公开(公告)号：US07629725B1

公开(公告)日：2009-12-08

申请号：US11096395

申请日：2005-04-01

申请人： Clifford F. Knollenberg ,  Michael Albert Helmbrecht

发明人： Clifford F. Knollenberg ,  Michael Albert Helmbrecht

IPC分类号： H02N1/00 ,  G02B26/08

CPC分类号： G02B26/06 ,  B81B3/0037 ,  B81B2203/0163 ,  B81B2203/053 ,  B81B2203/056 ,  G02B26/0825 ,  H01H59/0009 ,  H01H2059/0081

摘要： A micromachined actuator including a body or platform mounted to a suspension system anchored to a substrate. In one embodiment, the suspension system is comprised of a set of one or more spring flexures connecting the actuator body to the substrate with strain relief provided via connecting torsional elements. In another embodiment, the suspension system includes a first set of one or more spring flexures each with one end anchored to a largely rigid intermediate frame and the other end attached to the body. A second set of one or more flexures is attached between the intermediate frame and the substrate. A third actuator embodiment maximizes force electrode area to minimize voltage required for electrostatic actuation. A fourth embodiment provides electrical interconnect to an actuator or an actuator array using polysilicon with silicon nitride isolation. Actuators may be fabricated by combining the key features of all four embodiments or actuators may be fabricated using any combination of two or three of the embodiments.

摘要翻译： 一种微加工致动器，包括安装在悬挂系统上的主体或平台，该系统锚定到基板上。 在一个实施例中，悬架系统包括一组一个或多个弹簧挠曲件，其将致动器本体连接到具有通过连接扭转元件提供的应变消除器的基板。 在另一个实施例中，悬挂系统包括第一组一个或多个弹簧挠曲件，每个弹簧挠性件的一端锚固到大体刚性的中间框架，另一端连接到主体。 第二组一个或多个挠曲件附接在中间框架和基板之间。 第三致动器实施例使力电极面积最大化以最小化静电致动所需的电压。 第四实施例使用具有氮化硅隔离的多晶硅向致动器或致动器阵列提供电互连。 可以通过组合所有四个实施例的关键特征来制造致动器，或者可以使用两个或三个实施例的任何组合来制造致动器。

公开(公告)号：US20070046214A1

公开(公告)日：2007-03-01

申请号：US11485539

申请日：2006-07-11

申请人： Nicholas Pasch

发明人： Nicholas Pasch

IPC分类号： G09G3/10

CPC分类号： H01H59/0009 ,  H01H2059/0045 ,  H01H2059/0081

摘要： A class of electromechanical switch cell is disclosed that has improved switching speed and tolerance to array non-planarity, among other advantages. In one embodiment, the switch cell can include a movable foil that is anchored to the structure, but is not under tension in the unbiased state. In another embodiment, a flexible foil may be mechanically biased so that a portion of the foil is positioned proximate to a reference substrate.

摘要翻译： 公开了一类机电开关电池，其具有改进的开关速度和对阵列非平面性的容限以及其他优点。 在一个实施例中，开关单元可以包括固定到结构上但不处于无偏压状态的可动箔。 在另一个实施例中，柔性箔可以被机械偏置，使得箔的一部分定位成靠近参考衬底。

公开(公告)号：US20060213044A1

公开(公告)日：2006-09-28

申请号：US11442420

申请日：2006-05-26

申请人： Fabrice Casset ,  Guillaume Bouche ,  Maurice Rivoire

发明人： Fabrice Casset ,  Guillaume Bouche ,  Maurice Rivoire

IPC分类号： H01G7/00 ,  H05K3/02

CPC分类号： H01H59/0009 ,  H01G5/16 ,  H01G5/18 ,  H01H2059/0081 ,  Y10T29/43 ,  Y10T29/435 ,  Y10T29/49 ,  Y10T29/49002 ,  Y10T29/49105 ,  Y10T29/49156

摘要： A variable capacitor having a groove portion formed in an insulating substrate, two upper portions of the substrate located on either side of the groove portion forming two lateral edges, a conductive layer covering the inside of the groove portion, a flexible conductive membrane, placed above the groove portion by bearing on the edges, a dielectric layer covering the conductive layer or the membrane to insulate the conductive layer and the membrane, and terminals of application of a voltage between the conductive layer and the membrane, and such that the depth of the groove portion continuously increases from one of the edges to the bottom of the groove portion, and that the conductive layer covers the inside of the groove portion at least to reach one of the two edges, that it may cover.

