公开(公告)号：US20120050749A1

公开(公告)日：2012-03-01

申请号：US13214645

申请日：2011-08-22

申请人： Xin Jia ,  Tingwen Xing

发明人： Xin Jia ,  Tingwen Xing

IPC分类号： G01B11/02

CPC分类号： G01B11/2441 ,  G01B9/02057 ,  G01B9/02083 ,  G01B11/306

摘要： Apparatus and methods for detecting optical profile are disclosed herein. In one embodiment, an apparatus includes a laser, a beam splitter, a collimation optical unit, first and second holders respectively holding a first test flat mirror and a second test flat mirror, a phase shifter connected with the first holder, and an angular measurement unit for measuring an angular error of the first test flat mirror and the second test flat mirror on the two holders. The first test flat mirror has a first test flat and the second test flat mirror has a second test flat. The apparatus further includes a planar imaging unit for generating the interfered test light having a direction generally along an x-axis direction of the first test flat and an x-axis direction of the second test flat and a convergence optical unit for projecting the interfered test light onto a detector.

摘要翻译： 本文公开了用于检测光学轮廓的装置和方法。 在一个实施例中，装置包括激光器，分束器，准直光学单元，分别保持第一测试平面镜和第二测试平面镜的第一和第二保持器，与第一保持器连接的移相器，以及角度测量 用于测量两个支架上的第一测试平面镜和第二测试平面镜的角度误差的单元。 第一测试平面镜具有第一测试平面，第二测试平面镜具有第二测试平面。 该装置还包括：平面成像单元，用于产生具有大致沿着第一测试平面的x轴方向的方向和第二测试平面的x轴方向的干涉测试光，以及用于投影干涉测试的会聚光学单元 光到探测器上。

公开(公告)号：US06330524B1

公开(公告)日：2001-12-11

申请号：US09269190

申请日：1999-05-20

申请人： Takatoshi Suzuki ,  Tingwen Xing

发明人： Takatoshi Suzuki ,  Tingwen Xing

IPC分类号： G01B1102

CPC分类号： G02B13/0005

摘要： The present invention has the object to make an fØ lens constituting a scanning optical system such as a laser printer, etc., which is of a single lens configuration, and higher in resolution, thereby providing the f&thgr; lens provided with a lens performance so as to correspond to an A3 paper size or the like. The f&thgr; lens is designed by the aspherical formula as follows: Z =   ⁢ C x ⁢ X 2 1 + 1 - ( 1 + K ) ⁢ C x 2 ⁢ X 2 + ∑ n = 3 u ⁢ A n ⁢ &LeftBracketingBar; X n &RightBracketingBar; +   ⁢ C y ⁢ Y 2 ⁡ ( 1 + ∑ m = 2 w ⁢ B m ⁢ &LeftBracketingBar; X m &RightBracketingBar; ) 1 + 1 - [ 1 + K y ⁡ ( 1 + ∑ j = 1 v ⁢ G j ⁢ X 2 ⁢ j ) ] ⁡ [ C y 2 ⁢ Y 2 ⁡ ( 1 + ∑ m = 2 w ⁢ B m ⁢ &LeftBracketingBar; X m &RightBracketingBar; ) 2 ] -   ⁢ C x = 1 / R x C y = 1 / R y where Cx, K, An, Cy, Bm, Ky, and Gj are each an optional coefficient; and u, v, and w are each an integer. The f&thgr; lens is further designed by using an optional term containing an odd-numbered degree and an even-numbered degree for each of &Sgr;An|Xn|, &Sgr;Bm|Xm|, and &Sgr;GjX2j in the aspherical formula representing a shape of each of an incident surface or an outgoing surface of the f&thgr; lens.

摘要翻译： 本发明的目的是使构成诸如激光打印机等的扫描光学系统的fθ透镜是单透镜结构，并且分辨率更高，从而提供了具有透镜性能的透镜性能， 以对应于A3纸张尺寸等。 ftheta透镜由非球面公式设计如下：其中Cx，K，An，Cy，Bm，Ky和Gj各自为可选系数; andu，v和w均为整数。通过使用对于SIGMAAn | Xn |，SIGMABm | Xm |和SIGMAGjX2j中的每一个包含奇数等级和偶数度的可选项，进一步设计ftata透镜 表示该透镜的入射面或出射面各自的形状的非球面式。

公开(公告)号：US08842292B2

公开(公告)日：2014-09-23

申请号：US13214645

申请日：2011-08-22

申请人： Xin Jia ,  Tingwen Xing

发明人： Xin Jia ,  Tingwen Xing

IPC分类号： G01B11/02 ,  G01B11/30 ,  G01B11/24 ,  G01B9/02

CPC分类号： G01B11/2441 ,  G01B9/02057 ,  G01B9/02083 ,  G01B11/306

摘要： Apparatus and methods for detecting optical profile are disclosed herein. In one embodiment, an apparatus includes a laser, a beam splitter, a collimation optical unit, first and second holders respectively holding a first test flat mirror and a second test flat mirror, a phase shifter connected with the first holder, and an angular measurement unit for measuring an angular error of the first test flat mirror and the second test flat mirror on the two holders. The first test flat mirror has a first test flat and the second test flat mirror has a second test flat. The apparatus further includes a planar imaging unit for generating the interfered test light having a direction generally along an x-axis direction of the first test flat and an x-axis direction of the second test flat and a convergence optical unit for projecting the interfered test light onto a detector.

摘要翻译： 本文公开了用于检测光学轮廓的装置和方法。 在一个实施例中，装置包括激光器，分束器，准直光学单元，分别保持第一测试平面镜和第二测试平面镜的第一和第二保持器，与第一保持器连接的移相器，以及角度测量 用于测量两个支架上的第一测试平面镜和第二测试平面镜的角度误差的单元。 第一测试平面镜具有第一测试平面，第二测试平面镜具有第二测试平面。 该装置还包括：平面成像单元，用于产生具有大致沿着第一测试平面的x轴方向的方向和第二测试平面的x轴方向的干涉测试光，以及用于投影干涉测试的会聚光学单元 光到探测器上。