Combined atomic layer deposition and damascene processing for definition of narrow trenches
    1.
    发明授权
    Combined atomic layer deposition and damascene processing for definition of narrow trenches 失效
    用于定义窄沟槽的组合原子层沉积和镶嵌加工

    公开(公告)号:US06949833B2

    公开(公告)日:2005-09-27

    申请号:US10273195

    申请日:2002-10-17

    IPC分类号: G11B5/31 H01L23/48 H01L23/58

    CPC分类号: G11B5/3163 G11B5/3116

    摘要: The invention offers a structure that includes a substrate with a top surface and a bottom surface, an etched dielectric layer having sidewalls and an upper surface, wherein the etched dielectric layer with a thickness of v, is positioned upon a first portion of the top surface of the substrate but not positioned upon a second portion of the top surface of the substrate having a width equal to x, an atomic layer deposited (ALD) film with a thickness of y, positioned upon the upper surface of the etched dielectric layer, the sidewalls of the etched dielectric layer, and the second portion of the top surface of the substrate, and a trench formed by the atomic layer with a width equal to x−2y. The invention also offers a method of forming a structure with a trench that includes the steps of depositing a dielectric layer on a substrate, forming a patterned photoresist on the dielectric layer, forming a space having a width x, by etching the dielectric layer, removing the patterned photoresist to form a gap having sidewalls and a bottom, and depositing an atomic layer with a thickness of y on the etched dielectric layer, and the sidewalls and the bottom of the gap, wherein a trench is formed by the atomic layer deposited on the sidewalls and bottom of the gap.

    摘要翻译: 本发明提供了一种结构,其包括具有顶表面和底表面的基底,具有侧壁和上表面的蚀刻介电层,其中具有厚度v的蚀刻介电层位于顶表面的第一部分 的基底,但不位于具有等于x的宽度的x的衬底的顶表面的第二部分上,厚度为y的原子层沉积(ALD)膜位于蚀刻介电层的上表面上, 蚀刻的介电层的侧壁和衬底的顶表面的第二部分以及由宽度等于x-2y的原子层形成的沟槽。 本发明还提供一种形成具有沟槽的结构的方法,该方法包括以下步骤:在衬底上沉积电介质层,在电介质层上形成图案化的光致抗蚀剂,通过蚀刻介电层形成具有宽度x的空间, 图案化的光致抗蚀剂以形成具有侧壁和底部的间隙,并且在蚀刻的电介质层上沉积厚度为y的原子层以及间隙的侧壁和底部,其中沟槽由原子层沉积在 间隙的侧壁和底部。

    Structure to achieve thermally stable high sensitivity and linear range in bridge GMR sensor using SAF magnetic alignments
    2.
    发明授权
    Structure to achieve thermally stable high sensitivity and linear range in bridge GMR sensor using SAF magnetic alignments 失效
    结构实现热稳定的高灵敏度和线性范围的桥梁GMR传感器使用SAF磁性对准

    公开(公告)号:US06771472B1

    公开(公告)日:2004-08-03

    申请号:US10314458

    申请日:2002-12-06

    IPC分类号: G11B539

    摘要: The invention provides a magnetic sensor having a first opposing pair and a second opposing pair of resistive elements configured in a Wheatstone bridge, wherein the resistive elements are a synthetic antiferromagnetic giant magnetoresistive sensor having a reference layer and a pinned layer of different thicknesses, wherein the first opposing pair has a net magnetic moment that is opposite to that of the second opposing pair, and wherein the first opposing pair has a thicker reference layer than pinned layer, and the second opposing pair has a thicker pinned layer than reference layer. Other embodiments of the invention have resistive elements that are opposingly bilayer and trilayer synthetic antiferromagnetic giant magnetoresistive sensors, or opposingly synthetic and standard antiferromagnetic giant magnetoresistive sensors.

    摘要翻译: 本发明提供一种磁传感器,其具有配置在惠斯通电桥中的第一相对对和第二相对对的电阻元件,其中电阻元件是具有参考层和不同厚度的钉扎层的合成反铁磁巨磁阻传感器,其中, 第一相对对具有与第二相对对相反的净磁矩,并且其中第一相对对具有比被钉扎层更厚的参考层,并且第二相对对具有比参考层更厚的钉扎层。 本发明的其它实施例具有相反的双层和三层合成反铁磁巨磁阻传感器或相反的合成和标准反铁磁巨磁阻传感器的电阻元件。

    Magnetic tape drive having improved servo control
    3.
    发明授权
    Magnetic tape drive having improved servo control 失效
    磁带驱动器具有改进的伺服控制

    公开(公告)号:US6005737A

    公开(公告)日:1999-12-21

    申请号:US990586

    申请日:1997-12-15

    IPC分类号: G11B21/02

    CPC分类号: G11B21/027

    摘要: A magnetic tape drive has a magnetic head, a magnetic tape medium, and a servo controller. The magnetic head has N servo readers and a plurality of transducing heads for transducing with separate data tracks in each range. The magnetic tape medium is proximate the magnetic head, and has first and second servo tracks and 2N-1 ranges. Each range has a plurality of parallel data tracks. The servo controller, which is responsive to servo read signals produced by two of the servo readers, positions the magnetic head so that the plurality of transducing heads transduce with one of the 2N-1 ranges. Servo read signals produced by one of the N servo readers reading from the first servo track and a different one of the N servo readers reading from the second servo track define one range, while servo read signals produced by two servo readers reading from one of the first and the second servo tracks define 2(N-1) of the ranges.

    摘要翻译: 磁带驱动器具有磁头,磁带介质和伺服控制器。 磁头具有N个伺服读取器和多个转换头,用于在每个范围内用单独的数据轨道进行换能。 磁带介质靠近磁头,并具有第一和第二伺服磁道和2N-1范围。 每个范围具有多个并行数据轨道。 伺服控制器响应由两个伺服读取器产生的伺服读取信号,定位磁头,使得多个换能头与2N-1范围中的一个变换。 从第一伺服轨道读取的N个伺服读取器之一产生的伺服读取信号和从第二伺服轨道读取的N个伺服读取器中的不同的一个定义一个范围,而由两个伺服读取器产生的伺服读取信号从 第一和第二伺服磁道定义2(N-1)个范围。