Composition for positive type photoresist and positive type photoresist film manufactured thereby
    2.
    发明授权
    Composition for positive type photoresist and positive type photoresist film manufactured thereby 有权
    由此制造正型光致抗蚀剂和正型光致抗蚀剂膜的组合物

    公开(公告)号:US08197934B2

    公开(公告)日:2012-06-12

    申请号:US12296744

    申请日:2007-04-06

    IPC分类号: G11B5/64 C09J7/02

    摘要: Disclosed are a composition for positive type photoresist and a positive type photoresist film manufactured thereby. The composition comprises an alkali soluble resin, a photosensitive compound, a thermo-curable cross linking agent, a sensitivity enhancer and a solvent. The photoresist film has a supporting film and a photoresist layer formed on the supporting film, wherein the photoresist layer comprises the alkali soluble resin, the photosensitive compound, the thermo-curable cross linking agent and the sensitivity enhancer.

    摘要翻译: 公开了由其制造的正型光致抗蚀剂和正型光致抗蚀剂膜的组合物。 该组合物包含碱溶性树脂,光敏化合物,热可固化交联剂,敏感性增强剂和溶剂。 光致抗蚀剂膜具有支撑膜和形成在支撑膜上的光致抗蚀剂层,其中光致抗蚀剂层包含碱溶性树脂,光敏化合物,可热固化交联剂和灵敏度增强剂。

    Composition For Positive Type Photoresist and Positive Type Photoresist Film Manufactured Thereby
    3.
    发明申请
    Composition For Positive Type Photoresist and Positive Type Photoresist Film Manufactured Thereby 有权
    因此,制造正型光致抗蚀剂和正型光致抗蚀剂膜的组成

    公开(公告)号:US20090274900A1

    公开(公告)日:2009-11-05

    申请号:US12296744

    申请日:2007-04-06

    IPC分类号: G03F7/039

    摘要: Disclosed are a composition for positive type photoresist and a positive type photoresist film manufactured thereby. The composition comprises an alkali soluble resin, a photosensitive compound, a thermo-curable cross linking agent, a sensitivity enhancer and a solvent. The photoresist film has a supporting film and a photoresist layer formed on the supporting film, wherein the photoresist layer comprises the alkali soluble resin, the photosensitive compound, the thermo-curable cross linking agent and the sensitivity enhancer.

    摘要翻译: 公开了由其制造的正型光致抗蚀剂和正型光致抗蚀剂膜的组合物。 该组合物包含碱溶性树脂,光敏化合物,热可固化交联剂,敏感性增强剂和溶剂。 光致抗蚀剂膜具有支撑膜和形成在支撑膜上的光致抗蚀剂层,其中光致抗蚀剂层包含碱溶性树脂,光敏化合物,可热固化交联剂和灵敏度增强剂。