公开(公告)号：US09437419B2

公开(公告)日：2016-09-06

申请号：US14173381

申请日：2014-02-05

申请人： Younsoo Kim ,  Sangyeol Kang ,  Hiroki Sato ,  Tsubasa Shiratori ,  Naoki Yamada ,  Chayoung Yoo ,  Younjoung Cho ,  Chin Moo Cho ,  Jaehyoung Choi

发明人： Younsoo Kim ,  Sangyeol Kang ,  Hiroki Sato ,  Tsubasa Shiratori ,  Naoki Yamada ,  Chayoung Yoo ,  Younjoung Cho ,  Chin Moo Cho ,  Jaehyoung Choi

IPC分类号： H01L21/02 ,  C23C16/40 ,  C23C16/34 ,  C23C16/455 ,  H01L49/02

CPC分类号： H01L21/0217 ,  C23C16/34 ,  C23C16/401 ,  C23C16/45531 ,  C23C16/45553 ,  H01L21/02164 ,  H01L21/02189 ,  H01L21/02211 ,  H01L21/0228 ,  H01L28/40

摘要： A trialkylsilane-based silicon precursor compound may be expressed by Si(Ri)X, i=1-3, where each of “R1”, “R2”, and “R3” is a hydrogen or an alkyl having 1-5 carbon(s), all of “R1”, “R2”, and “R3” are not hydrogen, “X” is one of hydrogen, a hydroxyl group, an amide group, an alkoxide group, a halide group, or Si(R*)3, and “R*” is a hydrogen or an alkyl group having 1˜5 carbon(s).

摘要翻译： 三烷基硅烷类硅前体化合物可以由Si（R 1）X，i = 1-3表示，其中“R1”，“R2”和“R3”各自为氢或具有1-5个碳原子的烷基 s），“R1”，“R2”和“R3”全部不为氢，“X”为氢，羟基，酰胺基，醇盐基，卤化物基或Si（R * ）3，“R *”为氢或碳原子数为1〜5的烷基。

公开(公告)号：US20140273512A1

公开(公告)日：2014-09-18

申请号：US14173381

申请日：2014-02-05

申请人： Younsoo KIM ,  Sangyeol KANG ,  Hiroki SATO ,  Tsubasa SHIRATORI ,  Naoki YAMADA ,  Chayoung YOO ,  Younjoung CHO ,  Chin Moo CHO ,  Jaehyoung CHOI

发明人： Younsoo KIM ,  Sangyeol KANG ,  Hiroki SATO ,  Tsubasa SHIRATORI ,  Naoki YAMADA ,  Chayoung YOO ,  Younjoung CHO ,  Chin Moo CHO ,  Jaehyoung CHOI

IPC分类号： H01L21/02

CPC分类号： H01L21/0217 ,  C23C16/34 ,  C23C16/401 ,  C23C16/45531 ,  C23C16/45553 ,  H01L21/02164 ,  H01L21/02189 ,  H01L21/02211 ,  H01L21/0228 ,  H01L28/40

摘要： A trialkylsilane-based silicon precursor compound may be expressed by the following chemical formula 1. In the chemical formula 1, each of “R1”, “R2”, and “R3” is a hydrogen or an alkyl having 1˜5 carbon(s), all of “R1”, “R2”, and “R3” are not hydrogen, “X” is one of hydrogen, a hydroxyl group, an amide group, an alkoxide group, a halide group, or Si(R*)3, and “R*” is a hydrogen or an alkyl group having 1˜5 carbon(s).

摘要翻译： 三烷基硅烷系硅前体化合物可以由以下化学式1表示。在化学式1中，“R1”，“R2”和“R3”各自为氢或碳原子数为1〜5的烷基 ），“R1”，“R2”和“R3”全部不是氢，“X”是氢，羟基，酰胺基，醇盐基，卤化物基或Si（R *）中的一个， 3，“R *”为氢或碳原子数为1〜5的烷基。