公开(公告)号：US09082444B2

公开(公告)日：2015-07-14

申请号：US12593243

申请日：2008-03-28

申请人： Shinichi Ishibashi ,  Akira Shimada

发明人： Shinichi Ishibashi ,  Akira Shimada

IPC分类号： G11B5/65 ,  G11B5/855 ,  B82Y10/00 ,  G11B5/74 ,  G11B5/82 ,  G11B5/66

CPC分类号： G11B5/855 ,  B82Y10/00 ,  G11B5/66 ,  G11B5/743 ,  G11B5/82

摘要： [PROBLEMS] To appropriately form a DTR medium, a patterned medium, or the like in a manner less likely to cause the problems of prolonged process time and increased cost.[MEANS FOR SOLVING PROBLEMS] A perpendicular magnetic recording layer 22 has a plurality of tracks 102 which define recording regions extending in a scanning direction of a magnetic head and which are arranged in parallel in a direction intersecting with the scanning direction. The perpendicular magnetic recording layer 22 has a guard band region 104 formed on its surface and provided with a groove portion 202 which extends along the tracks 102. In a cross-section of the perpendicular magnetic recording layer 22 taken along a plane perpendicular to the scanning direction, the maximum depth D of the groove portion 202 is in the range of 0.5 to 10 nm with reference to an average height (broken line 302) of the tracks 102 between which the groove portion 202 is interposed. The average height is obtained in the vicinity of the centers of the tracks 102 in a widthwise direction. The width W of a region of the groove portion 202 having a depth equal to or greater than ½ of the maximum depth is in the range of 5 to 30% of a track pitch.

摘要翻译： [问题]以不太可能引起长时间处理和增加成本的问题的方式适当地形成DTR介质，图案化介质等。 用于解决问题的手段垂直磁记录层22具有多个轨道102，其限定在磁头的扫描方向上延伸并且沿与扫描方向相交的方向平行设置的记录区域。 垂直磁记录层22具有在其表面上形成的保护带区域104，并且设置有沿着轨道102延伸的槽部分202.在沿着与扫描垂直的平面截取的垂直磁记录层22的横截面中 方向上，凹槽部分202的最大深度D相对于插入凹槽部分202的轨道102的平均高度（虚线302）在0.5至10nm的范围内。 在轨道102的宽度方向的中心附近获得平均高度。 具有等于​​或大于最大深度的1/2的深度的槽部分202的区域的宽度W在轨道间距的5至30％的范围内。

公开(公告)号：US08497006B2

公开(公告)日：2013-07-30

申请号：US13121306

申请日：2009-09-30

申请人： Masahiro Tomamoto ,  Michiharu Eta ,  Hidetaka Oda ,  Tatsuya Takaya ,  Yasuo Yamazaki ,  Hiroshi Takimoto ,  Shinichi Ishibashi ,  Keiji Takagi ,  Daisuke Nagata ,  Takahide Nakamura ,  Toru Sakurabayashi ,  Katsutoshi Fujiwara ,  Mitsuharu Noda ,  Yasuhiko Ogiso ,  Takahide Fujii

发明人： Masahiro Tomamoto ,  Michiharu Eta ,  Hidetaka Oda ,  Tatsuya Takaya ,  Yasuo Yamazaki ,  Hiroshi Takimoto ,  Shinichi Ishibashi ,  Keiji Takagi ,  Daisuke Nagata ,  Takahide Nakamura ,  Toru Sakurabayashi ,  Katsutoshi Fujiwara ,  Mitsuharu Noda ,  Yasuhiko Ogiso ,  Takahide Fujii

IPC分类号： B32B17/06

CPC分类号： B65D85/672 ,  B32B17/064 ,  B65D57/00 ,  B65D85/30 ,  B65D85/48 ,  Y10T428/24

摘要： Provided is a glass roll utilizing a flanged roll core, and reliably inhibiting a glass film from breaking from an end portion in a width direction thereof as an origin of breakage. A glass roll (1) is formed by winding a glass film (4) and a cushion sheet (5), under a state of being superposed, around a roll core (3) including a flange (2) at each end portion thereof, in which an end portion in a width direction of the glass film (4) is separated from the flange (2) on each side in the width direction of the glass film (4), and the cushion sheet (5) is extended beyond the end portion in the width direction of the glass film (4) to the flange (2) side, to thereby form an extension portion (5a).

