Micro-electrical-mechanical device and method of making same
    1.
    发明授权
    Micro-electrical-mechanical device and method of making same 有权
    微机电装置及其制造方法

    公开(公告)号:US07098576B2

    公开(公告)日:2006-08-29

    申请号:US11031950

    申请日:2005-01-10

    IPC分类号: H01L41/08

    CPC分类号: H01G5/18 H01P1/127 H01P11/003

    摘要: A micro-electro-mechanical device including a first substrate; a first contact disposed on a first surface of the substrate; a piezoelectric actuator disposed over the first surface of the substrate; a second contact coupled to the actuator and disposed in proximity to the first contact; a gap control mechanism disposed between the substrate and the actuator for limiting movement of the first contact relative to the second contact. In the exemplary embodiment, the gap control mechanism is a gap control stop constructed of dielectric material. In practice, plural stops are used. In the exemplary embodiment, plural thermosonic bonds are used to connect the actuator to the first substrate. A second substrate is disposed over the piezo-electric actuator. The second substrate has wells over the bonds to facilitate application of a bonding tool to the bonds. The gap control mechanism provides consistent height control between a flipped chip and its base substrate without exposing the assembly to high temperatures.

    摘要翻译: 一种微电子机械装置,包括第一基板; 设置在所述基板的第一表面上的第一触点; 设置在所述基板的所述第一表面上方的压电致动器; 耦合到所述致动器并且设置在所述第一触点附近的第二触点; 间隙控制机构,设置在所述基板和所述致动器之间,用于限制所述第一接触件相对于所述第二接触件的移动。 在示例性实施例中,间隙控制机构是由电介质材料构成的间隙控制止挡件。 实际上,使用多个停止点。 在示例性实施例中,使用多个热声键将致动器连接到第一基板。 第二基板设置在压电致动器的上方。 第二衬底具有超过键的孔,以便于将键合工具应用于键。 间隙控制机构在翻转芯片与其基底之间提供一致的高度控制,而不会使组件暴露于高温。

    Micro electro-mechanical system device with piezoelectric thin film actuator
    2.
    发明授权
    Micro electro-mechanical system device with piezoelectric thin film actuator 有权
    具有压电薄膜致动器的微机电系统装置

    公开(公告)号:US07132723B2

    公开(公告)日:2006-11-07

    申请号:US10294413

    申请日:2002-11-14

    IPC分类号: H01L21/00

    摘要: A radio frequency (RF) micro electro-mechanical system (MEMS) device and method of making same are provided, the device including an RF circuit substrate and an RF conducting path disposed on the RF circuit substrate, a piezoelectric thin film actuator, and a conducting path electrode. The piezoelectric thin film actuator has a proximal end that is fixed relative to the RF circuit substrate and a cantilever end that is spaced from the RF circuit substrate. The conducting path electrode is disposed on the cantilever end of the piezoelectric thin film actuator. The cantilever end of the piezoelectric thin film actuator is movable between a first position whereat the conducting path electrode is spaced from the RF path electrode and a second position whereat the conducting path electrode is spaced from the RF path electrode a second distance, wherein the second distance is less than the first distance. The RF MEMS device is particularly useful as a tunable capacitor. The RF MEMS device requires lower operating voltage, and provides variable RF tuning capacity, fewer stiction problems, simplified fabrication, and an improved switching time.

    摘要翻译: 提供了一种射频(RF)微机电系统(MEMS)装置及其制造方法,该装置包括RF电路基板和设置在RF电路基板上的RF传导路径,压电薄膜致动器和 导电路电极。 压电薄膜致动器具有相对于RF电路基板固定的近端和与RF电路基板间隔开的悬臂端。 导电路径电极设置在压电薄膜致动器的悬臂端上。 压电薄膜致动器的悬臂端可在导电路径电极与RF路径电极间隔开的第一位置和导电路径电极与RF路径电极间隔开第二距离的第二位置之间移动,其中第二位置 距离小于第一距离。 RF MEMS器件作为可调谐电容器特别有用。 RF MEMS器件需要更低的工作电压,并提供可变的RF调谐能力,较少的静噪问题,简化的制造以及改进的开关时间。

    Method for forming pattern of organic insulating film
    4.
    发明申请
    Method for forming pattern of organic insulating film 有权
    形成有机绝缘膜图案的方法

    公开(公告)号:US20060115998A1

    公开(公告)日:2006-06-01

    申请号:US11195694

    申请日:2005-08-03

    IPC分类号: H01L21/31

    摘要: A method for forming a pattern of an organic insulating film by forming an electrode on a substrate, coating an imprintable composition thereon to form an organic insulating film, pressurizing and curing the organic insulating film using a patterned mold to transfer a pattern of the mold to the organic insulating film, and etching a portion of the organic insulating film remaining on the electrode. Since a pattern of an organic insulating film can be formed by simple molding without the use of a photoresist, the overall procedure is simplified and eventually an organic thin film transistor with high charge carrier mobility can be fabricated by all wet processes.

