公开(公告)号：US07306423B2

公开(公告)日：2007-12-11

申请号：US10825267

申请日：2004-04-14

申请人： Hironori Ogawa ,  Takafumi Uratani ,  Masayuki Sugane ,  Yoshiyuki Matsuzaki ,  Naoya Murata ,  Sakiko Uno

发明人： Hironori Ogawa ,  Takafumi Uratani ,  Masayuki Sugane ,  Yoshiyuki Matsuzaki ,  Naoya Murata ,  Sakiko Uno

IPC分类号： B25J18/02

CPC分类号： H01L21/67766 ,  B25J9/042 ,  B25J9/1065 ,  H01L21/67742 ,  Y10S414/13 ,  Y10T74/20305

摘要： A linear moving mechanism includes a guide member providing a horizontal straight transport path, a moving member movable along the transport path and a drive mechanism which drives the moving member. The drive mechanism includes a first link arm pivotable around a first vertical shaft, and a second link arm having a first end and a second end. The first vertical shaft is on the transport path or on a line parallel to the transport path. The first end is connected to the first link arm for pivotal movement of the second link arm in a horizontal plane, whereas the second end is connected to the moving member for pivotal movement of the second link arm in a horizontal plane.

摘要翻译： 线性移动机构包括提供水平直线传送路径的引导构件，可沿传送路径移动的移动构件和驱动移动构件的驱动机构。 驱动机构包括可绕第一垂直轴可枢转的第一连杆臂和具有第一端和第二端的第二连杆臂。 第一垂直轴位于输送路径上或平行于输送路径的线上。 第一端连接到第一连杆臂，以使第二连杆臂在水平面中枢转运动，而第二端连接到移动部件上，以使第二连杆臂在水平面上枢转运动。

公开(公告)号：US6109860A

公开(公告)日：2000-08-29

申请号：US211591

申请日：1998-12-14

申请人： Hironori Ogawa ,  Ryusuke Tsubota

发明人： Hironori Ogawa ,  Ryusuke Tsubota

IPC分类号： B25J9/04 ,  B25J9/06 ,  B25J19/00 ,  H01L21/677 ,  B25J18/04

CPC分类号： B25J9/06 ,  B25J9/042 ,  H01L21/67742 ,  Y10S414/13 ,  Y10T74/20207

摘要： A two-armed transfer robot is provided which includes an upper arm mechanism and a lower arm mechanism which is substantially identical to the upper arm mechanism. Each arm mechanism is provided with a handling member for carrying a workpiece to be processed. Each arm mechanism is also provided with a pantograph assembly consisting of a base arm, an outer link, a pair of intermediate links and an inner link. The handling member of each arm mechanism is arranged to be spaced from a central driving shaft when the handling member is retreated closer to the shaft. The base arm of the pantograph assembly is inclined away from the handling member when the handling member is retreated closer to the shaft. At the same time, the intermediate links are also inclined away from the handling member.

摘要翻译： 提供了一种双臂传送机器人，其包括与上臂机构基本相同的上臂机构和下臂机构。 每个臂机构设置有用于承载要处理的工件的处理构件。 每个臂机构还设置有由基部臂，外部连杆，一对中间连杆和内部连杆构成的受电弓组件。 每个臂机构的处理构件布置成当处理构件更靠近轴后退时与中心驱动轴间隔开。 当处理构件更靠近轴时，缩放组件的基部臂远离处理构件倾斜。 同时，中间连杆也远离处理部件倾斜。

公开(公告)号：US08823309B2

公开(公告)日：2014-09-02

申请号：US13391962

申请日：2010-09-17

申请人： Hironori Ogawa ,  Masahiro Koyama ,  Nobuo Shibata ,  Masaru Matsushima ,  Shuichi Nakagawa ,  Katsunori Onuki ,  Yoshimasa Fukushima

