公开(公告)号：US07321113B2

公开(公告)日：2008-01-22

申请号：US11137675

申请日：2005-05-25

申请人： Alva E. Hare ,  Keith M. Hinrichs ,  William G. Thorburn

发明人： Alva E. Hare ,  Keith M. Hinrichs ,  William G. Thorburn

IPC分类号： H03M1/48

CPC分类号： G01D5/2458

摘要： An absolute encoder employs multiple sub-encoders of different resolutions and a linking algorithm for combining the sub-encoder outputs to form an accurate, high-resolution position estimate. The sub-encoders can utilize edge modulation of a main grating track, sloped patterns of successively higher periods, and other types of scale patterns. The sub-encoders can also use a variety of detector types suitable for the patterns being used. In one linking approach, pairs of tracks are linked together successively by applying a phase shift to the coarser track and then combining it with the finer track such that the transitions of the coarse track estimates become aligned with those of the finer track, whereupon the values can be combined to form a linked position estimate. In another approach, beat tracks are calculated from physical tracks of similar period, and the beat tracks are used as the coarser tracks in the linking process. A wafer-handling robot employs the absolute encoder for controlling rotation of multiple joints.

摘要翻译： 绝对编码器采用不同分辨率的多个子编码器和用于组合子编码器输出的链接算法，以形成准确的高分辨率位置估计。 子编码器可以利用主光栅的边缘调制，连续更高周期的倾斜图案和其他类型的刻度图案。 子编码器还可以使用适合所使用的图案的各种检测器类型。 在一种链接方法中，通过对较粗的轨道施加相移然后将其与更细的轨道组合，使得成对的轨道连续地连接在一起，使得粗略轨道估计的转变与较细轨道的转换对准，于是值 可以组合形成一个链接的位置估计。 在另一种方法中，拍摄轨迹由相似周期的物理轨道计算，拍子轨迹用作链接过程中较粗的轨道。 晶片处理机器人采用绝对编码器来控制多个关节的旋转。

公开(公告)号：US07324212B2

公开(公告)日：2008-01-29

申请号：US11712068

申请日：2007-02-28

申请人： Donald K. Mitchell ,  William G. Thorburn

发明人： Donald K. Mitchell ,  William G. Thorburn

IPC分类号： G01B11/02 ,  G01B9/02 ,  G01D5/36

CPC分类号： G01D5/38

摘要： An optical encoder includes a source of a light beam, an optical grating that generates a spatial pattern of interference fringes, and an optical detector which includes generally elongated detector elements that sample the interference fringe pattern at spatially separated locations along the direction of motion of the grating. Each detector element has one or more segments slanted along the direction of motion of the grating by an integer multiple of the period of an undesirable harmonic component of the fringe pattern, thereby spatially integrating the harmonic component and suppressing its contribution to an output of the detector. One specific detector type includes parallel elongated rectangular elements in a rectangular array that is rotated slightly about a Z axis; another type includes detector elements arranged to form a non-rectangular parallelogram. Another type of detector includes detector elements that each have multiple elongated rectangular segments which may be arranged into two non-parallel sets. The two sets can be further arranged in an alternating fashion so as to impart a zig-zag or chevron shape to each detector element.

摘要翻译： 光学编码器包括光束源，产生干涉条纹的空间图案的光栅，以及光学检测器，其包括大致细长的检测器元件，该检测器元件沿着沿着该方向的运动方向的空间分离的位置对干涉条纹图案进行采样 光栅。 每个检测器元件具有沿着光栅运动方向倾斜的一个或多个沿条纹图案的不需要的谐波分量的周期的整数倍，从而空间积分谐波分量并抑制其对检测器的输出的贡献 。 一种特定的检测器类型包括矩形阵列中的平行细长矩形元件，其围绕Z轴稍微旋转; 另一种类型包括布置成形成非矩形平行四边形的检测器元件。 另一种类型的检测器包括检测器元件，每个检测器元件具有可以被布置成两个非平行组的多个细长矩形段。 这两组可以进一步以交替的方式布置，以便向每个检测器元件赋予锯齿形或人字形。

公开(公告)号：US07126109B2

公开(公告)日：2006-10-24

申请号：US10867096

申请日：2004-06-14

申请人： Andrew Goldman ,  William G. Thorburn

发明人： Andrew Goldman ,  William G. Thorburn

IPC分类号： G01D5/34

CPC分类号： G01D5/38 ,  G01D5/36

摘要： An encoder calculates position error values and applies compensation values to encoder position measurements in-situ. The encoder includes a scale and a multi-section detector for detecting a spatially periodic pattern, such as an optical interference pattern, produced by the scale. The detector includes spatially separated first and second sections. A signal processor estimates respective phase values from detector sections and calculates a phase difference reflecting a spatial position error in the scale. A compensation value is calculated from the phase difference and included in the estimate of the scale position to compensate for this spatial position error. The compensation values may be calculated and used on the fly, or calculated and saved during an in-situ calibration operation and then utilized during normal operation to compensate uncorrected measurements.

