公开(公告)号：US08669534B2

公开(公告)日：2014-03-11

申请号：US12934966

申请日：2009-03-23

申请人： Kenichi Obori ,  Koichi Matsumoto ,  Shogo Awata ,  Satoshi Ohashi ,  Kyoko Onoguchi

发明人： Akira Onoguchi ,  Kenichi Obori ,  Koichi Matsumoto ,  Shogo Awata ,  Satoshi Ohashi

IPC分类号： H01J37/12

CPC分类号： H01J37/12 ,  H01J2237/121 ,  H01J2237/28

摘要： Provided is an electrostatic lens for charged particle radiation with a lens performance relatively comparable to that of a magnetic type lens. A plurality of electrodes arranged on the incident side of charged particles form a first electric field area, wherein orbit radii of the charged particles are reduced without exceeding, on the way, the initial orbit radii that are orbit radii at the incident time, and a second electric field area, wherein force in the direction advancing in parallel with a central axis is applied to the charged particles that have passed through the first electric field area. A plurality of electrodes arranged on the projection side form a third electric field area, wherein the orbit radii of the charged particles do not exceed the initial orbit radii on the way and are curved to intersect with a central axis at angles larger than orbit angles defined with respect to the central axis of when the charged particles are projected from the second electric field area.

摘要翻译： 提供一种用于带电粒子辐射的静电透镜，其具有与磁性透镜相当的透镜性能。 布置在带电粒子的入射侧的多个电极形成第一电场区域，其中带电粒子的轨道半径减小而不超过在入射时为轨道半径的初始轨道半径， 第二电场区域，其中在与中心轴平行的方向上的力施加到已经通过第一电场区域的带电粒子。 布置在投影侧的多个电极形成第三电场区域，其中带电粒子的轨道半径在途中不超过初始轨道半径，并且弯曲成与中心轴相交，角度大于所定义的轨道角度 相对于带电粒子从第二电场区域突出时的中心轴线。

公开(公告)号：US20130009070A1

公开(公告)日：2013-01-10

申请号：US12934966

申请日：2009-03-23

申请人： Akira Onoguchi ,  Kyoko Onoguchi ,  Kenichi Obori ,  Koichi Matsumoto ,  Shogo Awata ,  Satoshi Ohashi

发明人： Akira Onoguchi ,  Kyoko Onoguchi ,  Kenichi Obori ,  Koichi Matsumoto ,  Shogo Awata ,  Satoshi Ohashi

IPC分类号： H01J3/18

CPC分类号： H01J37/12 ,  H01J2237/121 ,  H01J2237/28

摘要： Provided is an electrostatic lens for charged particle radiation with a lens performance relatively comparable to that of a magnetic type lens. A plurality of electrodes arranged on the incident side of charged particles form a first electric field area, wherein orbit radii of the charged particles are reduced without exceeding, on the way, the initial orbit radii that are orbit radii at the incident time, and a second electric field area, wherein force in the direction advancing in parallel with a central axis is applied to the charged particles that have passed through the first electric field area. A plurality of electrodes arranged on the projection side form a third electric field area, wherein the orbit radii of the charged particles do not exceed the initial orbit radii on the way and are curved to intersect with a central axis at angles larger than orbit angles defined with respect to the central axis of when the charged particles are projected from the second electric field area.

摘要翻译： 提供一种用于带电粒子辐射的静电透镜，其具有与磁性透镜相当的透镜性能。 布置在带电粒子的入射侧的多个电极形成第一电场区域，其中带电粒子的轨道半径减小而不超过在入射时为轨道半径的初始轨道半径， 第二电场区域，其中在与中心轴平行的方向上的力施加到已经通过第一电场区域的带电粒子。 布置在投影侧的多个电极形成第三电场区域，其中带电粒子的轨道半径在途中不超过初始轨道半径，并且弯曲成与中心轴相交，角度大于所定义的轨道角度 相对于带电粒子从第二电场区域突出时的中心轴线。

公开(公告)号：US08416921B2

公开(公告)日：2013-04-09

申请号：US12280136

申请日：2007-02-08

申请人： Hiromoto Nakazawa ,  Hideki Yoshikawa ,  Aurel-Mihai Vlaicu ,  Kenichi Obori ,  Shintaro Komatani ,  Sumito Ohzawa

发明人： Hiromoto Nakazawa ,  Hideki Yoshikawa ,  Aurel-Mihai Vlaicu ,  Kenichi Obori ,  Shintaro Komatani ,  Sumito Ohzawa

IPC分类号： G21K1/06

CPC分类号： G21K1/06 ,  G21K2201/064

摘要： An X-ray convergence element and an X-ray irradiation device including the X-ray convergence element are provided. The X-ray convergence element can extend a working distance from an exit-side opening end thereof to a specimen, and can perform analysis of the specimen with rough surface, a fluorescent X-ray analysis, and a X-ray diffraction analysis, regardless of a size of the specimen. An X-ray blocking member 23 is provided with three supporting members 233 for supporting the X-ray blocking member 23, which extend from an annular member 232 having approximately the same diameter as a diameter of an entrance-side opening end (outer diameter of a capillary 20) toward the center of the X-ray blocking member 23 to fix the annular member 232 to the capillary 20. The annular member 232, the supporting members 233, and the X-ray blocking member 23 are integrally formed of a metal that shields X-rays, such as tantalum, tungsten, or molybdenum. A dimension of the X-ray blocking member 23 in the axial direction (thickness) is set to be sufficient for blocking X-rays.