发明人： Hironori Ogawa ,  Masahiro Koyama ,  Nobuo Shibata ,  Masaru Matsushima ,  Shuichi Nakagawa ,  Katsunori Onuki ,  Yoshimasa Fukushima

IPC分类号： G03B27/42 ,  H01L21/027

CPC分类号： H01J37/20 ,  H01J2237/20228 ,  H01J2237/20278

摘要： Disclosed is a smaller and lighter stage device which can be applied to a device such as a length measurement SEM for inspecting and/or evaluating a semiconductor, and in which the effect of a magnetic field on an electron beam can be reduced. Linear motors 110, 111, 112, 113 are disposed on four sides of a base 104 to be distanced from an electron beam projection position (the center of the stage device), respectively. The base 104 has dimensions substantially equivalent to minimum dimensions determined by the size of a top table 101 and a movable stroke. Linear motor stators 110, 112 are configured to have a “C-shaped” structure whose opening faces outside of the stage device, respectively. Further, a movable table is coupled to the top table via linear guides 107, 109 composed of a nonmagnetic material or roller mechanisms composed of a nonmagnetic material.

摘要翻译： 公开了一种可以应用于诸如用于检查和/或评估半导体的长度测量SEM的装置的较小和较轻的平台装置，其中可以减小磁场对电子束的影响。 直线电动机110,111,112,113分别设置在基座104的四侧，与电子束突出位置（台装置的中心）分开。 基座104的尺寸基本上等于由顶台101和可移动冲程的尺寸确定的最小尺寸。 线性电动机定子110,112被构造为具有开口面分别位于舞台装置外侧的“C”形结构。 此外，可移动工作台通过由非磁性材料构成的线性引导件107,109或由非磁性材料构成的滚子机构联接到顶台。

公开(公告)号：US20050079043A1

公开(公告)日：2005-04-14

申请号：US10888677

申请日：2004-07-09

申请人： Hironori Ogawa ,  Sakiko Uno

发明人： Hironori Ogawa ,  Sakiko Uno

IPC分类号： B25J9/06 ,  B25J9/10 ,  B25J18/04 ,  B65G49/07 ,  H01L21/677 ,  H01L21/687 ,  B65G1/00

CPC分类号： B25J9/1065 ,  B25J18/04 ,  H01L21/68707 ,  Y10S414/13 ,  Y10T74/20329

摘要： A two-arm transfer robot includes a swivel base arranged to swivel about a vertical swivel axis, and a pair of link arm mechanisms attached to the swivel base. These two link arm mechanisms are symmetrical in structure and function with respect to the swivel axis. A first hand member is supported by one of the link arm mechanisms for carrying a work, while a second hand member is supported by the other link arm mechanism for carrying a work. The first hand member and the second hand member are horizontally movable at the same height without interfering with each other.

摘要翻译： 双臂传送机器人包括设置成围绕垂直旋转轴线旋转的旋转基座和连接到旋转底座的一对连杆臂机构。 这两个连杆臂机构的结构和功能相对于旋转轴线是对称的。 第一手构件由用于承载工件的连杆臂机构中的一个支撑，而第二手构件由另一个连杆臂机构支撑以承载工件。 第一手构件和第二手构件可在相同的高度水平移动，而不会彼此干涉。

