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公开(公告)号：US5243665A
公开(公告)日：1993-09-07
申请号：US826197
申请日：1992-01-22
申请人： George A. Maney , Elizabeth A. Downing , Christian Fortunel , Donald J. Christian , Melvin H. Lill
发明人： George A. Maney , Elizabeth A. Downing , Christian Fortunel , Donald J. Christian , Melvin H. Lill
CPC分类号： H01L21/67259 , H01L21/67242 , H05K13/08
摘要： A system is disclosed which operates to collect high resolution three-dimensional surface mesh data from mechanical components which are used for component evaluation. The system includes a multidimensionally movable fixture mount for holding the mechanical components. A structured light pattern emitting projector is provided together with an image sensing camera for detecting impingement of the light pattern on the mechanical component and for generating the surface data. A set of software tools analyzes the data to provide numerical or quantitative component analysis and further presents the data in display form to allow intuitive or qualitative analysis for product and process improvement.
摘要翻译： 公开了一种用于从用于部件评估的机械部件收集高分辨率三维表面网格数据的系统。 该系统包括用于保持机械部件的多维可移动夹具安装座。 一种结构化的光图案发射投影仪与用于检测光图案在机械部件上的撞击并用于产生表面数据的图像感测相机一起提供。 一组软件工具分析数据以提供数值或定量分量分析，并进一步以显示形式呈现数据，以便对产品和过程改进进行直观或定性分析。
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公开(公告)号：US5097421A
公开(公告)日：1992-03-17
申请号：US54212
申请日：1987-05-18
IPC分类号： B65G43/00 , G03F7/20 , G05B15/02 , H01L21/02 , H01L21/027 , H01L21/304 , H01L21/673 , H01L21/677
CPC分类号： H01L21/67294 , G03F7/70541 , G03F7/7075 , G03F7/70991
摘要： Disclosed is a system mounted with a transportable container for carrying articles such as semiconductor wafers which comprises a non-volatile memory used to store the identity, status and history of the articles in the container. Further, the system includes means for transmitting data from the memory to an information processor associated with a processing station which processes the articles in a carrier. In a preferred embodiment, the system includes data processing capability and both receives data from and transmits data to the processing station.
摘要翻译： 公开了一种系统，其安装有用于承载诸如半导体晶片的物品的可运输容器，该系统包括用于存储容器中物品的身份，状态和历史的非易失性存储器。 此外，该系统包括用于将数据从存储器传送到与处理载体中的物品的处理站相关联的信息处理器的装置。 在优选实施例中，该系统包括数据处理能力，并且都从数据处理站接收数据并传输数据。
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公开(公告)号：US5166884A
公开(公告)日：1992-11-24
申请号：US797714
申请日：1991-11-25
IPC分类号： G03F7/20 , H01L21/673
CPC分类号： H01L21/67294 , G03F7/70541 , G03F7/7075 , G03F7/70991
摘要： A system mounted with a transportable container for carrying articles such as semiconductor wafers which comprises a non-volatile memory used to store the identity, status and history of the articles in the container. Further, the system includes means for transmitting data from the memory to an information processor associated with a processing station which processes the articles in a carrier. In a preferred embodiment, the system includes data processing capability and both receives data from and transmits data to the processing station.
摘要翻译： 一种安装有用于携带诸如半导体晶片的物品的可移动容器的系统，其包括用于存储容器中物品的身份，状态和历史的非易失性存储器。 此外，该系统包括用于将数据从存储器传送到与处理载体中的物品的处理站相关联的信息处理器的装置。 在优选实施例中，该系统包括数据处理能力，并且都从数据处理站接收数据并传输数据。
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公开(公告)号：US4614971A
公开(公告)日：1986-09-30
申请号：US455658
申请日：1983-01-05
CPC分类号： H04N7/0882
摘要： A system is disclosed for eliminating error in teletext signals caused by the presence of noise accompanying the teletext signals. The system includes: (1) a teletext packet buffer which receives the teletext signal and transfers the teletext signals to a teletext decoder in the absence of noise accompanying the teletext signals; (2) a timing circuit which produces timing signals from television synchronous signals; (3) a control circuit which controls the teletext packet buffer in response to the timing signals; and (4) a noise detector which detects whether noise is present in the teletext signal and disables the teletext packet buffer to prevent the transfer of the teletext signal from the teletext packet buffer to the teletext decoder if the teletext signal was received in the presence of noise.
摘要翻译： 公开了一种用于消除伴随图文电视信号的噪声的存在引起的图文电视信号误差的系统。 该系统包括：（1）在没有伴随图文电视信号的噪声的情况下，接收文字多重信号并将图文电视信号传送到图文解码器的图文包分组缓冲器; （2）产生来自电视同步信号的定时信号的定时电路; （3）响应于定时信号控制图文包的缓冲器的控制电路; 以及（4）噪声检测器，其检测图文电视信号中是否存在噪声，并且禁用图文电视包缓冲器，以防止在图文电视信号是否存在下接收图文电视信号时，图文电视信号从图文电视包缓冲器传送到图文电视解码器 噪声。
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公开(公告)号：US4974166A
公开(公告)日：1990-11-27
申请号：US458767
申请日：1989-12-29
IPC分类号： B23Q41/00 , B23Q41/02 , B65G1/137 , B65G49/07 , B65G61/00 , G03F7/20 , G05B19/418 , G06Q50/00 , H01L21/00 , H01L21/02 , H01L21/673 , H01L21/677
CPC分类号： H01L21/67294 , G03F7/70525 , G03F7/70541 , G03F7/7075 , G03F7/70991 , G05B19/4183 , H01L21/67276 , G05B2219/31002 , G05B2219/31286 , G05B2219/31323 , G05B2219/31432 , Y02P90/08 , Y02P90/10 , Y02P90/24 , Y02P90/28 , Y02P90/285
摘要： A system for storing transporting and processing articles includes a plurality of transportable containers, each transportable container having an interior region adapted to receive a plurality of articles and data processing device provided on the transportable container for receiving, storing, transmitting and displaying information related to the articles received by the corresponding transportable container. A plurality of workstations are adapted to receive one of the transportable containers and to process selected ones of the articles. The workstation also verifies that at least one of the articles in the transportable container has arrived at the appropriate workstation and communicates with a central processing unit to receive and transmit status information and processing information, and to transmit information stored by the data processing device provided on the transportable container. The system may also include a storage station for receiving said transportable container, for providing communication between the data processing devices provided on the transportable container and the central processing unit, and for making a backup copy of the information stored by said data processing device.
