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1.发明授权公开(公告)号：US07507966B2
公开(公告)日：2009-03-24
申请号：US10568528
申请日：2004-08-19
申请人： Seizi Nishizawa , Toshiyuki Iwamoto
发明人： Seizi Nishizawa , Toshiyuki Iwamoto
IPC分类号： G01J5/02
CPC分类号： G01J3/08 , G01N21/3586 , G01N2201/0696 , G01N2201/0698
摘要： A time-domain pulsed spectroscopy apparatus which has a pulsed laser light source; a splitting unit to split pulsed laser light; a pulsed-light emitting unit; a detector; a sample holder; and a sample-unit entrance and exit optical systems; wherein the time-domain pulsed spectroscopy apparatus further comprises: at least one optical-path-length varying unit for setting a photometric range; at least one optical delay unit for the wave form signal measurement; and, at least one gate member to pass or block the pulsed light to a reflector.
摘要翻译： 一种具有脉冲激光光源的时域脉冲光谱仪; 用于分离脉冲激光的分离单元; 脉冲发光单元; 检测器 样品架 和采样单元入口和出口光学系统; 其中所述时域脉冲光谱装置还包括：用于设定光度范围的至少一个光路长度变化单元; 用于波形信号测量的至少一个光学延迟单元; 以及至少一个栅极件，以将脉冲光传递或阻挡到反射器。
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2.发明申请公开(公告)号：US20060278830A1
公开(公告)日：2006-12-14
申请号：US10568528
申请日：2004-08-19
申请人： Seizi Nishizawa , Toshiyuki Iwamoto
发明人： Seizi Nishizawa , Toshiyuki Iwamoto
IPC分类号： G01N21/35
CPC分类号： G01J3/08 , G01N21/3586 , G01N2201/0696 , G01N2201/0698
摘要： It is an object to provide a time-domain pulsed spectroscopy apparatus in which time-domain pulsed spectroscopy of multiple samples, states thereof, and so on can be carried out easily and in a short period of time. A time-domain pulsed spectroscopy apparatus of the present invention comprises a pulsed laser light source; a splitting unit configured to split pulsed laser light from the pulsed laser light source into excitation pulsed laser light and detection pulsed laser light; a pulsed-light emitting unit; a detector; a sample holder configured to hold the sample; and sample-unit entrance and exit optical systems configured to guide the pulsed light from the pulsed-light emitting unit to the sample and to guide to the detector pulsed light reflected from or transmitted through the sample due to the irradiation; wherein the time-domain pulsed spectroscopy apparatus further comprises: at least one optical-path-length varying unit for setting a photometric range, disposed in an incident-side optical path from the splitting unit to the pulsed-light emitting unit and/or in a detection-side optical path from the splitting unit to the detector; and at least one optical delay unit for the wave form signal measurement, disposed in the incident-side optical path from the splitting unit to the pulsed-light emitting unit and/or in the detection-side optical path from the splitting unit to the detector.
摘要翻译： 本发明的目的是提供一种时域脉冲光谱装置，其中可以容易地且在短时间内进行多个样品及其状态等的时域脉冲光谱。 本发明的时域脉冲光谱装置包括脉冲激光光源; 分离单元，被配置为将来自所述脉冲激光光源的脉冲激光分为激发脉冲激光和检测脉冲激光; 脉冲发光单元; 检测器 被配置为保持样品的样品保持器; 以及样本单元入口和出口光学系统，其被配置为将来自脉冲发光单元的脉冲光引导到样品并且引导检测器由于照射而从样品反射或透射的脉冲光; 其中所述时域脉冲光谱装置还包括：至少一个光路长度变化单元，用于设置测光范围，设置在从分束单元到脉冲发光单元的入射侧光路中和/或 从分离单元到检测器的检测侧光路; 以及用于波形信号测量的至少一个光学延迟单元，设置在从分离单元到脉冲发光单元的入射侧光路中和/或从分离单元到检测器的检测侧光路中 。
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公开(公告)号：US4575246A
公开(公告)日：1986-03-11
申请号：US586142
申请日：1984-03-05
申请人： Seizi Nishizawa , Kikuo Shirawachi
发明人： Seizi Nishizawa , Kikuo Shirawachi
CPC分类号： G01J3/4535
摘要： A continuous drive type Michelson interferometer system for use in Fourier spectroscopy, having a main Michelson interferometer for obtaining the interferogram of a sample, an auxiliary Michelson interferometer for detecting the moving speed of a movable mirror of said main Michelson interferometer, and a control section for controlling the driving speed of said movable mirror. In said control section, the AC output signal of a photodetector is converted into a voltage corresponding to the frequency of the signal, said voltage is compared with a preset voltage by a voltage difference detection means, the phase of said AC output of said photodetector is compared with a phase of a reference signal by a phase comparison means, and said driving speed is controlled by both the outputs of said voltage difference detection means and said phase comparison means.
