Abstract:
A reciprocal design symmetry allows stacked wafers or die on wafer to use identical designs or designs that vary only by a few layers (e.g. metal interconnect layers). Flipping or rotating one die or wafer allows the stacked die to have a reciprocal orientation with respect to each other which may be used to decrease the interconnect required between the vertically stacked die and or wafers. Flipping and/or rotating may also be used to improve heat dissipation when wafer and/or die are stacked. The stacked wafers or die may then be packaged.
Abstract:
Etching equipment and methods are disclosed herein for more efficient etching of sacrificial material from between permanent MEMS structures. An etching head includes an elongate etchant inlet structure, which may be slot-shaped or an elongate distribution of inlet holes. A substrate is supported in proximity to the etching head in a manner that defines a flow path substantially parallel to the substrate face, and permits relative motion for the etching head to scan across the substrate.
Abstract:
This disclosure relates to an interactive display, having a front surface including a viewing area, and providing an input/output interface for a user of an electronic device. A planar light guide (PLG) disposed substantially parallel to the front surface, has a periphery at least coextensive with the viewing area. A light-emitting source (LES), disposed outside the periphery of the PLG, is optically coupled with a PLG input. The PLG outputs reflected light, in a direction substantially orthogonal to the front surface, by reflecting light received from the LES. A light collecting device (LCD) collects scattered light that results from interaction of the reflected light with a user-controlled object. The LCD redirects the collected scattered light toward one or more light sensors. A processor recognizes, from outputs of the light sensors, an instance of a user gesture, and controls the interactive display and/or electronic device, responsive to the user gesture.
Abstract:
This disclosure relates to an interactive display, having a front surface including a viewing area, and providing an input/output interface for a user of an electronic device. A planar light guide (PLG) disposed substantially parallel to the front surface, has a periphery at least coextensive with the viewing area. A light-emitting source (LES), disposed outside the periphery of the PLG, is optically coupled with a PLG input. The PLG outputs reflected light, in a direction substantially orthogonal to the front surface, by reflecting light received from the LES. A light collecting device (LCD) collects scattered light that results from interaction of the reflected light with a user-controlled object. The LCD redirects the collected scattered light toward one or more light sensors. A processor recognizes, from outputs of the light sensors, an instance of a user gesture, and controls the interactive display and/or electronic device, responsive to the user gesture.
Abstract:
Etching equipment and methods are disclosed herein for more efficient etching of sacrificial material from between permanent MEMS structures. An etching head includes an elongate etchant inlet structure, which may be slot-shaped or an elongate distribution of inlet holes. A substrate is supported in proximity to the etching head in a manner that defines a flow path substantially parallel to the substrate face, and permits relative motion for the etching head to scan across the substrate.
Abstract:
A three dimensional (3D) integrated circuit (IC), 3D IC chip and method of fabricating a 3D IC chip. The chip includes multiple layers of circuits, e.g., silicon insulator (SOI) CMOS IC layers, each including circuit elements. The layers may be formed in parallel and one layer attached to another to form a laminated 3D chip.
Abstract:
A three dimensional (3D) integrated circuit (IC), 3D IC chip and method of fabricating a 3D IC chip. The chip includes multiple layers of circuits, e.g., silicon insulator (SOI) CMOS IC layers, each including circuit elements. The layers may be formed in parallel and one layer attached to another to form a laminated 3D chip.
Abstract:
Reflected sonar signals arising from one or more possible unknown objects are distinguished according to a first criterion, and possible shapes each having a defined unique associated point are assigned each of the possible unknown objects. Then the three dimensional points are tracked by the sonar system.
Abstract:
A three dimensional (3D) integrated circuit (IC), 3D IC chip and method of fabricating a 3D IC chip. The chip includes multiple layers of circuits, e.g., silicon insulator (SOI) CMOS IC layers, each including circuit elements. The layers may be formed in parallel and one layer attached to another to form a laminated 3D chip.