摘要翻译： 编码器计算位置误差值，并将原位补偿值应用于编码器位置测量。 编码器包括标尺和多段检测器，用于检测由刻度尺产生的空间周期性图案，例如光学干涉图案。 检测器包括空间分离的第一和第二部分。 信号处理器估计来自检测器部分的各个相位值，并计算反映刻度中的空间位置误差的相位差。 补偿值根据相位差计算并包含在比例尺位置的估计中以补偿该空间位置误差。 补偿值可以在飞行中计算和使用，或者在原位校准操作期间计算和保存，然后在正常操作期间用于补偿未校正的测量。

公开(公告)号：US07343693B2

公开(公告)日：2008-03-18

申请号：US11598257

申请日：2006-11-09

申请人： Donald K. Mitchell ,  Donald L. Grimes ,  William G. Thorburn ,  Stuart A. Dodson, II ,  Keith M. Hinrichs ,  Andrew Goldman ,  Joel M. Petersen ,  Christopher C. Rich

发明人： Donald K. Mitchell ,  Donald L. Grimes ,  William G. Thorburn ,  Stuart A. Dodson, II ,  Keith M. Hinrichs ,  Andrew Goldman ,  Joel M. Petersen ,  Christopher C. Rich

IPC分类号： G01B11/02

CPC分类号： G01D5/34707 ,  G01D5/347 ,  G01D5/366

摘要： A flexible optical marker is applied to an optical scale substrate to make an optical scale assembly for an optical position encoder. The marker may be a limit marker, index marker, or other type of marker. The marker substrate may be a plastic film such as polyester, singulated from a “recombine” roll created by a web process. The marker has a microstructured pattern on one surface that is covered with a reflective metal coating. The marker also has an adhesive layer and is affixed to the optical scale substrate by a process of aligning the marker to an edge of the scale and then applying pressure to the upper surface of the marker. The marker may be applied with a handle portion that is separated from the marker after the marker is affixed. The marker may be especially useful with a flexible scale substrate such as a metal tape substrate. By affixing the marker to the scale substrate as a separate step of making an encoder scale, various benefits such as reduced inventory, cost, and lead time may be achieved.

摘要翻译： 将柔性光学标记应用于光学尺度基板以制造用于光学位置编码器的光学尺度组件。 标记可以是限制标记，指数标记或其他类型的标记。 标记基底可以是由通过网状过程产生的“重组”辊形成的塑料膜，例如聚酯。 标记在一个表面上具有被反射金属涂层覆盖的微结构图案。 标记还具有粘合剂层，并通过将标记物与标尺的边缘对准并且然后向标记物的上表面施加压力的方法固定到光学秤基底上。 标记物可以在标记物固定之后施加与标记物分离的手柄部分。 该标记可能对于诸如金属带基材之类的柔性标尺基底特别有用。 通过将标记附着到刻度尺基板上，作为制作编码器刻度的单独步骤，可以实现诸如库存减少，成本和提前期的各种益处。

公开(公告)号：US07183537B2

公开(公告)日：2007-02-27

申请号：US10737199

申请日：2003-12-16

申请人： William G. Thorburn

发明人： William G. Thorburn

IPC分类号： G01D5/34

CPC分类号： G01D5/285

摘要： A rotary position sensor employs an offset beam forming optical element such as a tilted mirror or a diffraction grating. The axis of the light beam from a source can be parallel to the rotational axis or tilted at a predetermined angle. One or multiple spots of light from reflected/diffracted beam(s) are located on a generally elliptical path on an array of detectors. A detector that is photosensitive only along the elliptical path may be employed, the detector being divided into multiple regions to enable a processor to identify the azimuthal angle of the spot. When a diffraction grating is employed, return beams corresponding to positive first and negative first diffracted orders are generated, and these are displaced substantially symmetrically with respect to the axis of the source. The use of multiple beams can reduce sensitivity to mis-alignment errors. Some aspect of one or more of the beams, such as optical intensity or radial displacement, can be made unique to enable the processor to identify the angular position modulo 360 degrees.

