Process for reforming surface of substrate, reformed substrate and apparatus for the same
    1.
    发明授权
    Process for reforming surface of substrate, reformed substrate and apparatus for the same 失效
    用于重整基板表面,重整基板及其装置的方法

    公开(公告)号:US06858115B2

    公开(公告)日:2005-02-22

    申请号:US10387466

    申请日:2003-03-14

    摘要: Sputtering particles are deposited immediately after activating a surface of a substrate composed of a carbon-containing material. Accordingly, a process for reforming a surface of a substrate, a substrate with a reformed surface, and an apparatus therefor are provided in which the depositability and adhesiveness of the sputtering particles are improved. A vacuum ultraviolet light is generated by a laser beam. A surface of a substrate composed of a carbon-containing material is exposed to the generated vacuum ultraviolet light. As a result, the surface of the substrate is activated. Simultaneously therewith, a sputtering particles-generating device generates sputtering particles, such as neutral atoms, ions and clusters. The resultant sputtering particles are deposited on the activated surface of the substrate. Since the sputtering particles are deposited immediately after the surface of the substrate is activated, they are adhered firmly on the surface of the substrate.

    摘要翻译: 在活化由含碳材料构成的基材的表面后立即沉积溅射颗粒。 因此,提供了改善基板表面,重整表面的基板及其设备的方法,其中提高了溅射颗粒的沉积能力和粘合性。 通过激光束产生真空紫外线。 由含碳材料构成的基板的表面暴露于产生的真空紫外光。 结果,基板的表面被激活。 与此同时,溅射颗粒发生装置产生诸如中性原子,离子和簇的溅射颗粒。 所得到的溅射颗粒沉积在基板的活化表面上。 由于在基板的表面被激活之后立即沉积溅射颗粒,所以它们牢固地粘附在基板的表面上。

    Material for measuring static and dynamic physical parameters
    4.
    发明授权
    Material for measuring static and dynamic physical parameters 失效
    用于测量静态和动态物理参数的材料

    公开(公告)号:US06534430B2

    公开(公告)日:2003-03-18

    申请号:US09793444

    申请日:2001-02-27

    IPC分类号: G01B716

    CPC分类号: C04B35/488

    摘要: A sensor material for measuring physical parameters capable of configuring a sensor capable of directly measuring a high value of physical parameters such as high stress or high pressure without employing a pressure resistance container. The sensor material for measuring static and dynamic physical parameters includes a matrix made of an electrically insulating ceramic material, and piezoresistance materials which are dispersed in the matrix so as to be electrically continuous to each other.

    摘要翻译: 一种用于测量物理参数的传感器材料,其能够构造能够直接测量诸如高应力或高压的物理参数的高值的传感器,而不使用耐压容器。 用于测量静态和动态物理参数的传感器材料包括由电绝缘陶瓷材料制成的基体和分散在基体中以彼此电连续的压电材料。

    Catalyst support and catalyst and process for producing the same
    7.
    发明授权
    Catalyst support and catalyst and process for producing the same 失效
    催化剂载体和催化剂及其制备方法

    公开(公告)号:US06221805B1

    公开(公告)日:2001-04-24

    申请号:US09256234

    申请日:1999-02-24

    IPC分类号: B01J2304

    摘要: A catalyst support, a catalyst using the catalyst support and a process for producing the same are disclosed. For instance, the catalyst support includes a composite oxide powder produced by spraying and burning a W/O type emulsion, the W/O type emulsion including an aqueous solution dispersed in an organic solvent, the aqueous solution containing aluminum as a major component and at least one co-metallic element in addition to the aluminum. Thus, the catalyst support can be produced less expensively without using any expensive alkoxide. Further, due to the spraying and burning, the composite oxide powder is composed of porous hollow particles which have a very thin shell thickness of dozens of nanometers, and makes the catalyst support which is amorphous and exhibits a large specific surface area. Hence, the catalyst support can maintain the large specific surface area even after a high-temperature durability test. Furthermore, the composite oxide powder includes the co-metallic element which is composited in such a highly dispersed manner that the agglomerated sulfates are less likely to be produced. Therefore, the catalyst support is inhibited from being poisoned by sulfur.

