公开(公告)号：US06720261B1

公开(公告)日：2004-04-13

申请号：US09586586

申请日：2000-06-02

申请人： Steven Mark Anderson ,  Siddhartha Bhowmik ,  Joseph William Buckfeller ,  Sailesh Mansinh Merchant ,  Frank Minardi

发明人： Steven Mark Anderson ,  Siddhartha Bhowmik ,  Joseph William Buckfeller ,  Sailesh Mansinh Merchant ,  Frank Minardi

IPC分类号： H01L2144

CPC分类号： H01L21/76843 ,  Y02P80/30

摘要： A system and method for eliminating interconnect extrusions in vias that are formed during ionized metal plasma processing. By eliminating interconnect extrusions in vias, reliability failures and yield loss are decreased. The extrusions of interconnect metallization occur while wafers are subject to elevated temperatures that cause the internal stresses in the interconnect metallization to transit from a substantially tensile mode to a substantially compressive mode. By controlling the interconnect temperature to be below the temperature at which the interconnect transits from a tensile to a compressive mode, interconnect extrusions in vias are eliminated. The interconnect temperature is controlled by using an actively cooled pedestal in combination with a low temperature IMP deposition process. In addition, the IMP processing time may also be decreased to limit heating of the interconnect.

公开(公告)号：US5704862A

公开(公告)日：1998-01-06

申请号：US782389

申请日：1997-01-13

申请人： Michel Leroy Janne ,  Steven Mark Anderson

发明人： Michel Leroy Janne ,  Steven Mark Anderson

IPC分类号： F16H7/02 ,  F16G5/20 ,  F16H55/49 ,  F16H55/36

CPC分类号： F16H55/49 ,  F16G5/20

摘要： This invention relates to dual-sided multi-ribbed power transmission belts having a plurality of longitudinally extending, transversely spaced alternating ribs and grooves with the ribs having a distance between their midpoints of a pitch P on both sides of the belt. The grooves on opposite sides of the belt are transversely offset from each by a distance of P/2.

摘要翻译： 本发明涉及具有多个纵向延伸的，横向间隔开的交替的肋和槽的双面多肋动力传动带，其中肋具有在带的两侧的间距P的中点之间的距离。 皮带相对侧的凹槽横向偏移P / 2的距离。