摘要翻译： 一种可变电容器，其具有形成在绝缘基板中的槽部，位于形成两个侧边缘的槽部的任一侧的基板的两个上部，覆盖所述槽部的内部的导电层，位于上方的柔性导电膜 沟槽部分通过承载在边缘上，覆盖导电层或膜的电介质层以使导电层和膜绝缘，以及在导电层和膜之间施加电压的端子，并且使得 凹槽部分从凹槽部分的一个边缘到底部连续地增加，并且导电层至少覆盖凹槽部分的内部至少可以覆盖两个边缘中的一个。

公开(公告)号：US07105758B2

公开(公告)日：2006-09-12

申请号：US10490395

申请日：2003-06-05

申请人： Yoshito Nakanishi ,  Kunihiko Nakamura

发明人： Yoshito Nakanishi ,  Kunihiko Nakamura

IPC分类号： H01H57/00

CPC分类号： H01H59/0009 ,  H01H2001/0068 ,  H01H2059/0081

摘要： A switch that is capable of responding at a high rate at a lower DC potential while providing high isolation. In this switch, a microstructure group, having microstructures, is used. By slightly moving the microstructures a small amount the group, as a whole, achieves a large amount of movement. Also, by this configuration, it is possible to decrease a DC potential to apply to control electrodes of the microstructures. As a result, a high isolation switch capable of operating at a high rate at a lower DC potential is realized.

摘要翻译： 能够以较低的DC电位高速响应的开关，同时提供高隔离度。 在该开关中，使用具有微观结构的微结构组。 通过稍微移动微结构，该组织整体上实现了大量的运动。 另外，通过这种结构，可以降低施加到微结构的控制电极的DC电位。 结果，实现了能够以较低的DC电位高速工作的高隔离开关。

公开(公告)号：US07082024B2

公开(公告)日：2006-07-25

申请号：US10999211

申请日：2004-11-29

申请人： Fabrice Casset ,  Guillaume Bouche ,  Rivoire Maurice

发明人： Fabrice Casset ,  Guillaume Bouche ,  Rivoire Maurice

IPC分类号： H01G5/00

CPC分类号： H01H59/0009 ,  H01G5/16 ,  H01G5/18 ,  H01H2059/0081 ,  Y10T29/43 ,  Y10T29/435 ,  Y10T29/49 ,  Y10T29/49002 ,  Y10T29/49105 ,  Y10T29/49156

摘要： A variable capacitor having a groove portion formed in an insulating substrate, two upper portions of the substrate located on either side of the groove portion forming two lateral edges, a conductive layer covering the inside of the groove portion, a flexible conductive membrane, placed above the groove portion by bearing on the edges, a dielectric layer covering the conductive layer or the membrane to insulate the conductive layer and the membrane, and terminals of application of a voltage between the conductive layer and the membrane, and such that the depth of the groove portion continuously increases from one of the edges to the bottom of the groove portion, and that the conductive layer covers the inside of the groove portion at least to reach one of the two edges, that it may cover.

公开(公告)号：US06963038B1

公开(公告)日：2005-11-08

申请号：US10857306

申请日：2004-05-28

申请人： Jonathan Simon ,  Steven A. Rosenau

发明人： Jonathan Simon ,  Steven A. Rosenau

IPC分类号： H01H29/00 ,  H01H51/22 ,  H01H59/00 ,  H01P1/12

CPC分类号： H01H59/0009 ,  H01H2029/008 ,  H01H2059/0072 ,  H01H2059/0081 ,  H01P1/127

摘要： Liquid metal microrelays may be made where a contact is formed by constraining a quantity of liquid metal at the end of a contact support suspended over a substrate. Movement of the contact support typically drags the liquid metal along the surface of the substrate and allows the liquid metal to bridge contacts located on the substrate. Coplanar waveguides may be used for the switched signal instead of microstrip transmission lines to reduce transmission line discontinuities due to impedance changes.

摘要翻译： 可以通过在悬浮在基板上的接触支撑件的端部约束一定量的液态金属来形成液体金属微型继电器。 接触支撑件的移动通常沿着衬底的表面拖动液体金属，并允许液体金属桥接位于衬底上的接触。 共面波导可以用于开关信号而不是微带传输线，以减少由于阻抗变化引起的传输线不连续性。

公开(公告)号：US06707355B1

公开(公告)日：2004-03-16

申请号：US09895286

申请日：2001-06-29

申请人： Ian Y. K. Yee

发明人： Ian Y. K. Yee

IPC分类号： H01H5122

CPC分类号： H01H59/0009 ,  H01H2037/008 ,  H01H2059/0081

摘要： In a method for forming a micromechanical device, a force associated with operation of the device is varied between locations spaced across a conductive element of the device. The method may be used to form a switch adapted such that a force associated with actuation of the switch varies between locations spaced across a contact element of the switch. The varied force may include a required closing force for the switch, an applied force during actuation of the switch, a restoring force tending to open the switch, and/or a sticking force tending to keep the switch closed. A variable-valued circuit element having a conductive element and conductive pad may also be formed, adapted such that a fraction of the conductive element which is moved to the proximity of the conductive pad is variable depending on a total magnitude of a force applied.

