公开(公告)号：US08669534B2

公开(公告)日：2014-03-11

申请号：US12934966

申请日：2009-03-23

Applicant: Kenichi Obori ,  Koichi Matsumoto ,  Shogo Awata ,  Satoshi Ohashi ,  Kyoko Onoguchi

Inventor： Akira Onoguchi ,  Kenichi Obori ,  Koichi Matsumoto ,  Shogo Awata ,  Satoshi Ohashi

IPC: H01J37/12

CPC classification number: H01J37/12 ,  H01J2237/121 ,  H01J2237/28

Abstract: Provided is an electrostatic lens for charged particle radiation with a lens performance relatively comparable to that of a magnetic type lens. A plurality of electrodes arranged on the incident side of charged particles form a first electric field area, wherein orbit radii of the charged particles are reduced without exceeding, on the way, the initial orbit radii that are orbit radii at the incident time, and a second electric field area, wherein force in the direction advancing in parallel with a central axis is applied to the charged particles that have passed through the first electric field area. A plurality of electrodes arranged on the projection side form a third electric field area, wherein the orbit radii of the charged particles do not exceed the initial orbit radii on the way and are curved to intersect with a central axis at angles larger than orbit angles defined with respect to the central axis of when the charged particles are projected from the second electric field area.

Abstract translation: 提供一种用于带电粒子辐射的静电透镜，其具有与磁性透镜相当的透镜性能。 布置在带电粒子的入射侧的多个电极形成第一电场区域，其中带电粒子的轨道半径减小而不超过在入射时为轨道半径的初始轨道半径， 第二电场区域，其中在与中心轴平行的方向上的力施加到已经通过第一电场区域的带电粒子。 布置在投影侧的多个电极形成第三电场区域，其中带电粒子的轨道半径在途中不超过初始轨道半径，并且弯曲成与中心轴相交，角度大于所定义的轨道角度 相对于带电粒子从第二电场区域突出时的中心轴线。

公开(公告)号：US20130009070A1

公开(公告)日：2013-01-10

申请号：US12934966

申请日：2009-03-23

Applicant: Akira Onoguchi ,  Kyoko Onoguchi ,  Kenichi Obori ,  Koichi Matsumoto ,  Shogo Awata ,  Satoshi Ohashi

Inventor： Akira Onoguchi ,  Kyoko Onoguchi ,  Kenichi Obori ,  Koichi Matsumoto ,  Shogo Awata ,  Satoshi Ohashi

IPC: H01J3/18

CPC classification number: H01J37/12 ,  H01J2237/121 ,  H01J2237/28

Abstract: Provided is an electrostatic lens for charged particle radiation with a lens performance relatively comparable to that of a magnetic type lens. A plurality of electrodes arranged on the incident side of charged particles form a first electric field area, wherein orbit radii of the charged particles are reduced without exceeding, on the way, the initial orbit radii that are orbit radii at the incident time, and a second electric field area, wherein force in the direction advancing in parallel with a central axis is applied to the charged particles that have passed through the first electric field area. A plurality of electrodes arranged on the projection side form a third electric field area, wherein the orbit radii of the charged particles do not exceed the initial orbit radii on the way and are curved to intersect with a central axis at angles larger than orbit angles defined with respect to the central axis of when the charged particles are projected from the second electric field area.

Abstract translation: 提供一种用于带电粒子辐射的静电透镜，其具有与磁性透镜相当的透镜性能。 布置在带电粒子的入射侧的多个电极形成第一电场区域，其中带电粒子的轨道半径减小而不超过在入射时为轨道半径的初始轨道半径， 第二电场区域，其中在与中心轴平行的方向上的力施加到已经通过第一电场区域的带电粒子。 布置在投影侧的多个电极形成第三电场区域，其中带电粒子的轨道半径在途中不超过初始轨道半径，并且弯曲成与中心轴相交，角度大于所定义的轨道角度 相对于带电粒子从第二电场区域突出时的中心轴线。