摘要翻译： 提供了包括X射线会聚元件的X射线会聚元件和X射线照射装置。 X射线会聚元件可以将其出口侧开口端的工作距离延伸到试样，并且可以进行具有粗糙表面，荧光X射线分析和X射线衍射分析的样品的分析 的样本大小。 X射线阻挡构件23设置有用于支撑X射线阻挡构件23的三个支撑构件233，其从具有与入口侧开口端的直径大致相同直径的环形构件232延伸（外径 毛细管20）朝向X射线阻挡构件23的中心，以将环形构件232固定到毛细管20.环形构件232，支撑构件233和X射线阻挡构件23由金属 屏蔽X射线，如钽，钨或钼。 X射线阻挡构件23的轴向（厚度）的尺寸被设定为足以阻挡X射线。

公开(公告)号：US20100226477A1

公开(公告)日：2010-09-09

申请号：US12280136

申请日：2007-02-08

申请人： Hiromoto Nakazawa ,  Hideki Yoshikawa ,  Aurel-Mihai Vlaicu ,  Kenichi Obori ,  Shintaro Komatani ,  Sumito Ohzawa

发明人： Hiromoto Nakazawa ,  Hideki Yoshikawa ,  Aurel-Mihai Vlaicu ,  Kenichi Obori ,  Shintaro Komatani ,  Sumito Ohzawa

IPC分类号： G21K5/00 ,  G21K1/02

CPC分类号： G21K1/06 ,  G21K2201/064

摘要： An X-ray convergence element and an X-ray irradiation device including the X-ray convergence element are provided. The X-ray convergence element can extend a working distance from an exit-side opening end thereof to a specimen, and can perform analysis of the specimen with rough surface, a fluorescent X-ray analysis, and a X-ray diffraction analysis, regardless of a size of the specimen. An X-ray blocking member 23 is provided with three supporting members 233 for supporting the X-ray blocking member 23, which extend from an annular member 232 having approximately the same diameter as a diameter of an entrance-side opening end (outer diameter of a capillary 20) toward the center of the X-ray blocking member 23 to fix the annular member 232 to the capillary 20. The annular member 232, the supporting members 233, and the X-ray blocking member 23 are integrally formed of a metal that shields X-rays, such as tantalum, tungsten, or molybdenum. A dimension of the X-ray blocking member 23 in the axial direction (thickness) is set to be sufficient for blocking X-rays.

摘要翻译： 提供了包括X射线会聚元件的X射线会聚元件和X射线照射装置。 X射线会聚元件可以将其出口侧开口端的工作距离延伸到试样，并且可以进行具有粗糙表面，荧光X射线分析和X射线衍射分析的样品的分析 的样本大小。 X射线阻挡构件23设置有用于支撑X射线阻挡构件23的三个支撑构件233，其从具有与入口侧开口端的直径大致相同直径的环形构件232延伸（外径 毛细管20）朝向X射线阻挡构件23的中心，以将环形构件232固定到毛细管20.环形构件232，支撑构件233和X射线阻挡构件23由金属 屏蔽X射线，如钽，钨或钼。 X射线阻挡构件23的轴向（厚度）的尺寸被设定为足以阻挡X射线。

公开(公告)号：US5596195A

公开(公告)日：1997-01-21

申请号：US529288

申请日：1995-09-15

申请人： Kenichi Obori ,  Atsushi Bando ,  Toshikazu Yurugi

发明人： Kenichi Obori ,  Atsushi Bando ,  Toshikazu Yurugi

IPC分类号： G01N23/225 ,  H01J37/256 ,  H01J37/00

CPC分类号： H01J37/256

摘要： An apparatus and method of identifying substances contained in a sample to both identify the elements in the sample and to measure a distribution of the elements are provided. The sample is scanned with electron beams to form X-ray images of two or elements. These X-ray images can be used to form a scattering diagram, and the composition of known materials can be plotted on the scattering diagram. The substances contained in the samples can be identified, and the distribution of the substances can be obtained by comparing the data on the scattering diagram with the plot.

摘要翻译： 提供了一种识别样品中所含物质的装置和方法，以便识别样品中的元素并测量元件的分布。 用电子束扫描样品以形成两个或多个元素的X射线图像。 这些X射线图像可用于形成散射图，并且已知材料的组成可以绘制在散射图上。 可以确定样品中含有的物质，并通过比较散射图上的数据和图来获得物质的分布。