摘要翻译： 在用于形成微机械装置的方法中，与装置的操作相关联的力在装置的导电元件间隔开的位置之间变化。 该方法可以用于形成适于使得与开关的致动相关联的力在开关的接触元件间隔开的位置之间变化的开关。 变化的力可以包括开关所需的关闭力，开关致动期间的施加力，倾向于打开开关的恢复力和/或趋向于保持开关闭合的粘着力。 还可以形成具有导电元件和导电焊盘的可变值电路元件，其适于使得移动到导电焊盘附近的导电元件的一部分可根据所施加的力的总大小而变化。

公开(公告)号：US20020027487A1

公开(公告)日：2002-03-07

申请号：US09934844

申请日：2001-08-23

申请人： NEC CORPORATION

发明人： Kenichiro Suzuki

IPC分类号： H01P001/12

CPC分类号： G02B26/0841 ,  H01H1/20 ,  H01H59/0009 ,  H01H2059/0063 ,  H01H2059/0081 ,  H01P1/127

摘要： A microswitch is realized that can be driven by low voltage, and at the same time, that has increased impedance between switch terminals when the switch is OFF. The relation between upper electrode (4), lower electrode (6), contact electrode (7), and signal lines (8) is arranged such that the minimum distance between contact electrode 7 and signal lines 8 is greater than the minimum distance between upper electrode 4 and lower electrode 6 when the microswitch is in the OFF state.

摘要翻译： 实现了可以由低电压驱动的微动开关，同时在开关断开时开关端子之间的阻抗增加。 上电极（4），下电极（6），接触电极（7）和信号线（8）之间的关系被布置成使得接触电极7和信号线8之间的最小距离大于上电极 电极4和下电极6。

公开(公告)号：US4480162A

公开(公告)日：1984-10-30

申请号：US352410

申请日：1982-02-26

申请人： John C. Greenwood

发明人： John C. Greenwood

IPC分类号： H01H1/00 ,  H01H1/20 ,  H01H59/00 ,  H01H57/00 ,  H01H3/02

CPC分类号： H01H59/0009 ,  H01H1/0036 ,  H01H1/20 ,  H01H2059/0072 ,  H01H2059/0081

摘要： An electrical contact element includes a support component of an effectively electrically insulating material, especially silicon, the support component including a supporting body and an armature integral with and hingedly connected to the supporting body, the armature carrying at least one electrical contact. The electrical contact element is accommodated in a housing which is hermetically sealed and either filled with an inert gas or evacuated. The housing includes at least one fixed contact, and the supporting body is shaped as a frame which has a recess in which the armature is received when electrical contact is established between the electrical contact carried by the armature and the fixed electrical contacts carried by the housing. The electrical contact element is made by material-removing techniques from a single substantially plate-shaped member and then the electrical contact is vapor-deposited thereon.

摘要翻译： 电接触元件包括有效电绝缘材料，特别是硅的支撑部件，所述支撑部件包括支撑体和与所述支撑体一体并铰接连接的电枢，所述电枢承载至少一个电触点。 电接触元件容纳在气密密封的壳体中，并且填充有惰性气体或抽空。 壳体包括至少一个固定触点，并且支撑体被成形为具有凹槽的框架，当在由电枢承载的电触点和由壳体承载的固定电触点之间建立电接触时，电枢被容纳在该凹部中 。 电接触元件通过从单个基本上板状的构件的材料去除技术制成，然后电接触被气相沉积在其上。

公开(公告)号：US20150311022A1

公开(公告)日：2015-10-29

申请号：US14731830

申请日：2015-06-05

申请人： Anirudha V. Sumant ,  Orlando H. Auciello ,  Derrick C. Mancini

发明人： Anirudha V. Sumant ,  Orlando H. Auciello ,  Derrick C. Mancini

IPC分类号： H01H59/00

CPC分类号： H01H59/0009 ,  B82Y30/00 ,  B82Y40/00 ,  H01H2059/0081 ,  H01H2209/014 ,  H01H2209/046 ,  H01H2209/07 ,  H01H2239/004 ,  H01H2239/006 ,  H01L27/13 ,  H01L27/20 ,  H03K17/975 ,  Y10T29/49105

摘要： An efficient deposition process is provided for fabricating reliable RF MEMS capacitive switches with multilayer ultrananocrystalline (UNCD) films for more rapid recovery, charging and discharging that is effective for more than a billion cycles of operation. Significantly, the deposition process is compatible for integration with CMOS electronics and thereby can provide monolithically integrated RF MEMS capacitive switches for use with CMOS electronic devices, such as for insertion into phase array antennas for radars and other RF communication systems.

摘要翻译： 提供了一种有效的沉积工艺，用于制造具有多层超微晶（UNCD）膜的可靠的RF MEMS电容开关，用于更快速的恢复，充电和放电，对于超过10亿次的操作有效。 重要的是，沉积工艺与CMOS电子器件集成是兼容的，从而可以提供用于CMOS电子器件的单片集成的RF MEMS电容开关，例如用于插入用于雷达和其他RF通信系统的相位阵列天线。