公开(公告)号：US06646525B2

公开(公告)日：2003-11-11

申请号：US09885713

申请日：2001-06-20

申请人： Carl O. Bozler ,  Richard G. Drangmeister ,  Robert J. Parr ,  Lawrence J. Kushner

发明人： Carl O. Bozler ,  Richard G. Drangmeister ,  Robert J. Parr ,  Lawrence J. Kushner

IPC分类号： H01P110

CPC分类号： B81B3/0021 ,  B81B2201/014 ,  B81B2203/0118 ,  B81C1/00214 ,  H01G5/18 ,  H01G5/40 ,  H01H59/0009 ,  H01H2059/0081 ,  H01P1/12 ,  H01P1/20327 ,  H01P1/20363 ,  H01P1/20381 ,  H01P1/2039 ,  H01P5/04

摘要： A microelectro-mechanical device which includes a fixed electrode formed on a substrate, the fixed electrode including a transparent, high resistance layer, and a moveable electrode formed with an anisotropic stress in a predetermined direction and disposed adjacent the fixed electrode. The device includes first and second electrically conductive regions which are isolated from one another by the fixed electrode. The moveable electrode moves to cover the fixed electrode and to electrically couple to the second conductive region, thus electrically coupling the first and second conductive regions, in response to a potential being applied across the fixed and moveable electrodes. The fixed electrode is transparent to electromagnetic signals or waves and the moveable electrode impedes or allows transmission of electromagnetic signals or waves.

摘要翻译： 一种微电子机械装置，其包括形成在基板上的固定电极，所述固定电极包括透明的高电阻层和在预定方向上形成有各向异性应力并且邻近所述固定电极设置的可移动电极。 该器件包括通过固定电极彼此隔离的第一和第二导电区域。 可移动电极移动以覆盖固定电极并且电耦合到第二导电区域，从而响应于施加在固定和可移动电极上的电势而电耦合第一和第二导电区域。 固定电极对电磁信号或波是透明的，并且可移动电极阻止或允许电磁信号或波的传输。

公开(公告)号：US6127908A

公开(公告)日：2000-10-03

申请号：US972224

申请日：1997-11-17

申请人： Carl O. Bozler ,  Richard G. Drangmeister ,  Robert J. Parr ,  Lawrence J. Kushner

发明人： Carl O. Bozler ,  Richard G. Drangmeister ,  Robert J. Parr ,  Lawrence J. Kushner

IPC分类号： B81B3/00 ,  B81C99/00 ,  H01H59/00 ,  H01P1/12 ,  H01P1/203 ,  H01P5/04 ,  H01P1/10 ,  H01C10/06 ,  H01G5/011 ,  H03F1/00

CPC分类号： B81B3/0021 ,  B81C1/00214 ,  H01G5/18 ,  H01G5/40 ,  H01P1/12 ,  H01P1/20327 ,  H01P1/20363 ,  H01P1/20381 ,  H01P1/2039 ,  H01P5/04 ,  B81B2201/014 ,  B81B2203/0118 ,  H01H2059/0081 ,  H01H59/0009

摘要： A microelectro-mechanical device which includes a fixed electrode formed on a substrate, the fixed electrode including a transparent, high resistance layer, and a moveable electrode formed with an anisotropic stress in a predetermined direction and disposed adjacent the fixed electrode. The device includes first and second electrically conductive regions which are isolated from one another by the fixed electrode. The moveable electrode moves to cover the fixed electrode and to electrically couple to the second conductive region, thus electrically coupling the first and second conductive regions, in response to a potential being applied across the fixed and moveable electrodes. The fixed electrode is transparent to electromagnetic signals or waves and the moveable electrode impedes or allows transmission of electromagnetic signals or waves. In one embodiment of the invention, the fixed and moveable electrodes are configured within an array of similar devices, and each device or groups of devices in the array are individually addressable to actuate the moveable electrodes. In another embodiment of the invention, there is provided a reconfigurable circuit including an array of actuatable devices which are addressed individually or in selected groups, each of the actuatable devices having a fixed electrode formed on a substrate, the fixed electrode including a transparent, high resistance layer, and a moveable electrode formed with an anisotropic stress in a predetermined direction and disposed adjacent the fixed electrode.

摘要翻译： 一种微电子机械装置，其包括形成在基板上的固定电极，所述固定电极包括透明的高电阻层和在预定方向上形成有各向异性应力并且邻近所述固定电极设置的可移动电极。 该器件包括通过固定电极彼此隔离的第一和第二导电区域。 可移动电极移动以覆盖固定电极并且电耦合到第二导电区域，从而响应于施加在固定和可移动电极上的电势而电耦合第一和第二导电区域。 固定电极对电磁信号或波是透明的，并且可移动电极阻止或允许电磁信号或波的传输。 在本发明的一个实施例中，固定和可移动电极被配置在类似器件的阵列内，并且阵列中的每个器件或器件组可单独寻址以致动可移动电极。 在本发明的另一个实施例中，提供了一种可重构电路，其包括单独寻址或选定组中的致动装置阵列，每个可致动装置具有形成在基板上的固定电极，固定电极包括透明高 电阻层和在预定方向上形成有各向异性应力的可动电极，并且邻近固定电极设置。