摘要:
There is provided a plate-shaped member positioning apparatus comprising a conveyor for conveying a plate-shaped member, a positioner for contact with a front end of a conveyed plate-shaped member, a moving unit for moving the positioner along a conveyance direction of the plate-shaped member, and a controller for controlling operations of the conveyor and the moving unit; wherein the controller moves the plate-shaped member in the conveyance direction with the positioner kept in contact with the front end of the plate-shaped member, decelerates an advancing speed of the plate-shaped member and positions the plate-shaped member at a certain standby position.
摘要:
A projection exposure apparatus includes an optical element, and projects a pattern formed on a first object onto a second object to be exposed through a projection optical system for correcting imaging characteristics by controlling the optical element. The projection exposure apparatus includes: a displacement measurement unit configured to measure a displacement of the optical element; a storage unit configured to store a measurement criterion of the displacement measurement unit; an imaging characteristics measurement unit configured to measure imaging characteristics of the projection optical system; and a calibration unit configured to calibrate the measurement criterion based on a result of measurement by the imaging characteristics measurement unit.
摘要:
A stacked substrate separation loading apparatus includes: a stacked substrate holding holder configured to hold a stacked glass substrate; a cassette configured to load each sheet of glass substrates separated from the stacked glass substrate; a liquid tank in which the stacked substrate holding holder and the cassette are inserted in liquid; a stacked substrate drive unit configured to drive the stacked substrate holding holder; a stacked substrate positioning unit which positions a height position of the uppermost sheet of the stacked glass substrate; a cassette drive unit configured to drive the cassette; a substrate sliding mechanism configured to push out and separate the glass substrates which are the top sheets of the stacked glass substrate; and a cassette position control unit configured to control the cassette drive unit so that a height position of a loading position of the cassette becomes a height position of the glass substrate.
摘要:
A glass substrate spacer separating apparatus includes: a cassette adapted to load a plurality of glass substrates with spacers attached thereto in such a state that the plurality of glass substrates are separated piece by piece; a liquid tank adapted to store a liquid in which the cassette is to be submerged; and a bubble generating mechanism configured to generate bubbles which move towards an interior of the cassette which is submerged in the liquid of the liquid tank, wherein the spacers are separated individually from the plurality of glass substrates to which the spacers are attached by bringing the bubbles generated from the bubble generating mechanism into contact with surfaces of the plurality of glass substrates with spacers attached thereto which are loaded in the cassette in the liquid of the liquid tank.
摘要:
An abrasion brush in which a width of each of bristle implanting portions is 1.1 to 2.2 times a stack width of stacked glass substrates (a thickness of each of the glass substrates when the glass substrates are stacked without using a spacer. or a sum of the thickness of the glass substrates and a spacer when the glass substrates are stacked using spacers) is used for an inner periphery end surface polishing of a magnetic recording medium glass substrate. By performing the inner periphery end surface polishing using the abrasion brush, scratches remaining in a chamfering portion of the glass substrate can be removed reliably with a high productivity, and it is possible to provide the magnetic recording medium glass substrate without pit defects in the chamfering portion.
摘要:
A photoelectric smoke detector is capable of preventing an erroneous alarm from being issued even when steam flows into a smoke detecting unit. The smoke detecting unit includes: an installation section; and a smoke inlet section. The installation section includes: a light emitting element for emitting light to an inside of the installation section; and a light receiving element for receiving the light emitted from the light emitting element. The smoke inlet section includes: a plurality of wall members for preventing external light from entering the smoke inlet section; and a smoke inlet formed between the plurality of wall members. The installation section and the smoke inlet section are arranged so as to overlap each other, with the smoke inlet section being positioned on a lower side of the installation section, and are communicated with each other through an opening.
摘要:
Provided is a photoelectric smoke detector capable of preventing an erroneous alarm from being issued even when steam flows into a smoke detecting unit. The smoke detecting unit includes: an installation section; and a smoke inlet section. The installation section includes: a light emitting element for emitting light to an inside of the installation section; and a light receiving element for receiving the light emitted from the light emitting element. The smoke inlet section includes: a plurality of wall members for preventing external light from entering the smoke inlet section; and a smoke inlet formed between the plurality of wall members. The installation section and the smoke inlet section are arranged so as to overlap each other, with the smoke inlet section being positioned on a lower side of the installation section, and are communicated with each other through an opening.