公开(公告)号：US06934021B2

公开(公告)日：2005-08-23

申请号：US10650014

申请日：2003-08-27

申请人： Tero Eklin ,  Mikko Krapu

发明人： Tero Eklin ,  Mikko Krapu

IPC分类号： G01J3/443 ,  G01N21/67 ,  G01J3/30

CPC分类号： G01J3/443 ,  G01N21/67

摘要： A measurement device and method are provided for OES measurements in air. An arc electrode (201, 501) has a certain thickness and a pointed end having a certain grinding angle. Holding means (202, 502) hold the arc electrode (201, 501) at a certain distance from the material to be measured. A voltage and current supply (203) generates and maintains a voltage between the arc electrode and the material to be measured and supplies current through the arc. Focusing and detection optics (205, 206, 402, 403, 404, 405, 406, 407, 408, 505, 506, 509, 604) collect and detect optical radiation. The thickness of the arc electrode (201, 501) is between 3 and 10 mm and the grinding angle is between 50 and 130 degrees. The arc distance is between 0.5 and 3 mm. An ignition spark voltage is between 5 and 20 kV, an arc voltage between 20 and 160 V and an arc current between 1 and 10 A. The focusing and detection optics (205, 206, 402, 403, 404, 405, 406, 407, 408, 505, 506, 509, 604) collect and detect at least optical radiation on a wavelength of 193 nm.

摘要翻译： 为空气中的OES测量提供了一种测量装置和方法。 电弧电极（201,501）具有一定的厚度，尖端具有一定的研磨角度。 保持装置（202,502）将电弧电极（201,501）保持在距离被测量材料一定距离处。 电压和电流供应（203）产生并维持电弧电极和待测材料之间的电压，并且通过电弧提供电流。 聚焦和检测光学器件（205,206,402,403,404,405,406,407,408,505,506,509,604）收集并检测光辐射。 电弧电极（201,501）的厚度在3和10mm之间，研磨角度在50和130度之间。 电弧距离在0.5到3毫米之间。 点火火花电压在5和20kV之间，电弧电压在20和160V之间，电弧电流在1和10A之间。聚焦和检测光学器件（205,206,402,403,404,405,406,407 ，408,505,506,509,604）收集并检测至少193nm波长的光辐射。

公开(公告)号：US07233643B2

公开(公告)日：2007-06-19

申请号：US11134740

申请日：2005-05-20

申请人： Heikki Johannes Sipilä ,  Tero Eklin ,  Kai Kuparinen

发明人： Heikki Johannes Sipilä ,  Tero Eklin ,  Kai Kuparinen

IPC分类号： G01N23/233

CPC分类号： G01N21/718 ,  G01N23/223 ,  G01N2223/076

摘要： A measurement apparatus and method are provided for determining the material composition of a sample. An X-ray fluorescence detector (412) detects fluorescent X-rays coming from said sample under irradiation with incident X-rays. A laser source (301) is adapted to produce a laser beam. Focusing optics (302) focus said laser beam into a focal spot on a surface of said sample. An optical sensor (312) detects optical emissions coming from particles of said sample upon being exposed to said laser beam at said focal spot. A gas administration subsystem (104, 105, 106, 107, 108) is adapted to controllably deliver gas to a space (101) around said focal spot.

摘要翻译： 提供了用于确定样品的材料组成的测量装置和方法。 X射线荧光检测器（412）在入射的X射线照射下检测来自所述样品的荧光X射线。 激光源（301）适于产生激光束。 聚焦光学器件（302）将所述激光束聚焦到所述样品的表面上的焦斑中。 光学传感器（312）在所述焦点处暴露于所述激光束时检测来自所述样品的颗粒的光发射。 气体管理子系统（104,105,106,107,108）适于可控地将气体输送到围绕所述焦点的空间（101）。