    摘要翻译: 一种通过在基板上形成电极形成有机绝缘膜的图案的方法,在其上涂覆可压印组合物以形成有机绝缘膜,使用图案化模具加压和固化有机绝缘膜,以将模具的图案转移到 有机绝缘膜,并蚀刻残留在电极上的有机绝缘膜的一部分。 由于可以通过简单的模制而不使用光致抗蚀剂来形成有机绝缘膜的图案,因此简化了整个过程,并且最终可以通过所有湿法制造具有高载流子迁移率的有机薄膜晶体管。

    Mold for fabricating barrier rib and method of fabricating two-layered barrier rib using same
    5.
    发明申请
    Mold for fabricating barrier rib and method of fabricating two-layered barrier rib using same 审中-公开
    用于制造隔壁的模具和使用其制造两层隔壁的方法

    公开(公告)号:US20060108905A1

    公开(公告)日:2006-05-25

    申请号:US11117324

    申请日:2005-04-29

    IPC分类号: H01J19/42 H01J17/49 H01J1/88

    摘要: The disclosed mold includes recessed parts which have a shape corresponding to embossed portions of the barrier rib to be fabricated, and protruding parts which have a shape corresponding to depressed portions of the barrier rib to be fabricated, protrude adjacent to the recessed parts, and are tapered. The protruding parts and the recessed parts are arranged at regular intervals. It is possible to simply fabricate the two-layered barrier rib for inkjet application through a single embossing process at low cost using the mold for fabricating the barrier rib of the present invention.

    摘要翻译: 所公开的模具包括凹形部分,其具有对应于待制造的障壁的压花部分的形状,并且具有与要制造的障壁的凹陷部分相对应的形状的突出部分突出邻近凹部突出,并且是 锥。 突出部和凹部以规则间隔配置。 通过使用本发明的隔壁的模具,可以以低成本简单地制造用于喷墨应用的双层阻挡肋,通过单一的压花加工。

    Abrasive medium with selected density
    7.
    发明授权
    Abrasive medium with selected density 失效
    研磨介质选择密度

    公开(公告)号:US6165059A

    公开(公告)日:2000-12-26

    申请号:US44213

    申请日:1998-02-19

    申请人: Joon Park

    发明人: Joon Park

    IPC分类号: B24B31/14 D06B11/00 B24B31/06

    CPC分类号: B24B31/14 D06B11/0096

    摘要: The hard coated abrasive medium is formed by providing a hollow body with abrasive deposit on the outer surface. The buoyancy is provided by the enclosed air space, and the weight is defined by the weight of the body plus the hard plating or the abrasive grit deposited thereon. The density is selected in accordance to the character of the workpiece with which it is to be used in order to optimize the abrading action by interacting with the workpiece in the optimum fashion. In one embodiment, the abrasive grit is bonded to the exterior surface of the abrasive medium in a spiral shape to accelerate the abrading action.

    摘要翻译: 硬涂层磨料介质通过在外表面上提供具有磨料沉积物的中空体形成。 浮力由封闭的空气空间提供,重量由身体的重量加上沉积在其上的硬质电镀或磨料砂粒确定。 根据要使用的工件的特性选择密度,以通过以最佳方式与工件相互作用来优化研磨作用。 在一个实施例中,磨料砂粒以螺旋形状结合到研磨介质的外表面,以加速研磨作用。

    Printed wiring assembly coplanarity inspection fixture
    8.
    发明授权
    Printed wiring assembly coplanarity inspection fixture 失效
    印刷线路组装共面检查夹具

