公开(公告)号：US2858747A

公开(公告)日：1958-11-04

申请号：US56396856

申请日：1956-02-07

申请人： ERNST WAGNER RUDOLF

发明人： ERNST WAGNER RUDOLF

IPC分类号： D21F3/02

CPC分类号： D21F3/0272

公开(公告)号：US1669029A

公开(公告)日：1928-05-08

申请号：US21330727

申请日：1927-08-16

申请人： ERNST WAGNER RUDOLF

发明人： ERNST WAGNER RUDOLF

IPC分类号： D21D5/06

CPC分类号： D21D5/06

公开(公告)号：US5090900A

公开(公告)日：1992-02-25

申请号：US577462

申请日：1990-09-04

申请人： Wagner Rudolf ,  Martin Bader ,  Eberhard Moll ,  Renzo Zanardo ,  J. G. Van Agtmaal

发明人： Wagner Rudolf ,  Martin Bader ,  Eberhard Moll ,  Renzo Zanardo ,  J. G. Van Agtmaal

IPC分类号： B05C11/08 ,  B05C13/00 ,  B65G49/00 ,  B65G49/07 ,  H01L21/00 ,  H01L21/205 ,  H01L21/3065 ,  H01L21/677 ,  H01L21/687

CPC分类号： H01L21/67167 ,  H01L21/6719 ,  H01L21/68707 ,  Y10S414/135 ,  Y10S414/137 ,  Y10S414/139

摘要： A workpiece support for supporting a disc-shaped workpiece in a vacuum chamber, comprises a support member with a support surface for carrying the workpiece. A plurality of bores extend from the support surface and through the support member. The bores communicate with a distribution chamber defined on a side of the support member which is opposite from the support surface. The distribution chamber is substantially co-extensive with the support surface and is connected to a gas feed line for supplying gas to the distribution chamber. The bores each have respective diameters which are substantially shorter than their respective lengths through the support member. In this way, gas supplied through the bores from the distribution chamber is distributed between the support surface and the workpiece as a heat transfer medium which is substantially independent from the gas flow at an inlet of each bore in the distribution chamber.

公开(公告)号：US1007405A

公开(公告)日：1911-10-31

申请号：US1909493723

申请日：1909-05-03

申请人： WAGNER RUDOLF ,  RADINGER CARL VON

发明人： WAGNER RUDOLF ,  RADINGER CARL VON

CPC分类号： B64B1/00