公开(公告)号：US20130265073A1

公开(公告)日：2013-10-10

申请号：US13993690

申请日：2011-01-16

申请人： Hirofumi Nakano ,  Taishi Uemura ,  Kazuhiro Matsuda

发明人： Hirofumi Nakano ,  Taishi Uemura ,  Kazuhiro Matsuda

IPC分类号： G01R3/00 ,  G01R1/073

CPC分类号： G01R3/00 ,  G01R1/07342 ,  G01R1/07378 ,  G01R31/2889 ,  Y10T29/49128

摘要： The present invention provides a ST board 2 that is formed with an lower surface electrode 22; a unit attachment plate 3 that is fastened on the ST board 2 and formed with an opening part 31 exposing the lower surface electrode 22; a probe unit 5 that includes a probe substrate 50 formed with a contact probe 51 and a probe electrode 52 and is fastened on the unit attachment plate 3; and an electrically conductive wire 54 that connects the lower surface electrode 22 and the probe electrode 52 to each other through the opening part 31. The probe unit 5 can be fastened on the ST board 2 with the unit attachment plate 3 intervening, and through the opening part 31 of the unit attachment plate 3, the probe electrode 51 and the lower surface electrode 22 can be electrically connected to each other.

摘要翻译： 本发明提供一种形成有下表面电极22的ST板2， 固定在ST板2上并形成有露出下表面电极22的开口部31的单元附接板3; 探针单元5，其包括形成有接触探针51和探针电极52的探针基板50，并且紧固在单元安装板3上; 以及通过开口部31将下表面电极22和探针电极52相互连接的导电线54.探针单元5可以在单元安装板3插入的状态下紧固在ST板2上，并且通过 单元安装板3的开口部31，探针电极51和下表面电极22可以彼此电连接。