公开(公告)号：US06655901B2

公开(公告)日：2003-12-02

申请号：US10012737

申请日：2001-11-05

申请人： Ryusuke Tsubota ,  Kohta Hoshijima

发明人： Ryusuke Tsubota ,  Kohta Hoshijima

IPC分类号： B25J1804

CPC分类号： H01L21/67766 ,  B25J9/042 ,  B25J9/046 ,  B25J9/06

摘要： A transfer robot includes a machine base, at least one hand for holding a workpiece, a hand moving mechanism for moving the hand horizontally reciprocally at least in an X direction, a first arm pivotally connected to the machine base for rotation about an axis extending in the X direction. The robot further includes an intermediate arm pivotally connected to the first arm for rotation about another axis extending in the X direction, a second arm pivotally connected to the intermediate arm for rotation about a further axis extending in the X direction. The second arm is also connected to the hand moving mechanism which is rotatable about a still another axis extending in the X direction. A driving mechanism is provided for rotating the first arm, the second arm, the intermediate arm and the hand moving mechanism about the respective axes.

公开(公告)号：US6109860A

公开(公告)日：2000-08-29

申请号：US211591

申请日：1998-12-14

申请人： Hironori Ogawa ,  Ryusuke Tsubota

发明人： Hironori Ogawa ,  Ryusuke Tsubota

IPC分类号： B25J9/04 ,  B25J9/06 ,  B25J19/00 ,  H01L21/677 ,  B25J18/04

CPC分类号： B25J9/06 ,  B25J9/042 ,  H01L21/67742 ,  Y10S414/13 ,  Y10T74/20207

摘要： A two-armed transfer robot is provided which includes an upper arm mechanism and a lower arm mechanism which is substantially identical to the upper arm mechanism. Each arm mechanism is provided with a handling member for carrying a workpiece to be processed. Each arm mechanism is also provided with a pantograph assembly consisting of a base arm, an outer link, a pair of intermediate links and an inner link. The handling member of each arm mechanism is arranged to be spaced from a central driving shaft when the handling member is retreated closer to the shaft. The base arm of the pantograph assembly is inclined away from the handling member when the handling member is retreated closer to the shaft. At the same time, the intermediate links are also inclined away from the handling member.

摘要翻译： 提供了一种双臂传送机器人，其包括与上臂机构基本相同的上臂机构和下臂机构。 每个臂机构设置有用于承载要处理的工件的处理构件。 每个臂机构还设置有由基部臂，外部连杆，一对中间连杆和内部连杆构成的受电弓组件。 每个臂机构的处理构件布置成当处理构件更靠近轴后退时与中心驱动轴间隔开。 当处理构件更靠近轴时，缩放组件的基部臂远离处理构件倾斜。 同时，中间连杆也远离处理部件倾斜。

公开(公告)号：US6099238A

公开(公告)日：2000-08-08

申请号：US30112

申请日：1998-02-25

申请人： Ryusuke Tsubota

发明人： Ryusuke Tsubota

IPC分类号： B25J9/06 ,  B25J9/10 ,  B25J18/02 ,  H01L21/677 ,  B66C23/00

CPC分类号： B25J9/107 ,  H01L21/67742 ,  Y10T74/20335

摘要： A two-armed transfer robot includes a first arm mechanism and a second arm mechanism. Each arm mechanism has a handling member for carrying a workpiece. The robot further includes a stationary base member and four shafts rotatable about a common vertical axis. Driving devices for the respective shafts are attached to the base frame. The first and second arm mechanisms are actuated upon rotation of the shafts driven by the driving devices. When the shafts are rotated in a same direction, the handling members of the arm mechanisms are caused to pivot about the common vertical axis. When the shafts are rotated in opposite directions, the handling members are caused to linearly move toward or away from the axis. The two arm mechanisms are vertically spaced from each other, so that they do not interfere with each other.

摘要翻译： 双臂传送机器人包括第一臂机构和第二臂机构。 每个臂机构具有用于承载工件的处理构件。 机器人还包括固定基座构件和围绕公共垂直轴线旋转的四个轴。 用于相应轴的驱动装置附接到基架。 第一和第二臂机构在由驱动装置驱动的轴旋转时被致动。 当轴沿相同的方向旋转时，使臂机构的处理构件围绕公共垂直轴线枢转。 当轴沿相反的方向旋转时，处理部件被引导向轴线或远离轴线移动。 两个臂机构彼此垂直间隔开，使得它们不彼此干涉。

公开(公告)号：US6102649A

公开(公告)日：2000-08-15

申请号：US211075

申请日：1998-12-14

申请人： Hironori Ogawa ,  Ryusuke Tsubota

发明人： Hironori Ogawa ,  Ryusuke Tsubota

IPC分类号： B25J9/06 ,  B25J9/10 ,  B25J19/00 ,  H01L21/677 ,  B25J18/00

CPC分类号： B25J9/1065 ,  H01L21/67742 ,  Y10S414/13 ,  Y10T74/20207

摘要： A two-armed transfer robot is provided which includes a first double-pantograph mechanism and a second double-pantograph mechanism which is substantially similar in arrangement to the first double-pantograph mechanism. Each double-pantograph mechanism includes a first pantograph assembly and a second pantograph assembly. The first pantograph assembly is provided with an inner link, a pair of first intermediate links and an outer link. The second pantograph assembly is provided with the outer link in common with the first pantograph assembly, a pair of second intermediate links and a hand-supporting link. The transfer robot also includes a stationary base member, first to fourth shafts coaxially supported by the base member for rotational movement about a vertical axis, first to fourth driving devices for actuating the first to the fourth shafts, respectively. The driving devices are fixed to the base member. The transfer robot further includes first and second handling members supported by the hand-supporting links of the first and the second double-pantograph mechanisms, respectively. The first and the second intermediate links of each double-pantograph mechanism is inclined beyond the vertical axis in a direction opposite to the handling member when the handling member is retreated closer to the shafts.

摘要翻译： 提供一种双臂传送机器人，其包括第一双缩放机构和第二双缩放机构，其与第一双缩放机构的布置基本相似。 每个双缩放机构包括第一受电弓组件和第二受电弓组件。 第一受电弓组件设置有内连杆，一对第一中间连杆和外连杆。 第二受电弓组件设置有与第一缩放仪组件共同的外部连杆，一对第二中间连杆和手持支撑连杆。 传送机器人还包括固定基座构件，第一至第四轴同轴地由基座构件支撑，用于围绕垂直轴线旋转运动，第一至第四驱动装置分别用于致动第一至第四轴。 驱动装置固定在基座部件上。 传送机械手还包括分别由第一和第二双缩放机构的手持支撑件支撑的第一和第二处理部件。 当处理构件更靠近轴退避时，每个双缩放机构的第一和第二中间连杆在与处理构件相反的方向上倾斜超过垂直轴线。