日：2024-09-03
申请号：US16932630
申请日：2020-07-17
CPC分类号： H01L21/67253 , G01J3/0218 , G01J3/32 , G01J3/36 , G01N33/0009 , H01J37/32963 , H01J37/32972 , H01J37/32981 , H01L22/26 , H01J2237/2445
摘要： The disclosure describes apparatus and method for detecting an endpoint in plasma-assisted wafer processing in a chamber. A fiber array comprising a plurality of fibers collects optical emission light from the chamber during the plasma-assisted wafer processing. The fiber array is split into two or more groups of fibers, each group carrying a portion of the light to a segment of a photodetector. Each segment of photodetector has a corresponding narrowband optical filter designed for a specific range of wavelengths. A computer processor analyzes detected signals from the plurality of segments of the photodetector, and determines, based on the analysis of the detected signals, an endpoint of the plasma-assisted wafer processing as indicated by the presence or the absence of the one or more chemical species in the chamber. The photodetector can be based on photomultiplier tube (PMT) array or based on photodiodes (e.g., avalanche photodiodes (APDs)).
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公开(公告)号：US12074184B2
公开(公告)日：2024-08-27
申请号：US17349718
申请日：2021-06-16
发明人： Atsushi Ishikawa , Yasuhisa Inada
CPC分类号： H01L27/1462 , G01J3/26 , G01J3/2823 , G01J3/36 , G02B5/201 , G02B5/28 , H01L27/14627 , H01L27/14645 , H04N25/135
摘要： A light detecting device includes: a filter array including filters two-dimensionally arrayed and an image sensor including light detection elements. Each of first and second filters included in the filters includes a first reflective layer, a second reflective layer, and an intermediate layer therebetween and has a resonance structure having resonant modes whose orders are different from each other. A refractive index and/or a thickness of the intermediate layer in the first and second filters is different depending on the filter. A transmission spectrum of each of the first and second filters has local maximum value of transmittance at each of wavelengths included in a wavelength region, and the wavelengths correspond to the resonant modes, respectively. The image sensor is disposed at a position where the image senor receives passing light that passes through the filter array, to detect components in the wavelengths included in the passing light.
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公开(公告)号：US20240210244A1
公开(公告)日：2024-06-27
申请号：US18520284
申请日：2023-11-27
IPC分类号： G01J3/02 , G01J3/28 , G01J3/36 , G01J5/00 , G01N21/3504
CPC分类号： G01J3/0232 , G01J3/0229 , G01J3/28 , G01J3/2823 , G01J3/36 , G01N21/3504 , G01J2005/0077
摘要： Various embodiments disclosed herein describe a divided-aperture infrared spectral imaging (DAISI) system that is adapted to acquire multiple IR images of a scene with a single-shot (also referred to as a snapshot). The plurality of acquired images having different wavelength compositions that are obtained generally simultaneously. The system includes at least two optical channels that are spatially and spectrally different from one another. Each of the at least two optical channels are configured to transfer IR radiation incident on the optical system towards an optical FPA unit comprising at least two detector arrays disposed in the focal plane of two corresponding focusing lenses. The system further comprises at least one temperature reference source or surface that is used to dynamically calibrate the two detector arrays and compensate for a temperature difference between the two detector arrays.
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公开(公告)号：US20240151700A1
公开(公告)日：2024-05-09
申请号：US18499763
申请日：2023-11-01
IPC分类号： G01N33/00 , G01J3/02 , G01J3/28 , G01J3/32 , G01J3/36 , G01J3/42 , G01J5/00 , G01J5/08 , G01J5/0806 , G01J5/0808 , G01J5/53 , G01J5/60 , G01N21/3504 , H04N5/33 , H04N17/00
CPC分类号： G01N33/0044 , G01J3/0208 , G01J3/021 , G01J3/0286 , G01J3/2803 , G01J3/2823 , G01J3/32 , G01J3/36 , G01J3/42 , G01J5/0014 , G01J5/0806 , G01J5/0808 , G01J5/0896 , G01J5/53 , G01J5/602 , G01N21/3504 , H04N5/33 , H04N17/002 , G01J2003/1247 , G01J2003/2826 , G01J2003/2869 , G01J2005/0077 , G01J2005/604 , G01N2021/3531
摘要： Various embodiments disclosed herein describe an infrared (IR) imaging system for detecting a gas. The imaging system can include an optical filter that selectively passes light having a wavelength in a range of 1585 nm to 1595 nm while attenuating light at wavelengths above 1600 nm and below 1580 nm. The system can include an optical detector array sensitive to light having a wavelength of 1590 that is positioned rear of the optical filter.