公开(公告)号：US20060262900A1

公开(公告)日：2006-11-23

申请号：US11134740

申请日：2005-05-20

申请人： Heikki Sipila ,  Tero Eklin ,  Kai Kuparinen

发明人： Heikki Sipila ,  Tero Eklin ,  Kai Kuparinen

IPC分类号： G01N23/223 ,  G01T1/36

CPC分类号： G01N21/718 ,  G01N23/223 ,  G01N2223/076

摘要： A measurement apparatus and method are provided for determining the material composition of a sample. An X-ray fluorescence detector (412) detects fluorescent X-rays coming from said sample under irradiation with incident X-rays. A laser source (301) is adapted to produce a laser beam. Focusing optics (302) focus said laser beam into a focal spot on a surface of said sample. An optical sensor (312) detects optical emissions coming from particles of said sample upon being exposed to said laser beam at said focal spot. A gas administration subsystem (104, 105, 106, 107, 108) is adapted to controllably deliver gas to a space (101) around said focal spot.

摘要翻译： 提供了用于确定样品的材料组成的测量装置和方法。 X射线荧光检测器（412）在入射的X射线照射下检测来自所述样品的荧光X射线。 激光源（301）适于产生激光束。 聚焦光学器件（302）将所述激光束聚焦到所述样品的表面上的焦斑中。 光学传感器（312）在所述焦点处暴露于所述激光束时检测来自所述样品的颗粒的光发射。 气体管理子系统（104,105,106,107,108）适于可控地将气体输送到围绕所述焦点的空间（101）。

公开(公告)号：US20060262302A1

公开(公告)日：2006-11-23

申请号：US11417689

申请日：2006-05-04

申请人： Tero Eklin

发明人： Tero Eklin

IPC分类号： G01J3/30

CPC分类号： G01N21/718 ,  G01N21/87

摘要： An arrangement and a method are provided for non-destructively analyzing the composition of a delicate sample. The value of the sample depends at least partly on absence of visual defects. A laser source (301) produces a pulsed laser beam, and focusing optics (302) focus said pulsed laser beam into a focal spot on the sample. A sensor (312) receives and detects optical emissions from particles of the sample excited by said pulsed laser beam. A processing subsystem (111) produces information of the composition of the sample based on the optical emissions detected by said sensor (312).

摘要翻译： 提供了非破坏性地分析精细样品的组成的布置和方法。 样品的值至少部分取决于不存在视觉缺陷。 激光源（301）产生脉冲激光束，并且聚焦光学器件（302）将所述脉冲激光束聚焦到样品上的焦斑中。 传感器（312）接收并检测由所述脉冲激光束激发的样品的颗粒的光发射。 处理子系统（111）基于由所述传感器（312）检测到的光发射，产生样本的组成信息。

公开(公告)号：US07426019B2

公开(公告)日：2008-09-16

申请号：US11417689

申请日：2006-05-04

申请人： Tero Eklin

发明人： Tero Eklin

IPC分类号： G01N21/00

CPC分类号： G01N21/718 ,  G01N21/87

摘要： An arrangement and a method are provided for non-destructively analyzing the composition of a delicate sample. The value of the sample depends at least partly on absence of visual defects. A laser source (301) produces a pulsed laser beam, and focusing optics (302) focus said pulsed laser beam into a focal spot on the sample. A sensor (312) receives and detects optical emissions from particles of the sample excited by said pulsed laser beam. A processing subsystem (111) produces information of the composition of the sample based on the optical emissions detected by said sensor (312).

摘要翻译： 提供了非破坏性地分析精细样品的组成的布置和方法。 样品的值至少部分取决于不存在视觉缺陷。 激光源（301）产生脉冲激光束，并且聚焦光学器件（302）将所述脉冲激光束聚焦到样品上的焦斑中。 传感器（312）接收并检测由所述脉冲激光束激发的样品的颗粒的光发射。 处理子系统（111）基于由所述传感器（312）检测到的光发射，产生样本的组成信息。