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公开(公告)号：US5570994A
公开(公告)日：1996-11-05
申请号：US438329
申请日：1995-05-10
IPC分类号： B65G49/07 , H01L21/677 , H01L21/683 , B65G65/00
CPC分类号： H01L21/6838 , H01L21/67742 , H01L21/67748 , Y10S294/907 , Y10S414/137 , Y10S414/139 , Y10S414/141
摘要： A semiconductor wafer processing system for processing wafers from a wafer storage cassette includes a wafer transfer chamber; a wafer storage elevator within the transfer chamber; one or more wafer processing chambers; and a wafer transfer apparatus for transferring a wafer between a standard storage cassette adjacent and outside the transfer chamber and the elevator, and between the elevator and the processing chamber. The storage chamber pressure varies between atmospheric when accepting wafers from outside, and a subatmospheric pressure when transferring wafers to or from a processing chamber. The transfer apparatus includes a robot arm; a thin flat wafer carrying blade at the leading end of the robot arm configured for engaging a wafer from the storage cassette or the elevator; and a wafer support tray configured for removable engagement with the blade and for engaging and positively positioning a wafer from the elevator, or a support pedestal within a processing chamber. When the transfer apparatus moves a wafer between the elevator and a processing chamber in an evacuated environment, the tray is engaged with the blade and helps retain the wafer during transit. When wafers are transferred between the cassette and the elevator at atmospheric pressure the tray is disengaged from the blade and placed in a rest position on the elevator, and the wafer transfer is performed by means of the blade alone with a vacuum pick integral to the blade. The blade includes upper and lower halves together defining vacuum channels and capacitive position sensors.
摘要翻译： 用于从晶片存储盒处理晶片的半导体晶片处理系统包括：晶片传送室; 传送室内的晶片存储电梯; 一个或多个晶片处理室; 以及晶片传送装置，用于在与传送室和电梯之间以及电梯和处理室之间的标准存储盒之间传送晶片。 当从外部接收晶片时，储存室压力在大气压之间变化，并且在将晶片转移到处理室或从处理室转移时的低于大气压。 传送装置包括机器人臂; 在所述机器人臂的前端处的薄平板晶片承载叶片，其被配置用于从所述存储盒或电梯接合晶片; 以及晶片支撑托盘，其构造成用于与所述刀片可拆卸地接合并且用于从所述电梯或处理腔室内的支撑座接合和积极地定位晶片。 当传送装置在真空环境中在电梯和处理室之间移动晶片时，托盘与刀片接合并有助于在运输过程中保持晶片。 当晶片在大气压下在盒和电梯之间转移时，托盘与叶片脱离并放置在电梯上的静止位置，并且通过单独的叶片执行晶片传送，该真空拾取器与叶片成一整体 。 叶片包括一起限定真空通道和电容位置传感器的上半部和下半部。
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公开(公告)号：US4739882A
公开(公告)日：1988-04-26
申请号：US829447
申请日：1986-02-13
IPC分类号： H01L21/673 , H01L21/677 , B65D1/04
CPC分类号： H01L21/67369 , H01L21/67373 , H01L21/67772 , Y10S414/14
摘要： The present invention is a transportable container for storing articles and maintaining a clean article, such as semiconductor wafers, clean. The container provides a box which defines an interior space for containing the articles. The box includes a box top and box base which supports the box top and includes a box door for opening and closing the container. The box door provide a region for supporting the articles in the interior space. A liner is insertable into the interior space and surrounds the region. The box door is retractable from the box space. The articles in the region are retractable with the box door.
