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公开(公告)号:US07437813B2
公开(公告)日:2008-10-21
申请号:US11704016
申请日:2007-02-07
申请人: Bahadir Tunaboylu , John McGlory , Horst Clauberg , Bruce Griffing , Robert E. Werner , Edward T. Laurent , Edward L. Malantonio , Alan Slopey , Paul Bereznycky
发明人: Bahadir Tunaboylu , John McGlory , Horst Clauberg , Bruce Griffing , Robert E. Werner , Edward T. Laurent , Edward L. Malantonio , Alan Slopey , Paul Bereznycky
CPC分类号: G01R3/00 , B33Y80/00 , G01R1/07342 , Y10T29/49155 , Y10T29/49156 , Y10T29/49718 , Y10T29/49721 , Y10T29/49726 , Y10T29/4973 , Y10T29/49737
摘要: A method and apparatus for repairing a probe on a probe card is provided. A plurality of beams is formed on a beam panel. The plurality of beams includes a replacement beam. After identifying a damaged beam on the probe card, the damaged beam is removed from the probe card. The beam panel is aligned with the probe card. After the beam panel is aligned, the aligned beam panel is temporarily affixed to the probe card. After the beam panel is temporarily affixed to the probe card, the replacement beam is affixed at a location previously occupied by the damaged beam. After the replacement beam is affixed at the location, the beam panel is removed from the probe card.
摘要翻译: 提供了一种用于在探针卡上修复探针的方法和装置。 多个梁形成在梁板上。 多个光束包括替换光束。 在探测卡上识别出损坏的光束后,损坏的光束将从探针卡中取出。 光束面板与探针卡对齐。 光束面板对准后,对准的光束面板临时固定在探针卡上。 在将光束板临时固定在探针卡上之后,将替换光束固定在先前被损坏光束占据的位置。 在更换光束固定在该位置后,将光束面板从探针卡中取出。