公开(公告)号：US6102649A

公开(公告)日：2000-08-15

申请号：US211075

申请日：1998-12-14

申请人： Hironori Ogawa ,  Ryusuke Tsubota

发明人： Hironori Ogawa ,  Ryusuke Tsubota

IPC分类号： B25J9/06 ,  B25J9/10 ,  B25J19/00 ,  H01L21/677 ,  B25J18/00

CPC分类号： B25J9/1065 ,  H01L21/67742 ,  Y10S414/13 ,  Y10T74/20207

摘要： A two-armed transfer robot is provided which includes a first double-pantograph mechanism and a second double-pantograph mechanism which is substantially similar in arrangement to the first double-pantograph mechanism. Each double-pantograph mechanism includes a first pantograph assembly and a second pantograph assembly. The first pantograph assembly is provided with an inner link, a pair of first intermediate links and an outer link. The second pantograph assembly is provided with the outer link in common with the first pantograph assembly, a pair of second intermediate links and a hand-supporting link. The transfer robot also includes a stationary base member, first to fourth shafts coaxially supported by the base member for rotational movement about a vertical axis, first to fourth driving devices for actuating the first to the fourth shafts, respectively. The driving devices are fixed to the base member. The transfer robot further includes first and second handling members supported by the hand-supporting links of the first and the second double-pantograph mechanisms, respectively. The first and the second intermediate links of each double-pantograph mechanism is inclined beyond the vertical axis in a direction opposite to the handling member when the handling member is retreated closer to the shafts.

摘要翻译： 提供一种双臂传送机器人，其包括第一双缩放机构和第二双缩放机构，其与第一双缩放机构的布置基本相似。 每个双缩放机构包括第一受电弓组件和第二受电弓组件。 第一受电弓组件设置有内连杆，一对第一中间连杆和外连杆。 第二受电弓组件设置有与第一缩放仪组件共同的外部连杆，一对第二中间连杆和手持支撑连杆。 传送机器人还包括固定基座构件，第一至第四轴同轴地由基座构件支撑，用于围绕垂直轴线旋转运动，第一至第四驱动装置分别用于致动第一至第四轴。 驱动装置固定在基座部件上。 传送机械手还包括分别由第一和第二双缩放机构的手持支撑件支撑的第一和第二处理部件。 当处理构件更靠近轴退避时，每个双缩放机构的第一和第二中间连杆在与处理构件相反的方向上倾斜超过垂直轴线。

公开(公告)号：US5975834A

公开(公告)日：1999-11-02

申请号：US31520

申请日：1998-02-27

申请人： Hironori Ogawa ,  Hirokazu Yoda

发明人： Hironori Ogawa ,  Hirokazu Yoda

IPC分类号： B25J9/06 ,  B25J9/10 ,  B25J17/00 ,  B25J18/02 ,  B25J18/04 ,  H01L21/677 ,  B25J18/00

CPC分类号： B25J18/04 ,  B25J9/009 ,  B25J9/107 ,  H01L21/67742 ,  Y10S414/141

摘要： A two-armed transfer robot includes first and second arm mechanisms each having a handling member for carrying a workpiece.First to third shafts associated with the arm mechanisms are coaxially supported by a stationary base frame for rotation about a first axis. The first arm mechanism has a pantograph assembly including a first arm, an outer link, a pair of intermediate links and an inner link. The first arm carries the outer link for rotation about a second axis. The outer link carries each intermediate link for rotation about a third axis. The third axes are spaced outward from the second axis. The second axis is located between the third axes as viewed circumferentially about the first axis. The first arm mechanism also has rotation-transmitting members and connecting members. The second arm mechanism is substantially identical to the first arm mechanism. The first and the second handling members are vertically spaced from each other to avoid interference with each other.

摘要翻译： 双臂传送机器人包括第一和第二臂机构，每个具有用于承载工件的处理构件。 与臂机构相关联的第一至第三轴由固定的基架同轴支撑，以围绕第一轴线旋转。 第一臂机构具有包括第一臂，外链节，一对中间连杆和内链节的受电弓组件。 第一臂承载外部连杆以围绕第二轴线旋转。 外部连杆承载每个中间连杆以围绕第三轴线旋转。 第三轴与第二轴向外隔开。 当围绕第一轴线周向地观察时，第二轴线位于第三轴线之间。 第一臂机构还具有旋转传递构件和连接构件。 第二臂机构与第一臂机构基本相同。 第一和第二处理构件彼此垂直间隔开以避免彼此干涉。