摘要翻译： 旋转位置传感器使用诸如倾斜镜或衍射光栅的偏移波束形成光学元件。 来自光源的光束的轴线可以平行于旋转轴线或以预定角度倾斜。 来自反射/衍射光束的一个或多个光点位于检测器阵列上的大致椭圆形路径上。 可以使用仅沿着椭圆路径感光的检测器，检测器被分成多个区域，以使处理器能够识别光斑的方位角。 当使用衍射光栅时，产生对应于正的第一和第一衍射次数的返回光束，并且它们相对于光源的轴线基本对称地位移。 多个光束的使用可以降低误对准误差的灵敏度。 一个或多个光束的一些方面，例如光学强度或径向位移，可以是独特的，以使得处理器能够以360度方式识别角位置。

公开(公告)号：US5486923A

公开(公告)日：1996-01-23

申请号：US394224

申请日：1995-02-24

申请人： Donald K. Mitchell ,  William G. Thorburn

发明人： Donald K. Mitchell ,  William G. Thorburn

IPC分类号： G01B11/00 ,  G01D5/38 ,  G01B9/02

CPC分类号： G01D5/38

摘要： The apparatus disclosed herein employs a grating (13) which concentrates light at a preselected wavelength into the positive (33) and negative (35) first orders while minimizing the zeroth order (31). The grating (13) is illuminated with monochromatic light of the selected wavelength and a poly-phase periodic detector (25) has its sensing plane spaced from the grating a distance less than ##EQU1## where W is the width of the illuminated region of the grating. The period of the poly-phase detector is equal to P/2 so that each detector element (51) or phase responds principally to the natural interference between the positive and negative first orders without requiring magnification or redirection of the diffracted light. Preferably, the distance of the sensing plane from the grating (13) is greater than ##EQU2## so that the detector response does not include substantial components from diffraction orders higher than the first. Various embodiments of the invention are described including a wavefront compensation approach which greatly increases design freedom in the selection of grating and detector characteristics in implementing the present invention in practical and manufacturable devices.

摘要翻译： 本文公开的装置采用光栅（13），其将预选波长的光集中到正（33）和负（35）第一阶中，同时最小化零阶（31）。 光栅（13）被所选波长的单色光照射，并且多相周期性检测器（25）的感测平面与光栅隔开距离小于的距离，其中W是照明区域的宽度 光栅。 多相检测器的周期等于P / 2，使得每个检测器元件（51）或相位主要响应正和负第一阶之间的自然干涉，而不需要衍射光的放大或重定向。 优选地，感测平面与光栅（13）的距离大于“IMAGE”，使得检测器响应不包括高于第一衍射级的衍射级的实质部件。 描述了本发明的各种实施例，其包括波前补偿方法，其在实际和可制造的装置中实现本发明时大大增加了选择光栅和检测器特性的设计自由度。

公开(公告)号：US07253395B2

公开(公告)日：2007-08-07

申请号：US10990769

申请日：2004-11-17

申请人： Alva E. Hare ,  William G. Thorburn ,  Keith M. Hinrichs

发明人： Alva E. Hare ,  William G. Thorburn ,  Keith M. Hinrichs

IPC分类号： H03M1/48

CPC分类号： G01D5/2458

摘要： An absolute encoder employs multiple sub-encoders of different resolutions and a linking algorithm for combining the sub-encoder outputs to form an accurate, high-resolution position estimate. The sub-encoders can utilize edge modulation of a main grating track, sloped patterns of successively higher periods, and other types of scale patterns. The sub-encoders can also use a variety of detector types suitable for the patterns being used. In one linking approach, pairs of tracks are linked together successively by applying a phase shift to the coarser track and then combining it with the finer track such that the transitions of the coarse track estimates become aligned with those of the finer track, whereupon the values can be combined to form a linked position estimate. In another approach, beat tracks are calculated from physical tracks of similar period, and the beat tracks are used as the coarser tracks in the linking process.

摘要翻译： 绝对编码器采用不同分辨率的多个子编码器和用于组合子编码器输出的链接算法，以形成准确的高分辨率位置估计。 子编码器可以利用主光栅的边缘调制，连续更高周期的倾斜图案和其他类型的刻度图案。 子编码器还可以使用适合所使用的图案的各种检测器类型。 在一种链接方法中，通过对较粗的轨道施加相移然后将其与更细的轨道组合，使得成对的轨道连续地连接在一起，使得粗略轨道估计的转变与较细轨道的转变对准，于是值 可以组合形成一个链接的位置估计。 在另一种方法中，拍摄轨迹由相似周期的物理轨道计算，拍子轨迹用作链接过程中较粗的轨道。

公开(公告)号：US07067797B1

公开(公告)日：2006-06-27

申请号：US10941640

申请日：2004-09-15

申请人： Donald K. Mitchell ,  William G. Thorburn ,  Andrew Goldman ,  Keith M. Hinrichs

发明人： Donald K. Mitchell ,  William G. Thorburn ,  Andrew Goldman ,  Keith M. Hinrichs

