Method and apparatus for automatic sensor installation
    2.
    发明申请
    Method and apparatus for automatic sensor installation 审中-公开
    自动传感器安装方法和装置

    公开(公告)号:US20050159911A1

    公开(公告)日:2005-07-21

    申请号:US11025396

    申请日:2004-12-30

    摘要: Graphical User Interfaces (GUIs) are presented for configuring and setting-up sensors for monitoring tool and process performance in a semiconductor processing system. The semiconductor processing system includes a number of processing tools, a number of processing modules (chambers), and a number of sensors. The graphical display is organized so that all significant parameters are clearly and logically displayed so that the user is able to perform the desired configuration and setup tasks with as little input as possible. The GUI is web-based and is viewable by a user using a web browser.

    摘要翻译: 提供图形用户界面(GUI),用于配置和设置传感器,用于在半导体处理系统中监控工具和过程性能。 半导体处理系统包括多个处理工具,多个处理模块(室)和多个传感器。 图形显示被组织,使得所有重要参数都被清楚和逻辑地显示,使得用户能够尽可能少地输入所需的配置和设置任务。 GUI是基于Web的,并且可以由使用web浏览器的用户查看。