公开(公告)号：US20050178402A1

公开(公告)日：2005-08-18

申请号：US10778799

申请日：2004-02-12

申请人： R. Stowell ,  Tim Cleary ,  Michael Janicki ,  Mark Dinneen

发明人： R. Stowell ,  Tim Cleary ,  Michael Janicki ,  Mark Dinneen

IPC分类号： B08B3/02 ,  B08B3/12 ,  H01L21/00 ,  H01L21/02

CPC分类号： H01L21/02057 ,  B08B3/12 ,  H01L21/67028 ,  H01L21/67051

摘要： Methods and apparatus are provided for the cleaning and drying of a work piece. The apparatus comprises a carrier configured to carry a work piece that has a surface. The apparatus further comprises a press plate having a first surface and a second surface. During a cleaning process, the carrier, the press plate, or both, is configured to move relative to the other. The press plate is disposed a distance from the surface of the work piece such that, when a cleaning fluid is disposed between the work piece and the press plate, the surface tension of the cleaning fluid maintains a meniscus between the work piece and the press plate. A mega-sonic transducer is coupled to the second surface of the press plate.

摘要翻译： 提供了用于清洁和干燥工件的方法和设备。 所述装置包括承载构造具有表面的工件的承载件。 该装置还包括具有第一表面和第二表面的压板。 在清洁过程中，载体，压板或两者被配置成相对于另一个移动。 压板与工件的表面设置一段距离，使得当清洁流体设置在工件和压板之间时，清洁流体的表面张力在工件和压板之间保持弯月面 。 超音速换能器耦合到压板的第二表面。

公开(公告)号：US20130015871A1

公开(公告)日：2013-01-17

申请号：US13542337

申请日：2012-07-05

申请人： Tim Cleary ,  Peter Hanaway ,  Eric Strid ,  David Leslie ,  Eric Hill ,  Ken Smith ,  K. Reed Gleason

发明人： Tim Cleary ,  Peter Hanaway ,  Eric Strid ,  David Leslie ,  Eric Hill ,  Ken Smith ,  K. Reed Gleason

IPC分类号： G01R31/28

CPC分类号： G01R31/2884 ,  G01R31/2887

摘要： Systems, devices, and methods for two-sided testing of electronic devices. These systems, devices, and methods may include the use of a test fixture that is configured to electrically connect a back side electrical pad of a device under test with an auxiliary pad that faces in a different direction than the back side electrical pad. Additionally or alternatively, these systems, devices, and methods also may include the use of a probe head that is configured to form an electrical connection with both the auxiliary pad and a front side electrical pad of the device under test. The systems, devices, and methods also may include providing a test signal to the device under test, receiving a resultant signal from the device under test, and/or analyzing the resultant signal.

摘要翻译： 用于电子设备双面测试的系统，设备和方法。 这些系统，装置和方法可以包括使用测试夹具，其被配置为将被测器件的背面电焊盘与面向不同于背面电焊盘的方向的辅助焊盘电连接。 附加地或替代地，这些系统，装置和方法还可以包括使用探针头，其被配置成与被测设备的辅助焊盘和前侧电焊盘形成电连接。 系统，设备和方法还可以包括向被测设备提供测试信号，从被测设备接收结果信号和/或分析所得到的信号。