摘要翻译： 提供一种利用凸缘辊芯的玻璃辊，并且可靠地阻止玻璃膜从其宽度方向的端部破裂为断裂的原因。 玻璃辊（1）通过在叠置的状态下将玻璃膜（4）和缓冲片（5）卷绕在其每个端部处包括凸缘（2）的辊芯（3）上而形成， 其中玻璃膜（4）的宽度方向上的端部与玻璃膜（4）的宽度方向上的每一侧上的凸缘（2）分离，并且缓冲片（5）延伸超过 将玻璃膜（4）的宽度方向的端部延伸到凸缘（2）侧，从而形成延伸部（5a）。

公开(公告)号：US08241751B2

公开(公告)日：2012-08-14

申请号：US13121324

申请日：2009-09-30

申请人： Masahiro Tomamoto ,  Michiharu Eta ,  Hidetaka Oda ,  Tatsuya Takaya ,  Yasuo Yamazaki ,  Hiroshi Takimoto ,  Shinichi Ishibashi ,  Keiji Takagi ,  Daisuke Nagata ,  Takahide Nakamura ,  Toru Sakurabayashi ,  Katsutoshi Fujiwara ,  Mitsuharu Noda ,  Yasuhiko Ogiso ,  Takahide Fujii

发明人： Masahiro Tomamoto ,  Michiharu Eta ,  Hidetaka Oda ,  Tatsuya Takaya ,  Yasuo Yamazaki ,  Hiroshi Takimoto ,  Shinichi Ishibashi ,  Keiji Takagi ,  Daisuke Nagata ,  Takahide Nakamura ,  Toru Sakurabayashi ,  Katsutoshi Fujiwara ,  Mitsuharu Noda ,  Yasuhiko Ogiso ,  Takahide Fujii

IPC分类号： B32B17/06

CPC分类号： B65H18/28 ,  B32B17/064 ,  B65H2511/142 ,  B65H2515/312 ,  B65H2515/37 ,  B65H2701/17 ,  Y10T428/131

摘要： Provided is a glass roll formed by winding a glass film into a roll, in which a minimum winding radius of the glass film is optimized. Thus, the glass film is reliably prevented from breaking due to static fatigue, and is able to be stored for long periods. A glass roll (1), which is formed by winding a glass film (2) into a roll, has a configuration in which the glass film has a minimum winding radius (R) satisfying the following relation: R≧(T/2)[(2.3/σ)×E−1], where σ represents flexural strength of the glass film (2) obtained by a 3-point bending test, T represents a thickness of the glass film, and E represents a Young's modulus of the glass film.

摘要翻译： 提供了通过将玻璃膜卷绕成辊而形成的玻璃辊，其中玻璃膜的最小卷绕半径被优化。 因此，可靠地防止玻璃膜由于静电疲劳而破裂，能够长时间保存。 通过将玻璃膜（2）卷绕成辊而形成的玻璃辊（1）具有如下构成：玻璃膜的最小卷绕半径（R）满足以下关系：R≥（T / 2） [（2.3 /＆sgr;）×E-1]，其中＆sgr 表示通过3点弯曲试验得到的玻璃膜（2）的弯曲强度，T表示玻璃膜的厚度，E表示玻璃膜的杨氏模量。

公开(公告)号：US20120200956A1

公开(公告)日：2012-08-09

申请号：US13362271

申请日：2012-01-31

申请人： Shinichi ISHIBASHI ,  Tsubasa OKADA ,  Akira YAMANE ,  Tomoo SHIGE ,  Manabu UEDA ,  Zhipeng WANG ,  Yuji MURAKAMI

发明人： Shinichi ISHIBASHI ,  Tsubasa OKADA ,  Akira YAMANE ,  Tomoo SHIGE ,  Manabu UEDA ,  Zhipeng WANG ,  Yuji MURAKAMI

IPC分类号： G11B5/52 ,  G11B5/84

CPC分类号： G11B5/855

摘要： A method for producing a magnetic recording medium which includes: forming a magnetic layer on a non-magnetic substrate; forming a dissolution layer on the magnetic layer; forming a mask layer on the dissolution layer; patterning the dissolution layer and the mask layer so as to have a pattern corresponding to a magnetic recording pattern; partially modifying or removing a part of the magnetic layer and the mask layer not covered with the dissolution layer; and dissolving the dissolution layer and removing the dissolution layer together with the mask layer which is on the dissolution layer from the surface of the magnetic layer. The dissolution layer is formed by coating a solution containing an organic silicon compound dissolved in an organic solvent on the magnetic layer, and solidifying the coated chemical solution in the step in which the dissolution layer is formed on the magnetic layer.

