公开(公告)号：US20080047897A1

公开(公告)日：2008-02-28

申请号：US11840187

申请日：2007-08-16

申请人： In-Ho Jeong ,  Jae-Dong Hwang ,  Sung-Kwang Eun ,  Byung-Moon Choi ,  Sun-Pil Kim ,  Deung-Yoon Heo

发明人： In-Ho Jeong ,  Jae-Dong Hwang ,  Sung-Kwang Eun ,  Byung-Moon Choi ,  Sun-Pil Kim ,  Deung-Yoon Heo

IPC分类号： C02F9/00 ,  C02F9/02 ,  C02F9/04

CPC分类号： C02F1/441 ,  C02F1/20 ,  C02F1/66 ,  C02F1/76 ,  C02F9/00 ,  C02F2001/425 ,  C02F2103/346 ,  C02F2209/06 ,  C02F2303/04 ,  C02F2303/185

摘要： A method of recycling waste water is preferably provided in which hardness and gas are removed from the waste water. Additionally, salt and organic carbon are preferably removed from the waste water using high-efficiency reverse osmosis. The pH of the waste water can be controlled to optimize the processes. The recycled semiconductor waste water can then be made available for use as industrial water for performing a semiconductor fabrication process. As a result, a cost for manufacturing a semiconductor device may be reduced. The principles of the present invention also provide a more environmentally friendly manufacturing method, since it produces less semiconductor waste water when being performed than conventional methods.

摘要翻译： 优选提供回收废水的方法，其中从废水中除去硬度和气体。 此外，优选使用高效反渗透从废水中除去盐和有机碳。 可以控制废水的pH以优化工艺。 再循环的半导体废水然后可以作为工业用水进行半导体制造过程。 结果，制造半导体器件的成本可能降低。 本发明的原理还提供了一种更环保的制造方法，因为当与常规方法相比时，其产生较少的半导体废水。