公开(公告)号：US20140049278A1

公开(公告)日：2014-02-20

申请号：US13957868

申请日：2013-08-02

申请人： Stefan TRENZ ,  Gunther BÖHM ,  Achim WEILAND

发明人： Stefan TRENZ ,  Gunther BÖHM ,  Achim WEILAND

IPC分类号： G01R31/28

CPC分类号： G01R31/2886 ,  G01R1/07314 ,  G01R1/07357

摘要： The present disclosure relates to a test head for electrical testing of a test specimen, in particular a wafer, having at least two guide plates, which are spaced apart by means of at least one spacer and have guide holes distributed over the surfaces thereof, in which test contact pins for physical contact with the test specimen are guided in a sliding manner. Provision is made for the spacer to be formed by a multiplicity of point supports arranged in a manner distributed over the surfaces of the guide plates and secured on the guide plates.

摘要翻译： 本公开涉及一种用于电测试的测试头，特别是具有至少两个引导板的测试样本的测试头，所述至少两个引导板通过至少一个间隔件间隔开并且在其表面上分布有引导孔， 用于与测试样品物理接触的测试接触销被滑动地引导。 通过多个点支撑件形成间隔件，其布置方式分布在导向板的表面上并固定在导向板上。

公开(公告)号：US09513331B2

公开(公告)日：2016-12-06

申请号：US13957868

申请日：2013-08-02

申请人： Stefan Trenz ,  Gunther Böhm ,  Achim Weiland

发明人： Stefan Trenz ,  Gunther Böhm ,  Achim Weiland

IPC分类号： G01R31/00 ,  G01R31/28 ,  G01R1/073

CPC分类号： G01R31/2886 ,  G01R1/07314 ,  G01R1/07357

摘要： The present disclosure relates to a test head for electrical testing of a test specimen, in particular a wafer, having at least two guide plates, which are spaced apart by means of at least one spacer and have guide holes distributed over the surfaces thereof, in which test contact pins for physical contact with the test specimen are guided in a sliding manner. Provision is made for the spacer to be formed by a multiplicity of point supports arranged in a manner distributed over the surfaces of the guide plates and secured on the guide plates.

摘要翻译： 本公开涉及一种用于电测试的测试头，特别是具有至少两个引导板的测试样本的测试头，所述至少两个引导板通过至少一个间隔件间隔开并且在其表面上分布有引导孔， 用于与测试样品物理接触的测试接触销被滑动地引导。 通过多个点支撑件形成间隔件，其布置方式分布在导向板的表面上并固定在导向板上。