摘要翻译： 一种用于傅里叶谱的连续驱动型迈克尔逊干涉仪系统，具有用于获得样品干涉图的主迈克尔逊干涉仪，用于检测所述主迈克尔逊干涉仪的可移动反射镜的移动速度的辅助迈克尔逊干涉仪，以及用于 控制所述可移动镜的驱动速度。 在所述控制部分中，光电检测器的交流输出信号被转换为与信号频率相对应的电压，所述电压通过电压差检测装置与预设电压进行比较，所述光电检测器的所述交流输出的相位为 与相位比较装置的参考信号的相位相比，并且所述驱动速度由所述电压差检测装置和所述相位比较装置的输出两者来控制。
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4.发明申请公开(公告)号：US20090152469A1
公开(公告)日：2009-06-18
申请号：US12371325
申请日：2009-02-13
申请人： Seizi Nishizawa , Toshiyuki Iwamoto
发明人： Seizi Nishizawa , Toshiyuki Iwamoto
IPC分类号： G01J5/02
CPC分类号： G01J3/08 , G01N21/3586 , G01N2201/0696 , G01N2201/0698
摘要： A time-domain pulsed spectroscopy apparatus which has a pulsed laser light source; a splitting unit to split pulsed laser light; a pulsed-light emitting unit; a detector; a sample holder; and a sample-unit entrance and exit optical systems; wherein the time-domain pulsed spectroscopy apparatus further comprises: at least one optical-path-length varying unit for setting a photometric range; at least one optical delay unit for the wave form signal measurement; and, at least one gate member to pass or block the pulsed light to a reflector.
摘要翻译： 一种具有脉冲激光光源的时域脉冲光谱仪; 用于分离脉冲激光的分离单元; 脉冲发光单元; 检测器 样品架 和采样单元入口和出口光学系统; 其中所述时域脉冲光谱装置还包括：用于设定光度范围的至少一个光路长度变化单元; 用于波形信号测量的至少一个光学延迟单元; 以及至少一个栅极件，以将脉冲光传递或阻挡到反射器。
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5.发明授权公开(公告)号：US07615749B2
公开(公告)日：2009-11-10
申请号：US11663428
申请日：2005-09-27
申请人： Seizi Nishizawa , Toshiyuki Iwamoto
发明人： Seizi Nishizawa , Toshiyuki Iwamoto
IPC分类号： G01J5/02
CPC分类号： H01S1/02 , G01J3/42 , G01N21/3586
摘要： There is provided an infrared light emitting device that is capable of polarizing emission light without causing loss of the emission light and having a simple configuration. Included are a photoconductive layer 22 which generates optical carriers upon being irradiated with pulsed excitation light; a pair of first antenna electrodes 21a for emitting infrared light, which are formed on the photoconductive layer 22 with a gap 32 disposed between tips thereof; a pair of second antenna electrodes 21b for emitting infrared light, which are formed on the photoconductive layer 22 and which are disposed with the gap 32 between tips thereof and having an angle with respect to the first antenna electrodes 21a; and a control unit for independently applying voltages to the first antenna electrodes 21a and the second antenna electrodes 21b. The voltage applied to the first antenna electrodes 21a and the voltage applied to the second antenna electrodes 21b may be selectively applied at different times or may be simultaneously applied with different phases.
摘要翻译： 提供了一种红外发光装置，其能够使发射光偏振而不会引起发射光的损失并且具有简单的构造。 包括光电导层22，其在用脉冲激发光照射时产生光载流子; 用于发射红外光的一对第一天线电极21a，其形成在光电导层22上，间隙32设置在其顶端之间; 一对第二天线电极21b，其用于发射红外光，它们形成在光电导层22上，并且间隙32设置在其顶端之间并且与第一天线电极21a成一定角度; 以及用于独立地向第一天线电极21a和第二天线电极21b施加电压的控制单元。 施加到第一天线电极21a的电压和施加到第二天线电极21b的电压可以在不同时间选择性地施加，或者可以同时施加不同的相位。
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6.发明申请公开(公告)号：US20070194253A1
公开(公告)日：2007-08-23
申请号：US11663428
申请日：2005-09-27
申请人： Seizi Nishizawa , Toshiyuki Iwamoto
发明人： Seizi Nishizawa , Toshiyuki Iwamoto
CPC分类号： H01S1/02 , G01J3/42 , G01N21/3586
摘要： There is provided an infrared light emitting device that is capable of polarizing emission light without causing loss of the emission light and having a simple configuration. Included are a photoconductive layer 22 which generates optical carriers upon being irradiated with pulsed excitation light; a pair of first antenna electrodes 21a for emitting infrared light, which are formed on the photoconductive layer 22 with a gap 32 disposed between tips thereof; a pair of second antenna electrodes 21b for emitting infrared light, which are formed on the photoconductive layer 22 and which are disposed with the gap 32 between tips thereof and having an angle with respect to the first antenna electrodes 21a; and a control unit for independently applying voltages to the first antenna electrodes 21a and the second antenna electrodes 21b. The voltage applied to the first antenna electrodes 21a and the voltage applied to the second antenna electrodes 21b may be selectively applied at different times or may be simultaneously applied with different phases.
