公开(公告)号：US06903786B2

公开(公告)日：2005-06-07

申请号：US10865779

申请日：2004-06-14

申请人： Tomoaki Takahashi ,  Sakari Kaneku ,  Hideaki Yamamoto ,  Mitsuo Nakatani ,  Hiroshi Sasaki

发明人： Tomoaki Takahashi ,  Sakari Kaneku ,  Hideaki Yamamoto ,  Mitsuo Nakatani ,  Hiroshi Sasaki

IPC分类号： G02F1/136 ,  C23C28/02 ,  C25F3/02 ,  G02F1/1343 ,  G02F1/1362 ,  G02F1/1368 ,  G09F9/30 ,  H01L21/3063 ,  H01L21/336 ,  H01L29/786

CPC分类号： G02F1/13458 ,  G02F1/134363 ,  G02F1/136286 ,  G02F2001/13629

摘要： A method of manufacturing an LCD device which includes a gate line having an effective display area which includes an aluminum alloy layer and an aluminum oxide layer. The gate line also includes a gate terminal portion which is made up of the same aluminum alloy layer with a molybdenum alloy layer formed thereon. To form this structure, an insulating substrate of the LCD device, with the laminated structure of the aluminum alloy layer and the molybdenum layer, is immersed in an electrolytic solution. During the immersion, the molybdenum layer is etched off the aluminum alloy in the effective displaying area, while the etching is prevented in the gate terminal area by a protective layer. Following this, the aluminum oxide layer is formed over the aluminum alloy in the effected display area while the device is still immersed in the electrolytic solution.

摘要翻译： 一种制造LCD装置的方法，其包括具有包括铝合金层和氧化铝层的有效显示区域的栅极线。 栅极线还包括由形成有钼合金层的相同的铝合金层构成的栅极端子部。 为了形成该结构，将具有铝合金层和钼层的层叠结构的LCD装置的绝缘基板浸渍在电解液中。 在浸渍期间，在有效显示区域中，钼层被蚀刻掉铝合金，同时通过保护层在栅极端子区域中防止蚀刻。 接下来，在受影响的显示区域中在铝合金上形成氧化铝层，同时该装置仍然浸没在电解液中。