摘要翻译： 一种制造磁记录介质的方法，包括：在非磁性基板上形成磁性层; 在所述磁性层上形成溶解层; 在溶解层上形成掩模层; 图案化溶解层和掩模层以具有对应于磁记录图案的图案; 部分地修改或去除未被溶解层覆盖的磁性层和掩模层的一部分; 并将溶解层溶解并与溶解层上的掩模层一起从磁性层的表面除去溶解层。 通过将溶解在有机溶剂中的有机硅化合物的溶液涂布在磁性层上并在其上形成溶解层的步骤中固化涂布的化学溶液来形成溶解层。

公开(公告)号：US20110200812A1

公开(公告)日：2011-08-18

申请号：US13121324

申请日：2009-09-30

申请人： Masahiro Tomamoto ,  Michiharu Eta ,  Hidetaka Oda ,  Tatsuya Takaya ,  Yasuo Yamazaki ,  Hiroshi Takimoto ,  Shinichi Ishibashi ,  Keiji Takagi ,  Daisuke Nagata ,  Takahide Nakamura ,  Toru Sakurabayashi ,  Katsutoshi Fujiwara ,  Mitsuharu Noda ,  Yasuhiko Ogiso ,  Takahide Fujii

发明人： Masahiro Tomamoto ,  Michiharu Eta ,  Hidetaka Oda ,  Tatsuya Takaya ,  Yasuo Yamazaki ,  Hiroshi Takimoto ,  Shinichi Ishibashi ,  Keiji Takagi ,  Daisuke Nagata ,  Takahide Nakamura ,  Toru Sakurabayashi ,  Katsutoshi Fujiwara ,  Mitsuharu Noda ,  Yasuhiko Ogiso ,  Takahide Fujii

IPC分类号： B32B17/00 ,  B32B5/00 ,  C03B17/06 ,  B65H18/28 ,  B65H18/08

CPC分类号： B65H18/28 ,  B32B17/064 ,  B65H2511/142 ,  B65H2515/312 ,  B65H2515/37 ,  B65H2701/17 ,  Y10T428/131

摘要： Provided is a glass roll formed by winding a glass film into a roll, in which a minimum winding radius of the glass film is optimized. Thus, the glass film is reliably prevented from breaking due to static fatigue, and is able to be stored for long periods. A glass roll (1), which is formed by winding a glass film (2) into a roll, has a configuration in which the glass film has a minimum winding radius (R) satisfying the following relation: R≧(T/2)[(2.3/σ)×E−1], where σ represents flexural strength of the glass film (2) obtained by a 3-point bending test, T represents a thickness of the glass film, and E represents a Young's modulus of the glass film.

摘要翻译： 提供了通过将玻璃膜卷绕成辊而形成的玻璃辊，其中玻璃膜的最小卷绕半径被优化。 因此，可靠地防止玻璃膜由于静电疲劳而破裂，能够长时间保存。 通过将玻璃膜（2）卷绕成辊而形成的玻璃辊（1）具有如下构成：玻璃膜的最小卷绕半径（R）满足以下关系：R≥（T / 2） [（2.3 /＆sgr;）×E-1]，其中＆sgr 表示通过3点弯曲试验得到的玻璃膜（2）的弯曲强度，T表示玻璃膜的厚度，E表示玻璃膜的杨氏模量。

公开(公告)号：US07983003B2

公开(公告)日：2011-07-19

申请号：US11485328

申请日：2006-07-13

申请人： Yoshiaki Sonobe ,  Shinichi Ishibashi ,  Masato Kobayashi ,  Teiichiro Umezawa

发明人： Yoshiaki Sonobe ,  Shinichi Ishibashi ,  Masato Kobayashi ,  Teiichiro Umezawa

