公开(公告)号：US06712681B1

公开(公告)日：2004-03-30

申请号：US09715184

申请日：2000-11-20

申请人： Shyng-Tsong Chen ,  Kenneth P. Rodbell ,  Oscar Kai Chi Hsu ,  Jean Vangsness ,  David S. Gilbride ,  Scott Clayton Billings ,  Kenneth Davis

发明人： Shyng-Tsong Chen ,  Kenneth P. Rodbell ,  Oscar Kai Chi Hsu ,  Jean Vangsness ,  David S. Gilbride ,  Scott Clayton Billings ,  Kenneth Davis

IPC分类号： B24D1100

CPC分类号： B24B37/26 ,  B24D3/28 ,  B24D11/008 ,  B24D18/00

摘要： A polishing pad having a body comprising fibers embedded in a matrix polymer formed by a reaction of polymer precursors. The fibers define interstices, and the precursors fill these interstices substantially completely before completion of the reaction. The pad may include a thin layer of free fibers at its polishing surface. A segment of at least a portion of the free fibers are embedded in the adjacent body of the polymer and fibers. The fibers may be separate, or in the form of a woven or non-woven web.

公开(公告)号：US06989117B2

公开(公告)日：2006-01-24

申请号：US10782922

申请日：2004-02-23

申请人： Shyng-Tsong Chen ,  Kenneth P. Rodbell ,  Oscar Kai Chi Hsu ,  Jean Vangsness ,  David S. Gilbride ,  Scott Clayton Billings ,  Kenneth Davis

发明人： Shyng-Tsong Chen ,  Kenneth P. Rodbell ,  Oscar Kai Chi Hsu ,  Jean Vangsness ,  David S. Gilbride ,  Scott Clayton Billings ,  Kenneth Davis

IPC分类号： B29C39/42

CPC分类号： B24B37/26 ,  B24D3/28 ,  B24D11/008 ,  B24D18/00

摘要： A method of making a polishing pad having a body comprising fibers embedded in a matrix polymer formed by a reaction of polymer precursors. The fibers define interstices, and the precursors fill these interstices substantially completely before completion of the reaction. The method comprising placing the fibers and the precursors in a cavity of a mold for shaping the polishing pad; applying a differential pressure across a mold cavity, where the differential pressure and the amount of precursors are sufficient to cause the precursors to fill the interstices substantially completely before completion of the reaction; and applying sufficient heat to the mold to at least partially cure the polishing pad by causing the precursors to react.

摘要翻译： 一种制造抛光垫的方法，该抛光垫具有包含嵌入在通过聚合物前体的反应形成的基体聚合物中的纤维的主体。 纤维定义空隙，并且前体在反应完成之前基本上完全填充这些间隙。 该方法包括将纤维和前体放置在用于成形抛光垫的模具的空腔中; 在模具腔内施加压差，其中压差和前体的量足以使得前体在反应完成之前基本上完全填充空隙; 并且通过使前体反应来向模具施加足够的热量以至少部分地固化抛光垫。