公开(公告)号：US06897664B1

公开(公告)日：2005-05-24

申请号：US10261390

申请日：2002-09-30

申请人： Michael Bruce ,  Gregory A. Dabney ,  Palaniappan Muthupalaniappan ,  Jiann Min Chin ,  Richard Jacob Wilcox ,  Glen Gilfeather ,  Brennan Davis ,  Jacob Phang ,  Choon Meng Chua ,  Lian Ser Koh ,  Hoo-Yin Ng ,  Soon Huat Tan

发明人： Michael Bruce ,  Gregory A. Dabney ,  Palaniappan Muthupalaniappan ,  Jiann Min Chin ,  Richard Jacob Wilcox ,  Glen Gilfeather ,  Brennan Davis ,  Jacob Phang ,  Choon Meng Chua ,  Lian Ser Koh ,  Hoo-Yin Ng ,  Soon Huat Tan

IPC分类号： G01R31/305 ,  G01R31/311

CPC分类号： G01R31/311

摘要： Apparatus for and methods of inspection using laser beam induced alteration are provided. In one aspect, an apparatus is provided that includes a laser scanning microscope for directing a laser beam at a circuit structure and a source for biasing and thereby establishing a power condition in the circuit structure. A detection circuit is provided for detecting a change in the power condition in response to illumination of the circuit structure by the laser beam and generating a first output signal based on the detected change. A signal processor is provided for processing the first output signal and generating a second output signal based thereon. A control system is operable to scan the laser beam according to a pattern that has a plurality of pixel locations, whereby the laser beam may be moved to a given pixel location and allowed to dwell there for a selected time before being moved to another pixel location.

摘要翻译： 提供了使用激光束诱发改变的装置和检查方法。 在一个方面，提供了一种装置，其包括用于将电路结构的激光束引导的激光扫描显微镜和用于偏置的源，从而在电路结构中建立功率状态。 提供一种检测电路，用于响应于激光束对电路结构的照明而检测功率状态的变化，并且基于检测到的变化产生第一输出信号。 提供信号处理器用于处理第一输出信号并基于此产生第二输出信号。 控制系统可操作以根据具有多个像素位置的图案来扫描激光束，由此激光束可以移动到给定的像素位置，并允许其在移动到另一像素位置之前在选定的时间停留 。

公开(公告)号：US06546513B1

公开(公告)日：2003-04-08

申请号：US09586572

申请日：2000-06-02

申请人： Richard Jacob Wilcox ,  Jason D. Mulig ,  David Eppes ,  Michael R. Bruce ,  Victoria J. Bruce ,  Rosalinda M. Ring ,  Edward I. Cole, Jr. ,  Paiboon Tangyunyong ,  Charles F. Hawkins ,  Arnold Y. Louie

发明人： Richard Jacob Wilcox ,  Jason D. Mulig ,  David Eppes ,  Michael R. Bruce ,  Victoria J. Bruce ,  Rosalinda M. Ring ,  Edward I. Cole, Jr. ,  Paiboon Tangyunyong ,  Charles F. Hawkins ,  Arnold Y. Louie

IPC分类号： G01R3128

CPC分类号： G06F11/263 ,  G01R31/307

摘要： A method and apparatus mechanism for testing data processing devices are implemented. The test mechanism isolates critical paths by correlating a scanning microscope image with a selected speed path failure. A trigger signal having a preselected value is generated at the start of each pattern vector. The sweep of the scanning microscope is controlled by a computer, which also receives and processes the image signals returned from the microscope. The value of the trigger signal is correlated with a set of pattern lines being driven on the DUT. The trigger is either asserted or negated depending the detection of a pattern line failure and the particular line that failed. In response to the detection of the particular speed path failure being characterized, and the trigger signal, the control computer overlays a mask on the image of the device under test (DUT). The overlaid image provides a visual correlation of the failure with the structural elements of the DUT at the level of resolution of the microscope itself.

摘要翻译： 实现了用于测试数据处理设备的方法和设备机制。 测试机制通过将扫描显微镜图像与选定的速度路径故障相关联来隔离关键路径。 在每个图案向量的开始处产生具有预选值的触发信号。 扫描显微镜的扫描由计算机控制，计算机还接收并处理从显微镜返回的图像信号。 触发信号的值与在DUT上驱动的一组图案线相关。 根据模式线路故障的检测和失败的特定线路，触发器被断言或否定。 响应于特征的特定速度路径故障的检测和触发信号，控制计算机覆盖被测器件（DUT）的图像上的掩模。 重叠的图像在显微镜本身的分辨率水平下提供了故障与DUT的结构元件的视觉相关性。

公开(公告)号：US06771089B1

公开(公告)日：2004-08-03

申请号：US10159193

申请日：2002-05-29

申请人： Richard Jacob Wilcox

发明人： Richard Jacob Wilcox

IPC分类号： G10R3126

CPC分类号： G01R31/2607

摘要： A test fixture having an adjustable capacitance (10) and a method for testing a semiconductor component using the test fixture (10). The test fixture (10) includes a loadboard (12) having a semiconductor component receiving area (14), and a power supply input terminal (16) capable of receiving an unbuffered constant current bias signal from a power supply (18). A semiconductor component is coupled to the semiconductor component receiving area (14). A switched capacitor network (21) mounted on the test fixture (10) is configured so that a desired load capacitance is coupled to the power supply input terminal (16) when the semiconductor component is initialized. Then the switched capacitor network (21) is configured so that substantially zero capacitance is coupled to the power supply input terminal. Power supply voltage fluctuations are mapped while the semiconductor component is biased with the power supply and receiving a voltage alteration signal from a laser.

摘要翻译： 一种具有可调电容（10）的测试夹具以及使用测试夹具（10）测试半导体部件的方法。 测试夹具（10）包括具有半导体部件接收区域（14）的装载板（12）和能够从电源（18）接收无缓冲恒定电流偏置信号的电源输入端子（16）。 半导体部件耦合到半导体部件接收区域（14）。 安装在测试夹具（10）上的开关电容器网络（21）被配置为使得当初始化半导体部件时期望的负载电容耦合到电源输入端子（16）。 然后，开关电容器网络（21）被配置为使得基本上零电容耦合到电源输入端子。 当电源电压偏置半导体元件并从激光器接收电压变化信号时，映射电源电压波动。