公开(公告)号：US06816325B1

公开(公告)日：2004-11-09

申请号：US10661183

申请日：2003-09-11

申请人： Jochen Becker ,  Bernhard Gellrich ,  Werner Lang ,  Alexander Kohl ,  Sascha Kraus

发明人： Jochen Becker ,  Bernhard Gellrich ,  Werner Lang ,  Alexander Kohl ,  Sascha Kraus

IPC分类号： G02B702

CPC分类号： G02B7/023

摘要： In the case of a mounting apparatus, an optical element having an inner mount and an outer mount, in particular a lens in a projection lens system for semiconductor lithography, the inner mount is connected to the outer mount via three circumferentially distributed articulations. Manipulators, whereby said inner mount is displaceable, act on the articulations. The articulations comprise a mechanism which transforms a radial movement into an axial movement.

摘要翻译： 在安装装置的情况下，具有内部安装件和外部安装件的光学元件，特别是用于半导体光刻的投影透镜系统中的透镜，内部安装件通过三个周向分布的关节连接到外部安装件。 由此所述内部支架可移动的操纵器作用在铰接上。 关节包括将径向运动变换成轴向运动的机构。

公开(公告)号：US06285496B1

公开(公告)日：2001-09-04

申请号：US09568224

申请日：2000-05-09

申请人： Harry Bauer ,  Sascha Kraus ,  Hans G Keck ,  Jörg Endler ,  Hans-Joachim Weippert

发明人： Harry Bauer ,  Sascha Kraus ,  Hans G Keck ,  Jörg Endler ,  Hans-Joachim Weippert

IPC分类号： G02B000

CPC分类号： G03F7/70825 ,  G02B7/025

摘要： An assembly includes a holder made of material selected from metal and ceramic/glass ceramic, a transparent optical component that is transparent in the ultraviolet (UV) wavelength region of light, which has functional faces serving for transmission, and adhesive that is hardenable by UV light of a given long wavelength region, a layer applied by thin film technology and fixed to the holder by the adhesive. The layer is provided only outside said functional faces and to a high degree at least reflects or absorbs radiated light in a predetermined UV wavelength region within the UV wavelength region transmitted by the transparent optical component, and is transparent in the given long wavelength region to harden the adhesive by UV light irradiation that passes through the transparent optical component and the layer.

摘要翻译： 组件包括由金属和陶瓷/玻璃陶瓷中选择的材料制成的保持器，在具有用于透射的功能面的紫外线（UV）波长区域中透明的透明光学部件和可通过UV固化的粘合剂 给定长波长区域的光，通过薄膜技术施加的层并且通过粘合剂固定到保持器。 该层仅设置在所述功能面之外，并且高度地至少反射或吸收由透明光学部件透射的UV波长区域内的预定UV波长区域中的辐射光，并且在给定的长波长区域中是透明的以硬化 通过穿过透明光学部件和层的UV光照射的粘合剂。

公开(公告)号：US06580570B2

公开(公告)日：2003-06-17

申请号：US10002097

申请日：2001-10-18

申请人： Jochen Becker ,  Bernhard Gellrich ,  Werner Lang ,  Alexander Kohl ,  Sascha Kraus

发明人： Jochen Becker ,  Bernhard Gellrich ,  Werner Lang ,  Alexander Kohl ,  Sascha Kraus

IPC分类号： G02B702

CPC分类号： G02B7/026

摘要： In the case of a mounting apparatus, an optical element having an inner mount and an outer mount, in particular a lens in a projection lens system for semiconductor lithography, the inner mount is connected to the outer mount via three circumferentially distributed solid-state articulations. Manipulators, by means of which the inner mount can be displaced, act on the solid-state articulations. The solid-state articulations are T-shaped in cross section with a T-bar and a T-support. Attachment points between the inner mount and the outer mount are located in each case in the region of the outer ends of the T-bar. The manipulators act on the T-support in each case.

公开(公告)号：US6097536A

公开(公告)日：2000-08-01

申请号：US126693

申请日：1998-07-30

申请人： Harry Bauer ,  Sascha Kraus ,  Hans G Keck ,  Jorg Endler ,  Hans-Joachim Weippert

发明人： Harry Bauer ,  Sascha Kraus ,  Hans G Keck ,  Jorg Endler ,  Hans-Joachim Weippert

IPC分类号： G02B7/00 ,  G02B7/02 ,  G03F7/20 ,  F21V9/06

CPC分类号： G03F7/70825 ,  G02B7/025

摘要： An assembly includes a holder and a transparent component that transmits in the ultraviolet spectral region and is adhered by means of an adhesive. The adhesive is hardenable by UV light with a given spectral distribution. A layer is applied by thin film technology on the transparent component in the region of the adhesive and transmits UV light of the spectral region suitable for hardening the adhesive and to a high degree reflects and/or absorbs UV light within a useful spectral region within the spectral region transmitted by the transparent component.

摘要翻译： 组件包括保持器和在紫外光谱区域中透射并通过粘合剂粘合的透明部件。 粘合剂可通过具有给定光谱分布的紫外光固化。 通过薄膜技术在粘合剂区域的透明部件上施加层，并且透射适合于硬化粘合剂的光谱区域的UV光，并且高度地反射和/或吸收UV光在有效光谱区域内的UV光 由透明组件传输的光谱区域。