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公开(公告)号：US11913868B2
公开(公告)日：2024-02-27
申请号：US17302651
申请日：2021-05-10
发明人： Ming Yan , Yung-Chieh Hsieh , David Vrane , Eric Chase
IPC分类号： G01N15/00 , G01J3/00 , G01J1/08 , G01N21/47 , G01N15/14 , G01J3/02 , G01J3/36 , G01N15/10 , G01J3/12
CPC分类号： G01N15/1436 , G01J1/08 , G01J3/021 , G01J3/0208 , G01J3/0218 , G01J3/0256 , G01J3/0291 , G01J3/36 , G01N15/1434 , G01N15/1459 , G01N21/47 , G01J2003/1213 , G01N2015/1006 , G01N2015/145
摘要： In one embodiment, a flow cytometer is disclosed having a compact light detection module. The compact light detection module includes an image array with a transparent block, a plurality of micro-mirrors in a row coupled to a first side of the transparent block, and a plurality of filters in a row coupled to a second side of the transparent block opposite the first side. Each of the plurality of filters reflects light to one of the plurality of micro-mirrors and passes light of a differing wavelength range and each of the plurality of micro-mirrors reflects light to one of the plurality of filters, such that incident light into the image array zigzags back and forth between consecutive filters of the plurality of filters and consecutive micro-mirrors of the plurality of micro-mirrors. A radius of curvature of each of the plurality of micro-mirrors images the fiber aperture onto the odd filters and collimates the light beam on the even filters.
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公开(公告)号：US11879779B2
公开(公告)日：2024-01-23
申请号：US17623469
申请日：2020-06-23
发明人： John A. Wheatley , Mark A. Roehrig
IPC分类号： G01J3/42 , G01J3/02 , G02B5/20 , G02B5/22 , G01J3/36 , G02B5/28 , G01J1/58 , G01N21/31 , G01J3/12
CPC分类号： G01J3/42 , G01J1/58 , G01J3/0224 , G01J3/36 , G01N21/31 , G02B5/20 , G02B5/201 , G02B5/22 , G02B5/223 , G02B5/28 , G01J2003/1213
摘要： An optical system (150) is disclosed and includes an optical sensor (154), a plurality of photosensitive pixels (178) disposed on the optical sensor, a wavelength-selective optical filter (158) in optical communication with the photosensitive pixels, the wavelength-selective optical filter being disposed remotely from the optical sensor, and a plurality of spatially-variant areas (220, 224, 228, 232) disposed in the optical filter, at least one area of the plurality of spatially-variant areas including a downconverter (400, 500).
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公开(公告)号：US11879775B2
公开(公告)日：2024-01-23
申请号：US17247809
申请日：2020-12-23
IPC分类号： G01J3/02 , G01J3/28 , G01N21/3504 , G01J3/36 , G01J5/00
CPC分类号： G01J3/0232 , G01J3/0229 , G01J3/28 , G01J3/2823 , G01J3/36 , G01N21/3504 , G01J2005/0077
摘要： Various embodiments disclosed herein describe a divided-aperture infrared spectral imaging (DAISI) system that is adapted to acquire multiple IR images of a scene with a single-shot (also referred to as a snapshot). The plurality of acquired images having different wavelength compositions that are obtained generally simultaneously. The system includes at least two optical channels that are spatially and spectrally different from one another. Each of the at least two optical channels are configured to transfer IR radiation incident on the optical system towards an optical FPA unit comprising at least two detector arrays disposed in the focal plane of two corresponding focusing lenses. The system further comprises at least one temperature reference source or surface that is used to dynamically calibrate the two detector arrays and compensate for a temperature difference between the two detector arrays.
