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公开(公告)号：US07026581B2
公开(公告)日：2006-04-11
申请号：US10646228
申请日：2003-08-22
CPC分类号： H01L21/67126 , H01L21/324 , H01L21/67748 , H01L21/67751
摘要： A wafer support position control mechanism selectively positions a semiconductor wafer along an axis of excursion within a process chamber. An elevator tube protrudes through an orifice in the chamber surface and is connected at a first distal end to the wafer support. A compliant, dynamic seal within the orifice engages the elevator tube to form a gas curtain within a gap between the seal and the elevator tube to seal the process chamber. A moveable carriage is connected to the elevator tube at a second distal end for moving the wafer support along the axis of excursion. Rigid mechanical structure couples the second distal end of the elevator tube to the moveable carriage.
摘要翻译： 晶片支撑位置控制机构选择性地将半导体晶片沿着处理室内的偏移轴定位。 电梯管通过腔室表面中的孔突出，并且在第一远端处连接到晶片支撑件。 孔内的柔性动态密封件接合电梯管，以在密封件和电梯管之间的间隙内形成气帘，以密封处理室。 可移动的托架在第二远端处连接到电梯管，用于沿着偏移轴线移动晶片支撑件。 刚性机械结构将电梯管的第二远端连接到可移动的托架上。
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公开(公告)号：US5475206A
公开(公告)日：1995-12-12
申请号：US271229
申请日：1994-07-06
申请人： Brad R. Reddersen , Phillip C. Gummeson , Hiroshi Hayakawa , Blaine F. Loris , Randy D. Elliott , Kimberly A. Ketelsleger , Haruhiko Machida , Yoshiyuki Sugawara , Roger M. Kenyon , Thomas L. Durant
发明人： Brad R. Reddersen , Phillip C. Gummeson , Hiroshi Hayakawa , Blaine F. Loris , Randy D. Elliott , Kimberly A. Ketelsleger , Haruhiko Machida , Yoshiyuki Sugawara , Roger M. Kenyon , Thomas L. Durant
CPC分类号： G06K7/10881 , G06K7/10653 , G06K7/1098
摘要： A laser bar code system is described which includes a first scan module releasably affixed to a housing, which scan module is readily interchangeable with and plug compatible with a second scan module which is configured at least partly differently from the first scan module. In addition, a partitioned scan module is described which comprises a first laser diode subsystem, a first scanning subsystem, a first collection subsystem, and a first signal processing subsystem, a selected one of which is releasably affixed to a chassis, and readily interchangeable and plug compatible with a second laser diode subsystem, a second scanning subsystem, a first collection subsystem, and a second signal processing subsystem, respectively, which is configured at least partly differently from the first.
摘要翻译： 描述了激光条形码系统，其包括可释放地固定到外壳的第一扫描模块，该扫描模块可与第一扫描模块至少部分地不同的配置与第二扫描模块互换并与之兼容。 另外，描述了一个划分的扫描模块，其包括第一激光二极管子系统，第一扫描子系统，第一收集子系统和第一信号处理子系统，所选择的扫描模块可释放地固定到底盘，并且易于互换和 插头与第二激光二极管子系统，第二扫描子系统，第一收集子系统和第二信号处理子系统分别兼容，其被配置为与第一激光二极管子系统至少部分不同。
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公开(公告)号：US5296689A
公开(公告)日：1994-03-22
申请号：US843473
申请日：1992-02-28
IPC分类号： B01J23/656 , C07C209/72 , G02B26/12 , G06K7/10 , H01S3/10
CPC分类号： B01J23/6562 , C07C209/72 , G02B26/125 , G06K7/10594 , G06K7/10702 , G06K2207/1011
摘要： An optical scanning system including an aiming system which is particularly suitable for handheld scanners where the outgoing light is scanned over a desired angle in a scan plane. The aiming system includes a light source generating an optical beam along an outgoing optical path toward an object to be scanned; a detector for detecting light reflected off the object; an oscillating scan mirror in the outgoing optical path directing light toward the object along a scan plane; and a diffractive optical module positioned in the outgoing optical path adjacent the scan mirror, the diffractive optical module having a pair of diffractive optical elements separated by an aperture, the diffractive optical elements positioned on either side of an aperture along the scan plane, each diffractive optical element de-scanning the portion of the optical beam passing therethrough to form an aiming light beam.
摘要翻译： 一种光学扫描系统，其包括瞄准系统，其特别适合于在扫描平面中以期望的角度扫描出射光的手持式扫描仪。 瞄准系统包括：光源，沿着输出光路产生朝向被扫描物体的光束; 用于检测从物体反射的光的检测器; 出射光路中的振荡扫描镜将光沿着扫描平面引向物体; 以及位于与扫描镜相邻的出射光路中的衍射光学模块，衍射光学模块具有由孔隔开的一对衍射光学元件，衍射光学元件位于沿着扫描平面的孔的任一侧上，每个衍射 光学元件去扫描通过其中的光束的部分以形成瞄准光束。
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4.发明授权
公开(公告)号：US4888712A
公开(公告)日：1989-12-19
申请号：US117112
申请日：1987-11-04
IPC分类号： G06T15/30
CPC分类号： G06T15/30
摘要： A system for clipping polygons representing three-dimensional objects to produce a representation of the portion of the objects in a desired viewing space is disclosed. A guardband space at least partially enclosing the viewing space is defined. The polygons are compared to the guardband space to determine which polygons intersect at least one of the guardband planes defining the guardband space. The intersecting polygons are also compared to the viewing space to determine if they intersect at least one of the viewing planes defining the viewing space. Only polygons intersecting both a viewing plane and a guardband plane are clipped.
摘要翻译： 公开了一种用于剪裁表示三维对象的多边形以产生所需观看空间中对象部分的表示的系统。 定义至少部分包围观察空间的护卫空间。 将多边形与保护带空间进行比较，以确定哪些多边形与限定保护带空间的保护带平面中的至少一个相交。 还将相交的多边形与观看空间进行比较，以确定它们是否与限定观看空间的至少一个观看平面相交。 只有与观察平面和保护带平面相交的多边形被剪切。
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