公开(公告)号：US07007553B2

公开(公告)日：2006-03-07

申请号：US10415352

申请日：2001-11-05

申请人： Kiyotaka Kinoshita ,  Shiro Kuwahara ,  Toshiharu Mikami ,  Kaori Fujita ,  Toshitada Wada ,  Mitsuru Asai ,  Hiroaki Makino ,  Shin Tajima ,  Nobuo Kamiya ,  Katsunori Yamada

发明人： Kiyotaka Kinoshita ,  Shiro Kuwahara ,  Toshiharu Mikami ,  Kaori Fujita ,  Toshitada Wada ,  Mitsuru Asai ,  Hiroaki Makino ,  Shin Tajima ,  Nobuo Kamiya ,  Katsunori Yamada

IPC分类号： G01B7/16

CPC分类号： G01L1/18 ,  G01P15/0907 ,  G01P15/0922

摘要： A dynamic quantity sensor device capable of measuring a dynamic quantity at a high precision and securing insulation of a pressure sensing body easily. This dynamic quantity sensor includes a pressure sensing body composed of composite ceramics in which a material having a pressure resistance effect is dispersed on a matrix made of an electrical insulation ceramic material and a pressure receiving body having an electrical insulation characteristic and disposed on a pressure receiving surface of the pressure receiving body, wherein the pressure sensing body and the pressure receiving body are integrated with each other.

摘要翻译： 一种能够以高精度测量动态量并且容易地确保压力感测体的绝缘的动态量传感器装置。 该动态量传感器包括由复合陶瓷构成的压力传感体，其中具有耐压效应的材料分散在由电绝缘陶瓷材料制成的基体上，以及具有电绝缘特性的压力接收体，并设置在压力接收 压力接收体的表面，其中压力感测体和压力接收体彼此一体化。

公开(公告)号：US5291534A

公开(公告)日：1994-03-01

申请号：US903096

申请日：1992-06-19

申请人： Shizuki Sakurai ,  Tomio Nagata ,  Shiro Kuwahara ,  Osamu Tabata ,  Susumu Sugiyama

发明人： Shizuki Sakurai ,  Tomio Nagata ,  Shiro Kuwahara ,  Osamu Tabata ,  Susumu Sugiyama

IPC分类号： G01D3/036 ,  G01D5/241 ,  G01L9/00 ,  G01L9/12 ,  G01P15/125 ,  G01R27/26 ,  G01L19/04

CPC分类号： G01L9/0073 ,  G01D3/0365 ,  G01D5/2417 ,  G01L9/125 ,  G01P15/125 ,  G01R27/2605

摘要： A digital capacitive sensing device comprises: a reference capacitor having a reference capacitance unaffected by a force to be measured; a reference pulse signal generating circuit which generates a reference pulse signal of a frequency corresponding to the reference capacitance; a sensing capacitor having capacitance variable according to the magnitude of the force; a measuring pulse signal generating circuit having a construction similar to that of the reference pulse signal generating circuit and capable of generating a measuring pulse signal of a frequency corresponding to the capacitance of the sensing capacitor; and a differential arithmetic circuit which adds the number of pulses of the reference pulse signal in a predetermined time interval to a set value and subtracts the number of pulses of the measuring pulse signal in a predetermined time interval from the set value. The reference pulse signal generating circuit is capable of compensating a zero point temperature characteristic of a detection value, and the measuring pulse signal generating circuit is capable of compensating a detection sensitivity temperature characteristic.

摘要翻译： 数字电容感测装置包括：具有参考电容的参考电容，其不受被测量的力的影响; 参考脉冲信号发生电路，其生成与参考电容对应的频率的参考脉冲信号; 感测电容器，其具有根据所述力的大小而变化的电容; 测量脉冲信号发生电路，具有类似于参考脉冲信号发生电路的结构，并且能够产生与感测电容器的电容对应的频率的测量脉冲信号; 以及差分运算电路，将预定时间间隔内的基准脉冲信号的脉冲数与设定值相加，并从设定值减去预定时间间隔内的测量脉冲信号的脉冲数。 参考脉冲信号发生电路能够补偿检测值的零点温度特性，并且测量脉冲信号发生电路能够补偿检测灵敏度温度特性。

公开(公告)号：US5388460A

公开(公告)日：1995-02-14

申请号：US853292

申请日：1992-03-18

申请人： Shizuki Sakurai ,  Shiro Kuwahara ,  Nakane Kunie ,  Ryota Takagi

发明人： Shizuki Sakurai ,  Shiro Kuwahara ,  Nakane Kunie ,  Ryota Takagi

IPC分类号： B81B3/00 ,  G01P15/08 ,  G01P15/125 ,  H01L29/84 ,  G01P15/11

CPC分类号： B81B3/0008 ,  G01P15/0802 ,  G01P15/125

摘要： A capacitive acceleration sensor is composed of a silicon plate, a glass plate and a substrate. The silicon plate has a fixed portion and a movable portion supported by the fixed portion through spring beams. The movable portion is moved in response to the change in the acceleration and is provided with a moving electrode thereon. The glass plate is provided with a fixed electrode and anodically bonded to the silicon plate so that the fixed electrode faces the moving electrode with a predetermined gap. On the glass plate, a first dummy electrode is formed at a location corresponding to the spring beams of the silicon plate. The dummy electrode has a terminal portion at one end so as to be electrically connected with the silicon plate during anodic bonding of the plates. On the substrate, a second dummy electrode is formed at a location corresponding to the movable portion of the silicon plate. The dummy electrode, similarly, has a terminal portion at one end so as to be electrically connected with the silicon plate during anodic bonding of the silicon plate and the substrate.

摘要翻译： 电容加速度传感器由硅板，玻璃板和基板构成。 硅板具有固定部分和通过弹簧梁由固定部分支撑的可移动部分。 可移动部分响应于加速度的变化而移动，并且在其上设置有移动电极。 玻璃板设置有固定电极并阳极结合到硅板，使得固定电极以预定间隙面对移动电极。 在玻璃板上，在对应于硅板的弹簧梁的位置处形成第一虚拟电极。 虚拟电极的一端具有端子部分，以便在板的阳极接合期间与硅板电连接。 在基板上，在与硅板的可动部对应的位置形成第二虚拟电极。 虚拟电极类似地在一端具有端子部分，以在硅板和衬底的阳极接合期间与硅板电连接。