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公开(公告)号:US5414458A
公开(公告)日:1995-05-09
申请号:US43333
申请日:1993-04-06
申请人: Charles K. Harris , Joseph F. Borchard , Robert H. Clunn , James R. Maunder , Walter E. Marrable
发明人: Charles K. Harris , Joseph F. Borchard , Robert H. Clunn , James R. Maunder , Walter E. Marrable
CPC分类号: G02B27/1066 , G02B13/08 , G02B27/144 , G02B3/06 , H04N7/18 , H05K13/08
摘要: An inspection system utilizes an image doubler design that includes a plurality of mirrors that effectively folds the object distance by reflecting the image along a folded path. Strobed illumination is used in conjunction with a shutterless camera. Increased image resolution results from an optional anamorphic lens with vertical magnification. The lens assembly includes concentric toroidal lens that are produced from a single piece of machineable optical material.
摘要翻译: 检查系统利用图像倍增器设计,其包括通过沿折叠路径反射图像而有效地折叠物体距离的多个反射镜。 连拍照明与无门镜相结合使用。 增加的图像分辨率来自可选的垂直放大变形镜头。 透镜组件包括由单片可加工光学材料制成的同心环形透镜。
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2.
公开(公告)号:US5621530A
公开(公告)日:1997-04-15
申请号:US429377
申请日:1995-04-26
CPC分类号: G01B11/306 , H01L22/12
摘要: The apparatus (10) includes a flat transparent surface (30) and two angled mirrored surfaces (32, 34) which direct the light to the ball grid array (12) on the underside of the semiconductor device (14) positioned on the flat transparent surface (30) in a live bug mode. The mirrored surfaces (32, 34) also direct the image of the ball grid array (12) to an image capturer (18) such as a video camera. The focus information of each solder ball is used to determine the distance to the tips of each solder ball. The coplanarity of the ball grid array can then be determined and/or verified.
摘要翻译: 装置(10)包括平坦的透明表面(30)和两个成角度的镜面(32,34),其将光引导到位于平坦透明的半导体器件(14)的下侧上的球栅阵列(12) 表面(30)处于活动状态。 镜像表面(32,34)还将球栅阵列(12)的图像引导到诸如摄像机的图像捕获器(18)。 每个焊球的焦点信息用于确定与每个焊球的尖端的距离。 然后可以确定和/或验证球栅阵列的共面性。
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