IPC分类号： G11B5/82

CPC分类号： G11B5/667 ,  G11B5/8404

摘要： A perpendicular magnetic recording medium 10 adapted to be mounted in a perpendicular magnetic recording type hard disk drive and including a disk-shaped disk base 12, a soft magnetic layer 14 formed on the disk base 12, and a perpendicular magnetic recording layer 16 formed on the soft magnetic layer 14, wherein, at respective portions of the soft magnetic layer 14, directional distribution of easy magnetization axes of magnetic particles included In each of the respective portions is isotropic with respect to respective directions in the main surface of the soft magnetic layer 14.

摘要翻译： 适用于垂直磁记录型硬盘驱动器的垂直磁记录介质10，包括盘形盘基座12，形成在盘基座12上的软磁层14和垂直磁记录层16， 软磁性层14，其中，在软磁性层14的各个部分，包含的磁性粒子容易磁化轴的方向分布在各个部分中，相对于软磁性层主表面的各个方向各向同性 14。

公开(公告)号：US07722998B2

公开(公告)日：2010-05-25

申请号：US12016297

申请日：2008-01-18

申请人： Shinichi Ishibashi ,  Yoichi Usui

发明人： Shinichi Ishibashi ,  Yoichi Usui

IPC分类号： G03F1/00

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  G03F1/24 ,  G03F1/84

摘要： A reflective mask and a reflective mask blank that can form a fine mask pattern with high accuracy in shape, achieve a sufficient contrast in a pattern inspection, and enable a pattern transfer with high accuracy. On a substrate (11), a multilayer reflective film (12) for reflecting an exposure light, a buffer layer (13), and an absorber layer for absorbing the exposure light are successively deposited in this order. This absorber layer has a layered structure composed of an uppermost layer (15) and a lower layer (14) other than it. The uppermost layer (15) exhibits a reflectance of 20% or less with respect to a light having an inspection wavelength for use in an inspection of a pattern formed in the absorber layer and further is formed of an inorganic material having a resistance against an etching condition in forming a pattern in the lower layer.

摘要翻译： 可以形成具有高精度形状的精细掩模图案的反射掩模和反射掩模坯料，在图案检查中获得足够的对比度，并且能够以高精度进行图案转印。 在基板（11）上依次沉积用于反射曝光光的多层反射膜（12），缓冲层（13）和用于吸收曝光光的吸收层。 该吸收体层具有由除了其之外的最上层（15）和下层（14）构成的层叠结构。 最上层（15）相对于具有用于检查在吸收层中形成的图案的检查波长的光，其反射率为20％以下，并且还具有耐蚀刻性的无机材料 在下层形成图案的条件。

公开(公告)号：US20080248409A1

公开(公告)日：2008-10-09

申请号：US12116550

申请日：2008-05-07

申请人： Shinichi Ishibashi ,  Tsutomu Shoki ,  Mario Hosoya ,  Yuki Shiota ,  Mitsuhiro Kureishi

发明人： Shinichi Ishibashi ,  Tsutomu Shoki ,  Mario Hosoya ,  Yuki Shiota ,  Mitsuhiro Kureishi

IPC分类号： G03F1/00 ,  G03F7/20

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  G03F1/24 ,  G03F1/58 ,  G03F1/74 ,  Y10T428/31616

摘要： A reflective mask blank has a substrate (11) on which a reflective layer (12) for reflecting exposure light in a short-wavelength region including an extreme ultraviolet region and an absorber layer (16) for absorbing the exposure light are successively formed. The absorber layer (16) has an at least two-layer structure including as a lower layer an exposure light absorbing layer (14) formed by an absorber for the exposure light in the short-wavelength region including the extreme ultraviolet region and as an upper layer a low-reflectivity layer (15) formed by an absorber for inspection light used in inspection of a mask pattern. The upper layer is made of a material containing tantalum (Ta), boron (B), and nitrogen (N). The content of B is 5 at % to 30 at %. The ratio of Ta and N (Ta:N) falls within a range of 8:1 to 2:7. Alternatively, the reflective mask blank has a substrate on which a multilayer reflective film and an absorber layer are successively formed. In this case, the absorber layer is made of a material containing tantalum (Ta), boron (B), and nitrogen (N). The content of B is 5 at % to 25 at %. The ratio of Ta and N (Ta:N) falls within a range of 8:1 to 2:7.