IPC分类号： G01D5/34

CPC分类号： G01D5/34707

摘要： An optical encoder includes an optical source, a scale, an optical detector and signal processing circuitry. The scale is operative with a light beam from the source to generate an optical pattern such as a line pattern extending in an X direction of relative movement between the scale and the source. The detector generates analog detector output signals indicative of the location of the optical pattern on the detector in an alignment direction orthogonal to the X direction. The detector may include two bi-cell elements spaced apart in the X direction, each element including two cells of complementary shape, such as a sharks-tooth. The signal processing circuitry operates in response to the detector output signals to generate an alignment value indicating a polarity and a magnitude of misalignment between the detector and the scale in the alignment direction. A method of providing information to a user regarding alignment of a detector and an encoder scale employs a graphical alignment indicator displayed on a computer display. The graphical alignment indicator has a bipolar indicator scale and a marker whose location on the scale is based on the alignment values such that the magnitude and polarity of misalignment is indicated.

摘要翻译： 光学编码器包括光源，刻度，光学检测器和信号处理电路。 该刻度与来自光源的光束一起工作以产生光学图案，例如在刻度尺和源极之间的相对运动的X方向上延伸的线图案。 检测器产生模拟检测器输出信号，其指示在与X方向正交的对准方向上的检测器上的光学图案的位置。 检测器可以包括沿X方向间隔开的两个双电池元件，每个元件包括互补形状的两个电池，例如鲨鱼齿。 信号处理电路响应于检测器输出信号而工作，以产生指示检测器和标尺在对准方向上的偏移的极性和大小的对准值。 向用户提供关于检测器和编码器刻度的对准的信息的​​方法采用显示在计算机显示器上的图形对准指示符。 图形对准指示器具有双极指示器刻度和标尺，其刻度上的位置基于对准值，使得指示未对准的大小和极性。

公开(公告)号：US5783752A

公开(公告)日：1998-07-21

申请号：US803420

申请日：1997-02-20

申请人： William G. Thorburn ,  Donald K. Mitchell ,  Bruce A. Horwitz

发明人： William G. Thorburn ,  Donald K. Mitchell ,  Bruce A. Horwitz

IPC分类号： G01B9/02 ,  G01B11/16

CPC分类号： G01D5/266

摘要： Position of a diffusely scattering surface is detected by interfering backscattered light from respective input beams which illuminate a common spot. Through polarization of the input beams and appropriate filtering, backscattered light is isolated from specularly reflected light and interfered to form a fringe pattern on a detector. The position sensor has particular applicability as a push pin sensor in a hard disk servo system.

摘要翻译： 通过干扰照射公共点的相应输入光束的反向散射光来检测漫射表面的位置。 通过输入光束的偏振和适当的滤波，反向散射光与镜面反射光隔离，并被干扰以在检测器上形成条纹图案。 该位置传感器作为硬盘伺服系统中的推针传感器具有特别的适用性。

公开(公告)号：US07368705B2

公开(公告)日：2008-05-06

申请号：US11770094

申请日：2007-06-28

申请人： Alva E. Hare ,  William G. Thorburn ,  Keith M. Hinrichs

发明人： Alva E. Hare ,  William G. Thorburn ,  Keith M. Hinrichs

IPC分类号： G01D5/34

CPC分类号： G01D5/2458

摘要： An absolute encoder employs multiple sub-encoders of different resolutions and a linking algorithm for combining the sub-encoder outputs to form an accurate, high-resolution position estimate. The sub-encoders can utilize edge modulation of a main grating track, sloped patterns of successively higher periods, and other types of scale patterns. The sub-encoders can also use a variety of detector types suitable for the patterns being used. In one linking approach, pairs of tracks are linked together successively by applying a phase shift to the coarser track and then combining it with the finer track such that the transitions of the coarse track estimates become aligned with those of the finer track, whereupon the values can be combined to form a linked position estimate. In another approach, beat tracks are calculated from physical tracks of similar period, and the beat tracks are used as the coarser tracks in the linking process.

摘要翻译： 绝对编码器采用不同分辨率的多个子编码器和用于组合子编码器输出的链接算法，以形成准确的高分辨率位置估计。 子编码器可以利用主光栅的边缘调制，连续更高周期的倾斜图案和其他类型的刻度图案。 子编码器还可以使用适合所使用的图案的各种检测器类型。 在一种链接方法中，通过对较粗的轨道施加相移然后将其与更细的轨道组合，使得成对的轨道连续地连接在一起，使得粗略轨道估计的转变与较细轨道的转变对准，于是值 可以组合形成一个链接的位置估计。 在另一种方法中，拍摄轨迹由相似周期的物理轨道计算，拍子轨迹用作链接过程中较粗的轨道。