公开(公告)号：US08076651B2

公开(公告)日：2011-12-13

申请号：US12415720

申请日：2009-03-31

申请人： Masahiro Koyama ,  Hironori Ogawa ,  Nobuo Shibata ,  Masaru Matsushima ,  Toshinori Kobayashi ,  Shuichi Nakagawa

发明人： Masahiro Koyama ,  Hironori Ogawa ,  Nobuo Shibata ,  Masaru Matsushima ,  Toshinori Kobayashi ,  Shuichi Nakagawa

IPC分类号： H01J37/20

CPC分类号： H01J37/20 ,  H01J37/28 ,  H01J2237/0216 ,  H01J2237/202 ,  H01J2237/2485 ,  H01L21/68

摘要： A specimen stage apparatus has a braking structure which can generate a braking force enough to stop a specimen stage while keeping a movable table from increasing in its weight. The specimen stage apparatus has an X guide fixed on an X base and representing a guide structure in X direction, an X table constrained by the X guide to be movable in X direction, an X actuator having its movable part fixed to the X table and an X brake fixed to the X base and representing a braking structure for the X table. A controller carries out positioning control in which it generates a braking force by pushing the X brake against the bottom surface of the X table to stop a specimen stage and turning off the servo-control of the X actuator after stoppage of the specimen stage.

摘要翻译： 试样台装置具有制动结构，其可以产生足以停止试样台的制动力，同时保持可移动台不增加其重量。 试样台装置具有固定在X基座上并表示X方向的导向结构的X导件，由X导向件限制的X台沿X方向移动的X导件，具有固定到X台的可动部的X致动器， X制动器固定在X底座上并表示X台的制动结构。 控制器执行定位控制，其中通过将X制动器推压到X工作台的底面上来产生制动力，以在试样台停止之后停止试样台并关闭X致动器的伺服控制。

公开(公告)号：US20090250625A1

公开(公告)日：2009-10-08

申请号：US12415720

申请日：2009-03-31

申请人： Masahiro KOYAMA ,  Hironori Ogawa ,  Nobuo Shibata ,  Masaru Matsushima ,  Toshinori Kobayashi ,  Shuichi Nakagawa

发明人： Masahiro KOYAMA ,  Hironori Ogawa ,  Nobuo Shibata ,  Masaru Matsushima ,  Toshinori Kobayashi ,  Shuichi Nakagawa

IPC分类号： G21K5/10

CPC分类号： H01J37/20 ,  H01J37/28 ,  H01J2237/0216 ,  H01J2237/202 ,  H01J2237/2485 ,  H01L21/68

摘要： A specimen stage apparatus has a braking structure which can generate a braking force enough to stop a specimen stage while keeping a movable table from increasing in its weight. The specimen stage apparatus has an X guide fixed on an X base and representing a guide structure in X direction, an X table constrained by the X guide to be movable in X direction, an X actuator having its movable part fixed to the X table and an X brake fixed to the X base and representing a braking structure for the X table. A controller carries out positioning control in which it generates a braking force by pushing the X brake against the bottom surface of the X table to stop a specimen stage and turning off the servo-control of the X actuator after stoppage of the specimen stage.

摘要翻译： 试样台装置具有制动结构，其可以产生足以停止试样台的制动力，同时保持可移动台不增加其重量。 试样台装置具有固定在X基座上并表示X方向的导向结构的X导件，由X导向件限制的X台沿X方向移动的X导件，具有固定到X台的可动部的X致动器， X制动器固定在X底座上并表示X台的制动结构。 控制器执行定位控制，其中通过将X制动器推压到X工作台的底面上来产生制动力，以在试样台停止之后停止试样台并关闭X致动器的伺服控制。

