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公开(公告)号：US07015468B1
公开(公告)日：2006-03-21
申请号：US10807899
申请日：2004-03-24
申请人： Amir Azordegan , Gian Francesco Lorusso , Ananthanarayanan Mohan , Mark Neil , Waiman Ng , Srini Vedula
发明人： Amir Azordegan , Gian Francesco Lorusso , Ananthanarayanan Mohan , Mark Neil , Waiman Ng , Srini Vedula
IPC分类号： H01J37/26 , G01N23/225
CPC分类号： G03F7/70625 , H01J2237/2067 , H01J2237/2817
摘要： A method of improving stability for CD-SEM measurements of photoresist, in particular 193 nm photoresist, and of reducing shrinkage of 193 nm photoresist during CD-SEM measurements.The photoresist is exposed to a dose of electrons or other stabilizing beam prior to or during CD measurement. One embodiment of the invention includes multiplexing of the SEM electron beam.
摘要翻译： 提高光刻胶，特别是193nm光致抗蚀剂的CD-SEM测量的稳定性的方法，以及在CD-SEM测量期间减小193nm光致抗蚀剂的收缩的方法。 在CD测量之前或期间，光致抗蚀剂暴露于一定量的电子或其他稳定光束。 本发明的一个实施例包括SEM电子束的多路复用。
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公开(公告)号：US06570154B1
公开(公告)日：2003-05-27
申请号：US09786137
申请日：2001-06-11
IPC分类号： H01J37244
CPC分类号： H01J37/28
摘要： A method and apparatus for generating an image of a specimen with a scanning electron microscope (SEM) is disclosed. The SEM (200) has a source unit (202 through 220) for directing an electron beam (203) substantially towards a portion of the specimen (222), a detector (224) for detecting particles (205) that are emitted from the specimen (222), and an image generator (234 through 242) for generating the image of the specimen (222) from the emitted particles (205). The image features are controlled by conditions under which the image is generated. The specimen is scanned under a first set of conditions (252) to generate a first image during a first image phase (302, 402). The specimen is then scanned under a second set conditions (254) during a setup phase (304, 404). The second set of conditions is selected to control charge on the specimen. The specimen is then scanned under the first set of conditions (252) to generate a second image during a second image phase (306, 406). The features of the second image are controlled by the first and second sets of conditions.
摘要翻译： 公开了一种用扫描电子显微镜（SEM）产生样本图像的方法和装置。 扫描电子显微镜（200）具有源单元（202至220），用于基本上朝向样本（222）的一部分引导电子束（203）;检测器（224），用于检测从样本发射的颗粒（205） （222），以及用于从所发射的颗粒（205）产生样本（222）的图像的图像发生器（234至242）。 图像特征由生成图像的条件控制。 在第一组条件（252）下扫描样本，以在第一图像相位期间产生第一图像（302,402）。 然后在设置阶段（304,404）期间，在第二设定条件（254）下扫描样本。 选择第二组条件来控制样品上的电荷。 然后在第一组条件（252）下扫描样本，以在第二图像相位期间产生第二图像（306,406）。 第二图像的特征由第一和第二组条件控制。
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公开(公告)号：US6066849A
公开(公告)日：2000-05-23
申请号：US149767
申请日：1998-09-08
IPC分类号： H01L21/66 , H01J37/20 , H01J37/22 , H01J37/248 , H01J37/28 , H01J37/244
CPC分类号： H01J37/28 , H01J2237/004 , H01J2237/2817
摘要： A method and apparatus for generating an image of a specimen with a scanning electron microscope (SEM) is disclosed. The SEM has a source unit for directing an electron beam substantially towards a portion of the specimen, a detector for detecting particles that are emitted from the specimen, and an image generator for generating the image of the specimen from the emitted particles. The image features are controlled by conditions under which the image is generated. The specimen is scanned under a first set of conditions to generate a first image during a first image phase. The specimen is then scanned under a second set of conditions during a setup phase. The second set of conditions are selected to control charge on the specimen. The specimen is then scanned under the first set of conditions to generate a second image during a second image phase. The features of the second image are controlled by the first and second sets of conditions.
摘要翻译： 公开了一种用扫描电子显微镜（SEM）产生样本图像的方法和装置。 SEM具有用于将电子束基本上朝向样本的一部分引导的源单元，用于检测从样本发射的颗粒的检测器，以及用于从所发射的颗粒产生样本的图像的图像发生器。 图像特征由生成图像的条件控制。 在第一组条件下扫描样本以在第一图像阶段期间产生第一图像。 然后在设置阶段，在第二组条件下扫描样品。 选择第二组条件来控制样品上的电荷。 然后在第一组条件下扫描样品，以在第二图像阶段期间产生第二图像。 第二图像的特征由第一和第二组条件控制。
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