    摘要翻译: 公开了催化剂载体,使用催化剂载体的催化剂及其制备方法。 例如,催化剂载体包括通过喷雾和燃烧W / O型乳液而制备的复合氧化物粉末,W / O型乳液包括分散在有机溶剂中的水溶液,含有铝作为主要成分的水溶液, 除了铝之外还有至少一种共金属元素。 因此,不用任何昂贵的醇盐就可以不昂贵地生产催化剂载体。 此外,由于喷涂和燃烧,复合氧化物粉末由具有非常薄的几十纳米的壳厚度的多孔中空颗粒组成,并使催化剂载体是无定形的并且具有大的比表面积。 因此,即使在高温耐久试验之后,催化剂载体也能保持较大的比表面积。 此外,复合氧化物粉末包括以非常分散的方式复合的共金属元素,使得不太可能生产聚集的硫酸盐。 因此,抑制催化剂载体被硫中毒。

    Method of producing silicon carbide single crystal
    8.
    发明授权
    Method of producing silicon carbide single crystal 失效
    生产碳化硅单晶的方法

    公开(公告)号:US5964944A

    公开(公告)日:1999-10-12

    申请号:US820888

    申请日:1997-03-21

    摘要: An easy and low-cost method of producing a large-size and high-purity silicon carbide (SiC) single crystal includes reacting silicon vapor directly with a carbon-containing compound gas under a heated atmosphere (growth space 14) to grow a silicon carbide single crystal (15) on a silicon carbide seed crystal (12), in which the silicon vapor generated from molten silicon (13) is used as a silicon vapor source, and a hydrocarbon gas (9) (e.g., propane gas) is used as the carbon-containing compound gas.

    摘要翻译: 制造大尺寸和高纯度碳化硅(SiC)单晶的简单且低成本的方法包括在加热的气氛(生长空间14)下使硅蒸气与含碳化合物气体直接反应,以生长碳化硅 使用从熔融硅(13)产生的硅蒸气作为硅蒸气源的碳化硅晶种(12)上的单晶(15),使用烃气(9)(例如丙烷气) 作为含碳化合物气体。

    Controller and controlling method for piezoelectric actuator
    9.
    发明授权
    Controller and controlling method for piezoelectric actuator 失效
    压电执行器的控制器和控制方法

    公开(公告)号:US5796206A

    公开(公告)日:1998-08-18

    申请号:US725679

    申请日:1996-10-02

    CPC分类号: H02N2/142

    摘要: A method for controlling a piezoelectric actuator includes: a safety range setting process in which a safety range V.sub.range1 or V.sub.range2 of an applied voltage is set so that an area of 180.degree. domain rotation is within one third or less of an area of full 180.degree. domain rotation S.sub.1 or S.sub.2 in a positive or negative region of the applied voltage; and a driving process in which the voltage is applied to the piezoelectric actuator with a limitation of the safety range V.sub.range1 or V.sub.range2. A controller which drives a piezoelectric actuator according to the controlling method is also provided. A temperature compensation is applied if necessary. The 180.degree. domain rotation is limited by the lower or upper limit of the safety range, so that local concentration of inner stress is suppressed and the actuator is driven at its maximum ability without cracks or splits.

    摘要翻译: 一种用于控制压电致动器的方法包括:设置施加电压的安全范围Vrange1或Vrange2的安全范围设定处理,使得180°域旋转的面积在180度的区域的三分之一以下 施加电压的正或负区域中的域旋转S1或S2; 以及在安全范围Vrange1或Vrange2的限制下将电压施加到压电致动器的驱动过程。 还提供了根据控制方法驱动压电致动器的控制器。 必要时应用温度补偿。 180°域旋转受安全范围的上限或下限限制,内部应力的局部浓度被抑制,致动器的最大能力无裂纹或分裂。

    Piezoelectric ceramic composition
    10.
    发明授权
    Piezoelectric ceramic composition 失效
    压电陶瓷组合物

    公开(公告)号:US5753136A

    公开(公告)日:1998-05-19

    申请号:US862924

    申请日:1997-05-27

    CPC分类号: H01L41/187 C04B35/493

    摘要: This invention provides a piezoelectric ceramic composition having large field-induced strain under high compressive stress, small temperature dependence of strain, and high energy conversion efficiency even at high temperatures. The composition is represented by; (Pb.sub.1-(3X/2)-(U/2) La.sub.X)((Zr.sub.Y Ti.sub.1-Y).sub.1-Z-U (Mg.sub.1/3 Nb.sub.2/3).sub.Z Nb.sub.U)O.sub.3 where 0

    摘要翻译: 本发明提供一种压电陶瓷组合物,其在高压缩应力下具有较大的场致应变,应变温度依赖性小,即使在高温下也具有高的能量转换效率。 组成由 (Pb1-(3X / 2) - (U / 2)LaX)((ZrYTi1-Y)1-Z-U(Mg1 / 3Nb2 / 3)ZNbU)O3,其中0