公开(公告)号：US07375366B2

公开(公告)日：2008-05-20

申请号：US10204670

申请日：2001-02-22

申请人： Hiroshi Ohki ,  Tsunaki Tsunesada ,  Masao Urayama ,  Takashi Kyotani ,  Keitarou Matsui ,  Akira Tomita

发明人： Hiroshi Ohki ,  Tsunaki Tsunesada ,  Masao Urayama ,  Takashi Kyotani ,  Keitarou Matsui ,  Akira Tomita

IPC分类号： B82B1/00

CPC分类号： B82Y30/00 ,  B82Y10/00 ,  B82Y40/00 ,  C01B32/16 ,  H01J1/304 ,  H01J9/025 ,  H01J2201/30469 ,  H01J2329/00 ,  Y10S977/952 ,  Y10T428/249929 ,  Y10T428/2975

摘要： A carbon nanotube has a carbon network film of polycrystalline structure divided into crystal regions along the axis of the tube, and the length along the tube axis of each crystal region preferably ranges from 3 to 6 nm. An electron source includes a carbon nanotube having a cylindrical shape and the end of which on the substrate side is closed and disposed in a fine hole. The end on the substrate side of the tube is firmly adhered to the substrate. The carbon nanotube is produced by a method in which carbon is deposited under the condition that no metal catalyst is present in the fine hole and produced by a method in which after the carbon deposition the end of the carbon deposition film is modified by etching the carbon deposition film using a plasma. Therefore, an electron source excellent in the evenness of field emission characteristics in a field emission region (pixel) in the device plane and driven with low voltage can be provided, and a display operated with ultralow power consumption exhibiting ultrahigh luminance can be provided.

摘要翻译： 碳纳米管具有沿着管轴分成晶体区域的多晶结构的碳网膜，并且沿着各晶体区域的管轴的长度优选为3〜6nm。 电子源包括具有圆筒形状的碳纳米管，其基底侧的端部封闭并设置在细孔中。 管的衬底侧的端部牢固地粘附到衬底上。 碳纳米管是通过在细孔中不存在金属催化剂的条件下沉积碳的方法制造的，其方法是通过碳沉积后，通过蚀刻碳来改变碳沉积膜的端部 使用等离子体的沉积膜。 因此，可以提供在器件平面中的场发射区域（像素）中的场发射特性的均匀性优异的电子源，并且以低电压驱动，并且可以提供以超高亮度显示的超低功耗的显示器。