公开(公告)号：US20070154650A1

公开(公告)日：2007-07-05

申请号：US11320609

申请日：2005-12-30

申请人： Mien-Win Wu ,  Cheng-Chang Hsieh ,  Chi-Fong Ai ,  Kuo-Chuan Cheng ,  Tien-Hsiang Hsuch

发明人： Mien-Win Wu ,  Cheng-Chang Hsieh ,  Chi-Fong Ai ,  Kuo-Chuan Cheng ,  Tien-Hsiang Hsuch

IPC分类号： B05D3/00 ,  H05H1/24 ,  C23C16/00 ,  B29C71/04

CPC分类号： H01J37/32825 ,  B29C59/14 ,  H01J37/32348 ,  H01J37/3244 ,  H01J37/3277 ,  H05H1/2406 ,  H05H2001/2412 ,  H05H2240/10

摘要： Abstract of the disclosure The present invention provides a method and an apparatus for a glow discharge plasma surface treatment of flexible sheet materials under atmospheric pressure. The apparatus comprises electrodes, a single plasma-gas flow channel, uniform gas inlet-and-outlet devices, gas-seal devices for the horizontal movements of sheet materials and reel devices, so as to attain an uniform distribution of plasma gases in the gap between electrodes. As a result, not only a great amount of expensive plasma gas is saved, but also an uniform glow discharge plasma is generated at the lowest input power to obtain a good quality of uniform plasma treatment with continuous processing and high production.

摘要翻译： 发明内容本发明提供一种用于在大气压下对柔性片材进行辉光放电等离子体表面处理的方法和装置。 该装置包括电极，单个等离子体气体流动通道，均匀的气体入口和出口装置，用于片材和卷轴装置的水平运动的气体密封装置，以便获得等离子体气体在间隙中的均匀分布 电极之间。 结果，不仅节省了大量昂贵的等离子体气体，而且在最低输入功率下产生均匀的辉光放电等离子体，以通过连续加工和高产量获得均匀等离子体处理的良好质量。