摘要翻译： 本发明是用于储存物品并保持诸如半导体晶片的清洁物品的可运送的容器。 容器提供了一个盒子，它定义了用于容纳物品的内部空间。 箱子包括一个箱顶和盒底座，它支撑箱顶，并且包括用于打开和关闭容器的箱门。 箱门提供用于支撑内部空间中的物品的区域。 衬里可插入内部空间并围绕该区域。 箱门可从盒子空间伸缩。 该区域的物品可与箱门一起缩回。
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公开(公告)号：US4674939A
公开(公告)日：1987-06-23
申请号：US635384
申请日：1984-07-30
IPC分类号： B65G65/00 , B65D85/86 , B65G49/07 , H01L21/67 , H01L21/673 , H01L21/677 , B65B69/00 , B65G65/34
CPC分类号： H01L21/67772 , H01L21/67775 , Y10S414/139 , Y10S414/14
摘要： The present invention is an apparatus for maintaining articles, such as semiconductor wafers clean. The wafers or other articles to be processed are placed in a box having first and second regions for making first and second seals. A box door seals the articles into the box. The box has a second region for making the second seal and has a third region for making a third seal. The box is used to transport the wafers to a port in the canopy of the processing equipment. The port is adapted for receiving the box and box door and for transferring the box door and the contents of the box into a region beneath the canopy. The canopy has a first region for making the first seal with the box. Also, the canopy has a fourth region surrounding the port for making a fourth seal. A port door is provided for closing the canopy port when no box is present. The port door has a second region for making the second seal with the box and has a fourth region for making the fourth seal with the canopy. A box door latch is provided for latching the box door to the box whereby the second seal is made and released in the second region between the box door and the box by operation of the box door latch. A box latch is provided for latching the box to the canopy whereby the first seal is made or released in the first region between the box and the canopy by the operation of the box latch.
摘要翻译： 本发明是用于保持诸如半导体晶片清洁的物品的装置。 待处理的晶片或其它制品被放置在具有用于制造第一和第二密封件的第一和第二区域的盒中。 箱门将物品密封在箱子中。 该盒具有用于制造第二密封件的第二区域，并且具有用于进行第三密封的第三区域。 该盒用于将晶片运送到加工设备的顶盖中的端口。 该端口适用于接收箱和箱门，并将箱门和箱体的内容物转移到机盖下方的区域。 顶盖有一个第一个区域，用于与箱子进行第一次密封。 另外，盖子还有一个第四个区域围绕着港口进行第四次密封。 当没有盒子时，提供一个端口门用于关闭天篷端口。 端口门具有用于与箱体进行第二密封的第二区域，并且具有用于与顶盖进行第四密封的第四区域。 提供了一个盒门闩，用于将盒门锁定到箱体，由此第二密封件通过箱门闩锁的操作在箱门和箱体之间的第二区域中被制成和释放。 提供盒闩锁以将盒子锁定到罩盖上，由此通过盒闩锁的操作在盒和罩盖之间的第一区域中制造或释放第一密封件。
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公开(公告)号：US5697748A
公开(公告)日：1997-12-16
申请号：US205711
申请日：1994-03-03
IPC分类号： H01L21/677 , H01L21/683 , B65G65/00
CPC分类号： H01L21/67748 , H01L21/67739 , H01L21/6838 , Y10S414/137
摘要： A semiconductor wafer processing system for processing wafers from a wafer storage cassette includes a wafer transfer chamber; a wafer storage elevator within the transfer chamber; one or more wafer processing chambers; and a wafer transfer apparatus for transferring a wafer between a standard storage cassette adjacent and outside the transfer chamber and the elevator, and between the elevator and the processing chamber. The storage chamber pressure varies between atmospheric when accepting wafers from outside, and a subatmospheric pressure when transferring wafers to or from a processing chamber. The transfer apparatus includes a robot arm; a thin flat wafer carrying blade at the leading end of the robot arm configured for engaging a wafer from the storage cassette or the elevator; and a wafer support tray configured for removable engagement with the blade and for engaging and positively positioning a wafer from the elevator, or a support pedestal within a processing chamber. When the transfer apparatus moves a wafer between the elevator and a processing chamber in an evacuated environment, the tray is engaged with the blade and helps retain the wafer during transit. When wafers are transferred between the cassette and the elevator at atmospheric pressure the tray is disengaged from the blade and placed in a rest position on the elevator, and the wafer transfer is performed by means of the blade alone with a vacuum pick integral to the blade. The blade includes upper and lower halves together defining vacuum channels and capacitive position sensors.