摘要翻译： 反射掩模板具有基板（11），在基板（11）上依次形成反射层（12），反射层（12）用于反射在包括极紫外区域的短波长区域中的曝光和用于吸收曝光光的吸收层（16）。 吸收层（16）具有至少两层结构，其包括作为下层的曝光用光吸收层（14），该曝光用光吸收层由包含极紫外区域的短波长区域中的曝光用光的吸收体形成， 层叠由用于检查掩模图案的检查光的吸收体形成的低反射率层（15）。 上层由含有钽（Ta），硼（B）和氮（N）的材料制成。 B的含量为5原子％至30原子％。 Ta和N（Ta：N）的比例落在8:1-2:7的范围内。 或者，反射掩模坯料具有依次形成有多层反射膜和吸收体层的基板。 在这种情况下，吸收层由含有钽（Ta），硼（B）和氮（N）的材料制成。 B的含量为5原子％至25原子％。 Ta和N（Ta：N）的比例落在8:1-2:7的范围内。

公开(公告)号：US07348105B2

公开(公告)日：2008-03-25

申请号：US10519991

申请日：2003-07-04

申请人： Shinichi Ishibashi ,  Yoichi Usui

发明人： Shinichi Ishibashi ,  Yoichi Usui

IPC分类号： G03F1/00

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  G03F1/24 ,  G03F1/84

摘要： A reflective mask and a reflective mask blank that can form a fine mask pattern with high accuracy in shape, achieve a sufficient contrast in a pattern inspection, and enable a pattern transfer with high accuracy. On a substrate (11), a multilayer reflective film (12) for reflecting an exposure light, a buffer layer (13), and an absorber layer for absorbing the exposure light are successively deposited in this order. This absorber layer has a layered structure composed of an uppermost layer (15) and a lower layer (14) other than it. The uppermost layer (15) exhibits a reflectance of 20% or less with respect to a light having an inspection wavelength for use in an inspection of a pattern formed in the absorber layer and further is formed of an inorganic material having a resistance against an etching condition in forming a pattern in the lower layer.

摘要翻译： 可以形成具有高精度形状的精细掩模图案的反射掩模和反射掩模坯料，在图案检查中获得足够的对比度，并且能够以高精度进行图案转印。 在基板（11）上依次沉积用于反射曝光光的多层反射膜（12），缓冲层（13）和用于吸收曝光光的吸收层。 该吸收体层具有由除了其之外的最上层（15）和下层（14）构成的层叠结构。 最上层（15）相对于具有用于检查在吸收层中形成的图案的检查波长的光，其反射率为20％以下，并且还具有耐蚀刻性的无机材料 在下层形成图案的条件。

公开(公告)号：US20070053106A1

公开(公告)日：2007-03-08

申请号：US11485328

申请日：2006-07-13

申请人： Yoshiaki Sonobe ,  Shinichi Ishibashi ,  Masato Kobayashi ,  Teiichiro Umezawa

发明人： Yoshiaki Sonobe ,  Shinichi Ishibashi ,  Masato Kobayashi ,  Teiichiro Umezawa

IPC分类号： G11B5/74

CPC分类号： G11B5/667 ,  G11B5/8404

摘要： A perpendicular magnetic recording medium 10 adapted to be mounted in a perpendicular magnetic recording type hard disk drive and including a disk-shaped disk base 12, a soft magnetic layer 14 formed on the disk base 12, and a perpendicular magnetic recording layer 16 formed on the soft magnetic layer 14, wherein, at respective portions of the soft magnetic layer 14, directional distribution of easy magnetization axes of magnetic particles included In each of the respective portions is isotropic with respect to respective directions in the main surface of the soft magnetic layer 14.

摘要翻译： 适用于垂直磁记录型硬盘驱动器的垂直磁记录介质10，包括盘形盘基座12，形成在盘基座12上的软磁层14和垂直磁记录层16， 软磁性层14，其中，在软磁性层14的各个部分，包含的磁性粒子容易磁化轴的方向分布在各个部分中，相对于软磁性层主表面的各个方向各向同性 14。