摘要翻译： 提供了一种红外发光装置，其能够使发射光偏振而不会引起发射光的损失并且具有简单的构造。 包括光电导层22，其在用脉冲激发光照射时产生光载流子; 用于发射红外光的一对第一天线电极21a，其形成在光电导层22上，间隙32设置在其顶端之间; 用于发射红外光的一对第二天线电极21b，其形成在光电导层22上，并且在其顶端之间设置有间隙32并且相对于第一天线电极21a具有一定角度; 以及用于独立地向第一天线电极21a和第二天线电极21b施加电压的控制单元。 施加到第一天线电极21a的电压和施加到第二天线电极21b的电压可以在不同时间选择性地施加，或者可以同时施加不同的相。
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公开(公告)号：US5227861A
公开(公告)日：1993-07-13
申请号：US587114
申请日：1990-09-24
IPC分类号： G01B11/06
CPC分类号： G01B11/0675
摘要： An apparatus for and a method of evaluating a multilayer thin film of the present invention. An interference light beam in a predetermined wave number region is projected as a parallel beam onto a multilayer thin film sample and the interference light beam reflected by the sample is detected to find an interferogram. The interferogram is subject to Fourier transform, filtering and reverse Fourier transform so that a spatialgram is provided. Thereby the variation in incident angle of the light beam incident on the sample and in incident surface is reduced, and the spatialgram can be provided with accurate information of the multilayer thin film.
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8.发明授权公开(公告)号：US07705311B2
公开(公告)日：2010-04-27
申请号：US12371325
申请日：2009-02-13
申请人： Seizi Nishizawa , Toshiyuki Iwamoto
发明人： Seizi Nishizawa , Toshiyuki Iwamoto
IPC分类号： G01J5/02
CPC分类号： G01J3/08 , G01N21/3586 , G01N2201/0696 , G01N2201/0698
摘要： A time-domain pulsed spectroscopy apparatus which has a pulsed laser light source; a splitting unit to split pulsed laser light; a pulsed-light emitting unit; a detector; a sample holder; and a sample-unit entrance and exit optical systems; wherein the time-domain pulsed spectroscopy apparatus further comprises: at least one optical-path-length varying unit for setting a photometric range; at least one optical delay unit for the wave form signal measurement; and, at least one gate member to pass or block the pulsed light to a reflector.
摘要翻译： 一种具有脉冲激光光源的时域脉冲光谱仪; 用于分离脉冲激光的分离单元; 脉冲发光单元; 检测器 样品架 和采样单元入口和出口光学系统; 其中所述时域脉冲光谱装置还包括：用于设定光度范围的至少一个光路长度变化单元; 用于波形信号测量的至少一个光学延迟单元; 以及至少一个栅极件，以将脉冲光传递或阻挡到反射器。
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9.发明授权Optical apparatus components having spectrally overlapping characteristics for measuring semiconductor layer thickness 失效具有用于测量半导体层厚度的光谱重叠特性的光学装置部件
公开(公告)号：US5371596A
公开(公告)日：1994-12-06
申请号：US27639
申请日：1993-03-08
CPC分类号： G01B11/0675
摘要： An apparatus for measuring the thickness of a semiconductor layer includes a light source emitting light; an interferometer producing modulated interference light by modulating the light from the light source; an optical system including a light transmission member for introducing the modulated interference light into a measurement sample including at least one film on a substrate; a light detecting element for detecting the modulated interference light reflected from the film and producing an output signal in response; an extracting element for extracting a film interference component having a waveform from the output signal; and an element for calculating the thickness of the film from the waveform of the output signal component. The light detecting element includes a plurality of photodetectors having respective photometric wavenumber ranges that overlap. Thereby, a wavenumber range that is the sum of the respective wavenumber ranges of the respective components is obtained and an optical measurement can be realized over a wide wavenumber range that could not be measured with a single photodetector.
摘要翻译： 用于测量半导体层的厚度的装置包括发射光的光源; 干涉仪通过调制来自光源的光产生调制干涉光; 光学系统，包括用于将调制的干涉光引入到包括至少一个基板上的膜的测量样品中的光传输部件; 光检测元件，用于检测从胶片反射的调制干涉光并产生响应的输出信号; 提取元件，用于从输出信号中提取具有波形的胶片干涉分量; 以及用于根据输出信号分量的波形计算胶片的厚度的元件。 光检测元件包括具有重叠的各自的光度波数范围的多个光电检测器。 由此，获得作为各个分量的波数范围的和的波数范围，并且可以在不能用单个光电检测器测量的宽波数范围内实现光学测量。
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