摘要翻译： 用于从晶片存储盒处理晶片的半导体晶片处理系统包括：晶片传送室; 传送室内的晶片存储电梯; 一个或多个晶片处理室; 以及晶片传送装置，用于在与传送室和电梯之间以及电梯和处理室之间的标准存储盒之间传送晶片。 当从外部接收晶片时，储存室压力在大气压之间变化，并且在将晶片转移到处理室或从处理室转移时的低于大气压。 传送装置包括机器人臂; 在所述机器人臂的前端处的薄平板晶片承载叶片，其被配置用于从所述存储盒或电梯接合晶片; 以及晶片支撑托盘，其构造成用于与所述刀片可拆卸地接合并且用于从所述电梯或处理腔室内的支撑座接合和积极地定位晶片。 当传送装置在真空环境中在电梯和处理室之间移动晶片时，托盘与刀片接合并有助于在运输过程中保持晶片。 当晶片在大气压下在盒和电梯之间转移时，托盘与叶片脱离并放置在电梯上的静止位置，并且通过单独的叶片执行晶片传送，该真空拾取器与叶片成一整体 。 叶片包括一起限定真空通道和电容位置传感器的上半部和下半部。
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公开(公告)号：US5636964A
公开(公告)日：1997-06-10
申请号：US438670
申请日：1995-05-10
IPC分类号： B65G49/07 , H01L21/677 , H01L21/683 , B65G65/00
CPC分类号： H01L21/6838 , H01L21/67742 , H01L21/67748 , Y10S294/907 , Y10S414/137 , Y10S414/139 , Y10S414/141
摘要： A semiconductor wafer processing system for processing wafers from a wafer storage cassette includes a wafer transfer chamber; a wafer storage elevator within the transfer chamber; one or more wafer processing chambers; and a wafer transfer apparatus for transferring a wafer between a standard storage cassette adjacent and outside the transfer chamber and the elevator, and between the elevator and the processing chamber. The storage chamber pressure varies between atmospheric when accepting wafers from outside, and a subatmospheric pressure when transferring wafers to or from a processing chamber. The transfer apparatus includes a robot arm; a thin flat wafer carrying blade at the leading end of the robot arm configured for engaging a wafer from the storage cassette or the elevator; and a wafer support tray configured for removable engagement with the blade and for engaging and positively positioning a wafer from the elevator, or a support pedestal within a processing chamber. When the transfer apparatus moves a wafer between the elevator and a processing chamber in an evacuated enviroment, the tray is engaged with the blade and helps retain the wafer during transit. When wafers are transferred between the cassette and the elevator at atmospheric pressure the tray is disengaged from the blade and placed in a rest position on the elevator, and the wafer transfer is performed by means of the blade alone with a vacuum pick integral to the blade. The blade includes upper and lower halves together defining vacuum channels and capacitive position sensors.
摘要翻译： 用于从晶片存储盒处理晶片的半导体晶片处理系统包括：晶片传送室; 传送室内的晶片存储电梯; 一个或多个晶片处理室; 以及晶片传送装置，用于在与传送室和电梯之间以及电梯和处理室之间的标准存储盒之间传送晶片。 当从外部接收晶片时，储存室压力在大气压之间变化，并且在将晶片转移到处理室或从处理室转移时的低于大气压。 传送装置包括机器人臂; 在所述机器人臂的前端处的薄平板晶片承载叶片，其被配置用于从所述存储盒或电梯接合晶片; 以及晶片支撑托盘，其构造成用于与所述刀片可拆卸地接合并且用于从所述电梯或处理腔室内的支撑座接合和积极地定位晶片。 当传送装置在电梯和处理室之间移动晶片在真空环境中时，托盘与刀片接合并有助于在运输过程中保持晶片。 当晶片在大气压下在盒和电梯之间转移时，托盘与叶片脱离并放置在电梯上的静止位置，并且通过单独的叶片执行晶片传送，该真空拾取器与叶片成一整体 。 叶片包括一起限定真空通道和电容位置传感器的上半部和下半部。
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公开(公告)号：US5556147A
公开(公告)日：1996-09-17
申请号：US438328
申请日：1995-05-10
IPC分类号： B65G49/07 , H01L21/677 , H01L21/683 , B25J15/06
CPC分类号： H01L21/6838 , H01L21/67742 , H01L21/67748 , Y10S294/907 , Y10S414/137 , Y10S414/139 , Y10S414/141
