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    Defect classification apparatus
    1.
    发明授权
    Defect classification apparatus 有权
    缺陷分类仪

    公开(公告)号：US08977580B2

    公开(公告)日：2015-03-10

    申请号：US13703536

    申请日：2011-06-08

    申请人： Kazunori Anayama ,  Tetsuya Yadoguchi ,  Toshiyuki Suzuma ,  Eiji Honda ,  Takahiro Okada ,  Shinya Yoshikawa ,  Tamotsu Nishimine

    发明人： Kazunori Anayama ,  Tetsuya Yadoguchi ,  Toshiyuki Suzuma ,  Eiji Honda ,  Takahiro Okada ,  Shinya Yoshikawa ,  Tamotsu Nishimine

    IPC分类号： G06F15/18 ,  G06N99/00 ,  G01N21/892 ,  G01N21/952 ,  G06T7/00 ,  G01N21/89

    CPC分类号： G06N99/005 ,  G01N21/892 ,  G01N21/952 ,  G01N2021/8918 ,  G06T7/0004 ,  G06T2207/20081 ,  G06T2207/30136

    摘要： The present invention has its objective to provide a defect classification apparatus which suppresses over-fitting and accurately classify the defect type of a defect. A defect classification apparatus is provided in which a data point indicating feature information of a defect to be classified having an unknown defect type is mapped to a point in a mapping space having a dimensional number higher than the number of features constituting the feature information, and the defect type of the defect to be classified is classified based on in which of two regions of defect type, which are formed by separating the mapping space by a decision boundary, the mapped point is located, wherein a discriminant function indicating the decision boundary is determined by adopting a weight which minimizes the sum of the classification error, which corresponds to the accuracy in classifying a training defect dataset, and a regularization term, which has a positive correlation with the dimensional number of the decision boundary, as the weight for each feature constituting the discriminant function.

    摘要翻译： 本发明的目的是提供一种缺陷分类装置，其能够抑制缺陷的缺陷类型的过度拟合和精确分类。 提供了一种缺陷分类装置，其中指示具有未知缺陷类型的要分类的缺陷的特征信息的数据点被映射到具有高于构成特征信息的特征数的维度数的映射空间中的点，以及 基于通过将映射空间分离为决策边界而形成的两个缺陷类型区域中的哪一个进行分类的缺陷类型，映射点位于其中，其中指示判定边界的判别函数为 通过采用最小化对应于训练缺陷数据集的分类精度的分类误差和与决策边界的维数有正相关关系的正则化项的权重作为每个 特征构成判别函数。

    DEFECT CLASSIFICATION APPARATUS
    3.
    发明申请
    DEFECT CLASSIFICATION APPARATUS 有权
    缺陷分类设备

    公开(公告)号：US20130173508A1

    公开(公告)日：2013-07-04

    申请号：US13703536

    申请日：2011-06-08

    申请人： Kazunori Anayama ,  Tetsuya Yadoguchi ,  Toshiyuki Suzuma ,  Eiji Honda ,  Takahiro Okada ,  Shinya Yoshikawa ,  Tamotsu Nishimine

    发明人： Kazunori Anayama ,  Tetsuya Yadoguchi ,  Toshiyuki Suzuma ,  Eiji Honda ,  Takahiro Okada ,  Shinya Yoshikawa ,  Tamotsu Nishimine

    IPC分类号： G06N99/00

    CPC分类号： G06N99/005 ,  G01N21/892 ,  G01N21/952 ,  G01N2021/8918 ,  G06T7/0004 ,  G06T2207/20081 ,  G06T2207/30136

    摘要： The present invention has its objective to provide a defect classification apparatus which suppresses over-fitting and accurately classify the defect type of a defect. A defect classification apparatus is provided in which a data point indicating feature information of a defect to be classified having an unknown defect type is mapped to a point in a mapping space having a dimensional number higher than the number of features constituting the feature information, and the defect type of the defect to be classified is classified based on in which of two regions of defect type, which are formed by separating the mapping space by a decision boundary, the mapped point is located, wherein a discriminant function indicating the decision boundary is determined by adopting a weight which minimizes the sum of the classification error, which corresponds to the accuracy in classifying a training defect dataset, and a regularization term, which has a positive correlation with the dimensional number of the decision boundary, as the weight for each feature constituting the discriminant function.

    摘要翻译： 本发明的目的是提供一种缺陷分类装置，其能够抑制缺陷的缺陷类型的过度拟合和精确分类。 提供了一种缺陷分类装置，其中指示具有未知缺陷类型的要分类的缺陷的特征信息的数据点被映射到具有高于构成特征信息的特征数的维度数的映射空间中的点，以及 基于通过将映射空间分离为决策边界而形成的两个缺陷类型区域中的哪一个进行分类的缺陷类型，映射点位于其中，其中指示判定边界的判别函数为 通过采用最小化对应于训练缺陷数据集的分类精度的分类误差和与决策边界的维数有正相关关系的正则化项的权重作为每个 特征构成判别函数。