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公开(公告)号：US20240003807A1
公开(公告)日：2024-01-04
申请号：US18347822
申请日：2023-07-06
CPC分类号： G01N21/3504 , G01J3/36 , G01J3/0232 , G01N33/0047 , G01M3/38 , G01J3/28 , G01N2021/1795
摘要： A spectral imaging system configured to obtain spectral measurements in a plurality of spectral regions is described herein. The spectral imaging system comprises at least one optical detecting unit having a spectral response corresponding to a plurality of absorption peaks of a target chemical species. In an embodiment, the optical detecting unit may comprise an optical detector array, and one or more optical filters configured to selectively pass light in a spectral range, wherein a convolution of the responsivity of the optical detector array and the transmission spectrum of the one or more optical filters has a first peak in mid-wave infrared spectral region between 3-4 microns corresponding to a first absorption peak of methane and a second peak in a long-wave infrared spectral region between 6-8 microns corresponding to a second absorption peak of methane.
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公开(公告)号：US11846619B2
公开(公告)日：2023-12-19
申请号：US17652337
申请日：2022-02-24
IPC分类号： G01N33/00 , H04N5/33 , G01N21/3504 , G01J5/00 , G01J3/28 , G01J3/32 , G01J3/36 , G01J3/02 , G01J5/0806 , H04N17/00 , G01J5/60 , G01J5/08 , G01J3/42 , G01J5/53 , G01J5/0808 , G01J3/12
CPC分类号： G01N33/0044 , G01J3/021 , G01J3/0208 , G01J3/0286 , G01J3/2803 , G01J3/2823 , G01J3/32 , G01J3/36 , G01J3/42 , G01J5/0014 , G01J5/0806 , G01J5/0808 , G01J5/0896 , G01J5/53 , G01J5/602 , G01N21/3504 , H04N5/33 , H04N17/002 , G01J2003/1247 , G01J2003/2826 , G01J2003/2869 , G01J2005/0077 , G01J2005/604 , G01N2021/3531
摘要： Various embodiments disclosed herein describe an infrared (IR) imaging system for detecting a gas. The imaging system can include an optical filter that selectively passes light having a wavelength in a range of 1585 nm to 1595 nm while attenuating light at wavelengths above 1600 nm and below 1580 nm. The system can include an optical detector array sensitive to light having a wavelength of 1590 that is positioned rear of the optical filter.
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公开(公告)号：US11805221B2
公开(公告)日：2023-10-31
申请号：US17115261
申请日：2020-12-08
IPC分类号： H04N5/33 , G01N21/3504 , G01J3/02 , G01J3/28 , G01J3/36 , G01J5/0804 , G06V10/10 , G06V10/143 , G06V10/147 , G06V20/10 , H04N23/45 , G01J5/00 , G02B5/20
CPC分类号： H04N5/33 , G01J3/0232 , G01J3/0256 , G01J3/2803 , G01J3/36 , G01J5/0014 , G01J5/0804 , G01N21/3504 , G02B5/201 , G02B5/208 , G06V10/143 , G06V10/147 , G06V10/17 , G06V20/10 , H04N23/45 , G01J2003/2826 , G01J2005/0077 , G01N2021/3531 , G01N2201/0221
摘要： Various embodiments disclosed herein describe a divided-aperture infrared spectral imaging (DAISI) system that is adapted to acquire multiple IR images of a scene with a single-shot (also referred to as a snapshot). The plurality of acquired images having different wavelength compositions that are obtained generally simultaneously. The system includes at least two optical channels that are spatially and spectrally different from one another. Each of the at least two optical channels are configured to transfer IR radiation incident on the optical system towards an optical FPA unit comprising at least two detector arrays. One of the at least two detector arrays comprises a cooled mid-wavelength infra-red FPA. The system further comprises at least one temperature reference source or surface that is used to dynamically calibrate the two detector arrays and compensate for a temperature difference between the two detector arrays.
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