摘要翻译： 用于存储运输和处理物品的系统包括多个可运输容器，每个可运输容器具有适于容纳多个物品的内部区域和设置在可运输容器上的数据处理装置，用于接收，存储，传送和显示与 由相应的运输容器收到的物品。 多个工作站适于接收可移动容器中的一个并处理所选物品中的一个。 工作站还验证可运输容器中的至少一个物品已经到达适当的工作站并与中央处理单元通信以接收和发送状态信息和处理信息，并且传送由提供的数据处理装置存储的信息 运输容器。 该系统还可以包括用于接收所述可移动容器的存储站，用于提供在可运输容器上提供的数据处理设备与中央处理单元之间的通信，以及用于制作由所述数据处理设备存储的信息的备份副本。
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公开(公告)号：US4674939A
公开(公告)日：1987-06-23
申请号：US635384
申请日：1984-07-30
IPC分类号： B65G65/00 , B65D85/86 , B65G49/07 , H01L21/67 , H01L21/673 , H01L21/677 , B65B69/00 , B65G65/34
CPC分类号： H01L21/67772 , H01L21/67775 , Y10S414/139 , Y10S414/14
摘要： The present invention is an apparatus for maintaining articles, such as semiconductor wafers clean. The wafers or other articles to be processed are placed in a box having first and second regions for making first and second seals. A box door seals the articles into the box. The box has a second region for making the second seal and has a third region for making a third seal. The box is used to transport the wafers to a port in the canopy of the processing equipment. The port is adapted for receiving the box and box door and for transferring the box door and the contents of the box into a region beneath the canopy. The canopy has a first region for making the first seal with the box. Also, the canopy has a fourth region surrounding the port for making a fourth seal. A port door is provided for closing the canopy port when no box is present. The port door has a second region for making the second seal with the box and has a fourth region for making the fourth seal with the canopy. A box door latch is provided for latching the box door to the box whereby the second seal is made and released in the second region between the box door and the box by operation of the box door latch. A box latch is provided for latching the box to the canopy whereby the first seal is made or released in the first region between the box and the canopy by the operation of the box latch.
摘要翻译： 本发明是用于保持诸如半导体晶片清洁的物品的装置。 待处理的晶片或其它制品被放置在具有用于制造第一和第二密封件的第一和第二区域的盒中。 箱门将物品密封在箱子中。 该盒具有用于制造第二密封件的第二区域，并且具有用于进行第三密封的第三区域。 该盒用于将晶片运送到加工设备的顶盖中的端口。 该端口适用于接收箱和箱门，并将箱门和箱体的内容物转移到机盖下方的区域。 顶盖有一个第一个区域，用于与箱子进行第一次密封。 另外，盖子还有一个第四个区域围绕着港口进行第四次密封。 当没有盒子时，提供一个端口门用于关闭天篷端口。 端口门具有用于与箱体进行第二密封的第二区域，并且具有用于与顶盖进行第四密封的第四区域。 提供了一个盒门闩，用于将盒门锁定到箱体，由此第二密封件通过箱门闩锁的操作在箱门和箱体之间的第二区域中被制成和释放。 提供盒闩锁以将盒子锁定到罩盖上，由此通过盒闩锁的操作在盒和罩盖之间的第一区域中制造或释放第一密封件。
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公开(公告)号：US4815912A
公开(公告)日：1989-03-28
申请号：US686443
申请日：1984-12-24
申请人： George A. Maney , W. George Faraco , Mihir Parikh
发明人： George A. Maney , W. George Faraco , Mihir Parikh
IPC分类号： H01L21/677 , B65B1/04
CPC分类号： H01L21/67772 , Y10S414/139 , Y10S414/14
摘要： A transportable container for articles to be processed, for use with a passage elevator for passing the articles between locations, is provided which comprises: a box defining a box opening; a box door for being received by the box opening; a cassette for holding the articles, the cassette supported by the box door and sized for passage through the box opening, the passage elevator passing the cassette through the box opening; a retainer, extending adjacent to the cassette, for substantially retaining the articles held by the cassette, the retainer being movably coupled to the box such that the retainer can move in a direction substantially transverse to a direction of movement of the holder substantially during a passage of the cassette through the box opening.
摘要翻译： 提供了一种用于待处理物品的可运输容器，用于在位置之间使物品通过的通道电梯，其包括：限定箱形开口的箱; 一个盒子门被盒子开口收到; 用于保持物品的盒子，由盒门支撑并且尺寸设置成通过盒子开口的盒子，通道电梯将盒子通过盒子开口; 保持器，其邻近所述盒延伸，用于基本上保持由所述盒保持的物品，所述保持器可移动地联接到所述盒，使得所述保持器可以在基本上在通过期间基本上横向于所述保持器的运动方向的方向移动 通过盒子开口的盒子。
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