公开(公告)号：US20060217643A1

公开(公告)日：2006-09-28

申请号：US10552412

申请日：2004-04-09

申请人： Mitsuhisa Yonekawa ,  Kouichi Abe ,  Hironori Ogawa

发明人： Mitsuhisa Yonekawa ,  Kouichi Abe ,  Hironori Ogawa

IPC分类号： A61H9/00

CPC分类号： A61H9/0078 ,  A61H2201/0149 ,  A61H2205/04 ,  A61H2205/062 ,  A61H2205/081 ,  A61H2205/10

摘要： A massaging apparatus comprises a leg rest 8 including leg supporting members 15 and 16 which are provided with lower thigh-location grooves 15a and 16a for placing user's lower thighs and rotatably provided peripherally of the lower thigh-location grooves 15a and 16a, and airbags 27 and 28 for rotating the leg supporting members 16 and 16 peripherally of the lower thigh-location grooves 15a and 16a. The massaging apparatus also includes airbags 19 to 22 provided in the lower thigh-location grooves 15a and 16a, air supply-exhaust means 35 for operating the airbags 19 to 22 and massaging the lower thighs by the airbags 19 to 22, and an arithmetic control circuit 36 for operating and controlling the airbags 27 and 28 and the air supply-exhaust means 35. The arithmetic control circuit 36 operates the airbags 27 and 28 to rotate the leg supporting members 15 and 16 peripherally of the lower thigh-location grooves 15a and 16a and operates the air supply-exhaust means 35 to massage the lower thighs by the airbags 19 to 22.

摘要翻译： 一种按摩装置，包括：腿部支架8，其包括腿部支撑部件15,16;腿部支撑部件15和16设置有用于放置使用者的下部大腿的下部大腿定位槽15a和16a，并且可旋转地设置在下部大腿定位槽15a和16a周围 以及用于使腿部支撑构件16和16在下部大腿位置凹槽15a和16a周围旋转的安全气囊27和28。 按摩机还包括设置在下大腿位置凹槽15a和16a中的安全气囊19至22，用于操作安全气囊19至22的空气供给排气装置35以及由安全气囊19至22按摩下大腿， 用于操作和控制安全气囊27和28以及供气排气装置35的运算控制电路36.运算控制电路36操作安全气囊27和28，以使脚部支撑构件15和16在下大腿位置凹槽 15a和16a，并且操作排气装置35以通过安全气囊19至22按摩下大腿。

公开(公告)号：US06293746B1

公开(公告)日：2001-09-25

申请号：US09348226

申请日：1999-07-06

申请人： Hironori Ogawa ,  Masashi Kamitani

发明人： Hironori Ogawa ,  Masashi Kamitani

IPC分类号： B65H100

CPC分类号： B25J9/1065 ,  B25J9/042 ,  H01L21/67742 ,  Y10S414/141

摘要： A transfer robot is provided which includes a stationary base, two coaxially rotatable shafts, two motors for driving these shafts, and an arm mechanism provided with at least one handling member for holding a workpiece. The arm mechanism includes a base link rotatable about a first axis, and a pantograph assembly carried by the base link. The pantograph assembly is made up of an outer link supported by the base link for rotation about a second axis, intermediate links supported by the outer link for rotation about third axes, an inner link supported by the intermediate links for rotation about fourth axes. The third axes are offset from the second axis toward the first axis. The distance between the first and the second axes is equal to the distance between the third and the fourth axes.

摘要翻译： 提供一种传送机器人，其包括固定基座，两个同轴可旋转的轴，用于驱动这些轴的两个马达，以及设置有至少一个用于保持工件的操作构件的臂机构。 臂机构包括可围绕第一轴线旋转的基座连杆和由基座连杆承载的牵引弓组件。 受电弓组件由由基座支撑的外部连杆构成，用于围绕第二轴线旋转，由外部连杆支撑的中间连杆围绕第三轴线旋转;由中间连杆支撑的内部连杆，用于围绕第四轴线旋转。 第三轴从第二轴向第一轴偏移。 第一和第二轴之间的距离等于第三轴和第四轴之间的距离。