摘要： A semiconductor wafer processing system for processing wafers from a wafer storage cassette includes a wafer transfer chamber; a wafer storage elevator within the transfer chamber; one or more wafer processing chambers; and a wafer transfer apparatus for transferring a wafer between a standard storage cassette adjacent and outside the transfer chamber and the elevator, and between the elevator and the processing chamber. The environment of the storage chamber varies in pressure between atmospheric when accepting wafers from outside, and a subatmospheric pressure when transferring wafers to or from a processing chamber. The transfer apparatus includes a robot arm; a thin flat wafer carrying blade at the leading end of the robot arm and configured for engaging a wafer from the storage cassette or the elevator; and a wafer support tray which is configured for removable engagement with the blade and for engaging and positively positioning a wafer from the elevator, or a support pedestal within a processing chamber. When the transfer apparatus moves a wafer between the elevator and a processing chamber in an evacuated environment, the tray is engaged with the blade and helps retain the wafer during transit. When wafers are transferred between the cassette and the elevator at atmospheric pressure the tray is disengaged from the blade and placed in a rest position on the elevator, and the wafer transfer is performed by means of the blade alone with a vacuum pick integral to the blade. The blade includes upper and lower halves together defining vacuum channels and capacitive position sensors.
摘要翻译： 用于从晶片存储盒处理晶片的半导体晶片处理系统包括：晶片传送室; 传送室内的晶片存储电梯; 一个或多个晶片处理室; 以及晶片传送装置，用于在与传送室和电梯之间以及电梯和处理室之间的标准存储盒之间传送晶片。 当从外部接收晶片时，储存室的环境在大气压之间变化，并且在将晶片转移到处理室或从处理室转移时的低于大气压。 传送装置包括机器人臂; 在所述机器人臂的前端处的薄平板晶片承载叶片，并且构造成用于从所述存储盒或电梯接合晶片; 以及晶片支撑托盘，其构造成用于与所述刀片可移除接合，并且用于接合并且将来自所述升降机的晶片或将处理室内的支撑基座正确地定位。 当传送装置在真空环境中在电梯和处理室之间移动晶片时，托盘与刀片接合并有助于在运输过程中保持晶片。 当晶片在大气压下在盒和电梯之间转移时，托盘与叶片脱离并放置在电梯上的静止位置，并且通过单独的叶片执行晶片传送，该真空拾取器与叶片成一整体 。 叶片包括一起限定真空通道和电容位置传感器的上半部和下半部。
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公开(公告)号：US4815912A
公开(公告)日：1989-03-28
申请号：US686443
申请日：1984-12-24
申请人： George A. Maney , W. George Faraco , Mihir Parikh
发明人： George A. Maney , W. George Faraco , Mihir Parikh
IPC分类号： H01L21/677 , B65B1/04
CPC分类号： H01L21/67772 , Y10S414/139 , Y10S414/14
摘要： A transportable container for articles to be processed, for use with a passage elevator for passing the articles between locations, is provided which comprises: a box defining a box opening; a box door for being received by the box opening; a cassette for holding the articles, the cassette supported by the box door and sized for passage through the box opening, the passage elevator passing the cassette through the box opening; a retainer, extending adjacent to the cassette, for substantially retaining the articles held by the cassette, the retainer being movably coupled to the box such that the retainer can move in a direction substantially transverse to a direction of movement of the holder substantially during a passage of the cassette through the box opening.
摘要翻译： 提供了一种用于待处理物品的可运输容器，用于在位置之间使物品通过的通道电梯，其包括：限定箱形开口的箱; 一个盒子门被盒子开口收到; 用于保持物品的盒子，由盒门支撑并且尺寸设置成通过盒子开口的盒子，通道电梯将盒子通过盒子开口; 保持器，其邻近所述盒延伸，用于基本上保持由所述盒保持的物品，所述保持器可移动地联接到所述盒，使得所述保持器可以在基本上在通过期间基本上横向于所述保持器的运动方向的方向移动 通过盒子开口的盒子。
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