Ellipsometer
    4.
    发明授权
    Ellipsometer 失效
    椭圆计

    公开(公告)号:US5373359A

    公开(公告)日:1994-12-13

    申请号:US947430

    申请日:1992-09-18

    Abstract: To sense characteristics of a sample, an ellipsometer includes a pivotal diffraction grating positioned to receive white light from the analyzer without further focusing of the light after the light leaves the sample. The diffraction grating is focused on the sensor at a predetermined angle with a precision of at least plus or minus one-half degree using an alignment-sensing means positioned between the analyzer and diffraction grating. The sensor includes an aperture through which the incident beam of light is transmitted, light-sensitive areas on opposite sides of said sensor and a comparator for comparing the signal from said light-sensitive areas. Equality of the light from the light-sensitive areas indicates that the incident beam of light is perpendicular to the diffraction grating. A second diffraction grating and a second sensing means may receive the specularly reflected white light from a first diffraction grating and reflect it to another diffraction grating to investigate another spectrum of light. A spectroscopic ellipsometer uses a stacked photodiode in which the first photodiode and second photodiode have overlapping spectral ranges.

    Abstract translation: 为了感测样品的特征,椭偏仪包括枢转衍射光栅,其定位成在来自分析仪之后接收白光,而不会在光离开样品后进一步聚焦光。 使用位于分析仪和衍射光栅之间的对准感测装置,衍射光栅以至少正或负半度的精度以预定角度聚焦在传感器上。 传感器包括入射光束透过的孔,在所述传感器的相对侧上的感光区域和用于比较来自所述光敏区域的信号的比较器。 来自感光区域的光的平等表示入射光束垂直于衍射光栅。 第二衍射光栅和第二感测装置可以接收来自第一衍射光栅的镜面反射的白光,并将其反射到另一衍射光栅以研究另一光谱。 光谱椭偏仪使用其中第一光电二极管和第二光电二极管具有重叠光谱范围的堆叠光电二极管。

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