公开(公告)号：US06784766B2

公开(公告)日：2004-08-31

申请号：US10224985

申请日：2002-08-21

申请人： Robert C. Allison ,  Jerold K. Rowland ,  Ron K. Nakahira

发明人： Robert C. Allison ,  Jerold K. Rowland ,  Ron K. Nakahira

IPC分类号： H01P120

CPC分类号： H01P1/203

摘要： A method for the design of tunable filters is disclosed. MEMS switches are used to alter the resonant frequency of one or more resonators. By tuning the resonant frequency of the resonators, the filter's characteristics also are tuned. Furthermore, MEMS switches are used to alter the input coupling, including direct input coupling and capacitive input coupling. Direct input coupling is altered by using the MEMS switches to select different input connection points. Capacitive input coupling is altered by using MEMS switches to add additional input capacitance to an input coupling capacitor.

公开(公告)号：US07098576B2

公开(公告)日：2006-08-29

申请号：US11031950

申请日：2005-01-10

申请人： Robert C. Allison ,  Ron K. Nakahira ,  Joon Park ,  Brian H. Tran

发明人： Robert C. Allison ,  Ron K. Nakahira ,  Joon Park ,  Brian H. Tran

IPC分类号： H01L41/08

CPC分类号： H01G5/18 ,  H01P1/127 ,  H01P11/003

摘要： A micro-electro-mechanical device including a first substrate; a first contact disposed on a first surface of the substrate; a piezoelectric actuator disposed over the first surface of the substrate; a second contact coupled to the actuator and disposed in proximity to the first contact; a gap control mechanism disposed between the substrate and the actuator for limiting movement of the first contact relative to the second contact. In the exemplary embodiment, the gap control mechanism is a gap control stop constructed of dielectric material. In practice, plural stops are used. In the exemplary embodiment, plural thermosonic bonds are used to connect the actuator to the first substrate. A second substrate is disposed over the piezo-electric actuator. The second substrate has wells over the bonds to facilitate application of a bonding tool to the bonds. The gap control mechanism provides consistent height control between a flipped chip and its base substrate without exposing the assembly to high temperatures.

摘要翻译： 一种微电子机械装置，包括第一基板; 设置在所述基板的第一表面上的第一触点; 设置在所述基板的所述第一表面上方的压电致动器; 耦合到所述致动器并且设置在所述第一触点附近的第二触点; 间隙控制机构，设置在所述基板和所述致动器之间，用于限制所述第一接触件相对于所述第二接触件的移动。 在示例性实施例中，间隙控制机构是由电介质材料构成的间隙控制止挡件。 实际上，使用多个停止点。 在示例性实施例中，使用多个热声键将致动器连接到第一基板。 第二基板设置在压电致动器的上方。 第二衬底具有超过键的孔，以便于将键合工具应用于键。 间隙控制机构在翻转芯片与其基底之间提供一致的高度控制，而不会使组件暴露于高温。

公开(公告)号：US06791403B1

公开(公告)日：2004-09-14

申请号：US10392142

申请日：2003-03-19

申请人： Reza Tayrani ,  Larry Dalconzo ,  David J. Drapeau ,  Ron K. Nakahira

发明人： Reza Tayrani ,  Larry Dalconzo ,  David J. Drapeau ,  Ron K. Nakahira

IPC分类号： H01L2500

CPC分类号： H01P1/20336

摘要： RF filter circuits are described which include a bottom dielectric substrate fabricated of a high dielectric material having a relative dielectric constant in a range of 30 to 100. A conductor pattern defining a circuit topology is fabricated on a surface of the substrate.

摘要翻译： 描述了RF滤波器电路，其包括由具有30至100范围内的相对介电常数的高介电常数材料制成的底部电介质衬底。在衬底的表面上制造限定电路拓扑的导体图案。

公开(公告)号：US5812035A

公开(公告)日：1998-09-22

申请号：US769554

申请日：1996-12-19

申请人： Robert G. Fleeger ,  Ron K. Nakahira

发明人： Robert G. Fleeger ,  Ron K. Nakahira

IPC分类号： H01P5/16 ,  H01P5/12

CPC分类号： H01P5/16 ,  Y10T29/49099

摘要： A method of producing a microwave power divider or combiner having equally matched sections of a split terminating resistor. The method initially matches the resistance value of both sections of the split terminating resistor by identifying which section has a lower resistance value. The ratio of the resistance values of the two sections is determined. The section having the lower resistance value is then trimmed until it is equal to the other. The termination sections may then be equally trimmed to provide a desired final resistance value for the terminating resistor.

摘要翻译： 一种产生具有等分匹配的分离终端电阻部分的微波功率分配器或组合器的方法。 该方法最初通过识别哪个部分具有较低的电阻值来匹配分离终端电阻的两个部分的电阻值。 确定两个部分的电阻值的比率。 然后修剪具有较低电阻值的部分，直到其等于另一个。 然后可以对端接部分进行同样的修整，以为终端电阻器提供期望的最终电阻值。

公开(公告)号：US07132723B2

公开(公告)日：2006-11-07

申请号：US10294413

申请日：2002-11-14

申请人： Joon Park ,  Ron K. Nakahira ,  Robert C. Allison

发明人： Joon Park ,  Ron K. Nakahira ,  Robert C. Allison

IPC分类号： H01L21/00

CPC分类号： B81B3/0018 ,  H01G5/16 ,  H01H57/00 ,  H01H2057/006 ,  H01L41/094 ,  H01L41/332

摘要： A radio frequency (RF) micro electro-mechanical system (MEMS) device and method of making same are provided, the device including an RF circuit substrate and an RF conducting path disposed on the RF circuit substrate, a piezoelectric thin film actuator, and a conducting path electrode. The piezoelectric thin film actuator has a proximal end that is fixed relative to the RF circuit substrate and a cantilever end that is spaced from the RF circuit substrate. The conducting path electrode is disposed on the cantilever end of the piezoelectric thin film actuator. The cantilever end of the piezoelectric thin film actuator is movable between a first position whereat the conducting path electrode is spaced from the RF path electrode and a second position whereat the conducting path electrode is spaced from the RF path electrode a second distance, wherein the second distance is less than the first distance. The RF MEMS device is particularly useful as a tunable capacitor. The RF MEMS device requires lower operating voltage, and provides variable RF tuning capacity, fewer stiction problems, simplified fabrication, and an improved switching time.

摘要翻译： 提供了一种射频（RF）微机电系统（MEMS）装置及其制造方法，该装置包括RF电路基板和设置在RF电路基板上的RF传导路径，压电薄膜致动器和 导电路电极。 压电薄膜致动器具有相对于RF电路基板固定的近端和与RF电路基板间隔开的悬臂端。 导电路径电极设置在压电薄膜致动器的悬臂端上。 压电薄膜致动器的悬臂端可在导电路径电极与RF路径电极间隔开的第一位置和导电路径电极与RF路径电极间隔开第二距离的第二位置之间移动，其中第二位置 距离小于第一距离。 RF MEMS器件作为可调谐电容器特别有用。 RF MEMS器件需要更低的工作电压，并提供可变的RF调谐能力，较少的静噪问题，简化的制造以及改进的开关时间。