    公开(公告)号:US5519315A

    公开(公告)日:1996-05-21

    申请号:US332206

    申请日:1994-10-31

    IPC分类号: G01B7/31 G01B7/34 G01B7/02

    CPC分类号: G01B7/345 G01B7/31

    摘要: A coplanarity inspection fixture for use in determining the coplanarity of a printed wiring assembly with respect to its edge connector. The fixture measures the deviation in parallelism between respective card guides of the printed wiring assembly and the centerline of the edge connector. The fixture includes a frame, a linear bearing block affixed to the frame, a rotational bearing block disposed above the linear bearing block, and a pin slot block fastened to the rotational bearing block. The pin slot block includes a plurality of slots for receiving the rows of pins of the edge connector. Left and right support members are vertically disposed on the frame for guiding and aligning the card guides so that the plurality of rows of connector pins of the connector mate with the slots in the pin slot block. A plurality of clamping jaw assemblies are affixed to the left and right support members that are adjustable to selectively grip a calibration template to calibrate the fixture, and thereafter to calibrate the printed wiring assembly that is to be inspected. Left and right indicators contact the pin slot block adjacent the respective support members along the centerline of the pin slot block, and are zeroed using the calibration template. After calibration, the indicators are used to measure the relative deviation of the centerline of the edge connector with respect to the card guides, which determines the deviation in parallelism between respective card guides and the centerline of the edge connector, whose centerline is designed to be coplanar with the respective centerlines of the card guides.

    摘要翻译: 用于确定印刷线路组件相对于其边缘连接器的共面性的共平面检查夹具。 夹具测量印刷线路组件的相应卡片导轨和边缘连接器的中心线之间的平行度偏差。 固定装置包括框架,固定在框架上的直线轴承块,设置在直线轴承座上方的旋转轴承块,以及固定在旋转轴承座上的销槽块。 销槽块包括用于接收边缘连接器的销的行的多个槽。 左和右支撑构件垂直设置在框架上,用于引导和对准卡引导件,使得连接器的多排连接器针与插槽槽中的槽配合。 多个夹钳组件固定到左和右支撑构件上,所述左和右支撑构件可调节以选择性地夹持校准模板以校准夹具,并且此后校准要检查的印刷线路组件。 左右指示器沿着针槽插槽块的中心线与相应的支撑构件相邻的针槽插槽接触,并使用校准模板进行归零。 在校准之后,指示器用于测量边缘连接器相对于卡引导件的中心线的相对偏差,其确定相应卡片引导件与边缘连接器的中心线之间并联的偏差,其中心线被设计为 与卡片指南的相应中心线共面。

    Carrier handling system
    9.
    发明授权
    Carrier handling system 失效
    承运人处理系统

    公开(公告)号:US5470196A

    公开(公告)日:1995-11-28

    申请号:US323297

    申请日:1994-10-14

    申请人: Joon Park

    发明人: Joon Park

    IPC分类号: H05K13/00 B65G59/06

    CPC分类号: H05K13/0084

    摘要: The carrier handling system has a plurality of magazine tubes which contain carriers. In each tube, the carrier contains a different electronic component. A carriage is mounted on the base and moves on rectangular coordinates to the selected magazine tube. The collector saddle on the carriage is raised and the lowest carrier in the selected magazine is pushed out into the collector saddle. The collector saddle is moved to a reference position where the carrier is positioned for further processing.

    摘要翻译: 载体处理系统具有多个包含载体的杂志管。 在每个管中,载体包含不同的电子部件。 托架安装在基座上,并以矩形坐标移动到所选的刀库管。 滑架上的收集器鞍座升高,所选仓库中的最低支架被推出到收集鞍座中。 收集器鞍座移动到载体定位用于进一步处理的基准位置。

    Printed wiring board fixture apparatus
    10.
    发明授权
    Printed wiring board fixture apparatus 失效
    印刷线路板固定装置

    公开(公告)号:US4998712A

    公开(公告)日:1991-03-12

    申请号:US502374

    申请日:1990-03-30

    IPC分类号: B25B5/06 H05K13/00

    CPC分类号: H05K13/0069 B25B5/061

    摘要: The base (12) of the fixture apparatus carries four fingers (22)-(28) which define the top plane of the printed wiring board (14). The fingers move out of active position to permit placement of the board in a frame (16). The frame rests on lifter assemblies (46-52) which raise the printed wiring board into contact with the fingers.

    摘要翻译: 固定装置的基座(12)承载限定印刷电路板(14)的顶面的四个指状物(22) - (28)。 手指移出主动位置以允许将板放置在框架(16)中。 该框架位于升降器组件(46-52)上,该组件将印刷电路板与手指接触。